3/29/2012	9:13:33 AM	Main Vac valve closed
3/29/2012	9:13:56 AM	Main Vac valve opened
3/29/2012	9:14:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2012	9:14:19 AM	Recipe started at 9:14 AM
3/29/2012	9:14:19 AM	Helium valve closed
3/29/2012	9:14:19 AM	H2 valve closed
3/29/2012	9:14:19 AM	BCl3 valve closed
3/29/2012	9:14:19 AM	PH3 valve closed
3/29/2012	9:14:19 AM	SiCl4 pre valve closed
3/29/2012	9:14:19 AM	SiCl4 post valve closed
3/29/2012	9:14:19 AM	Main Vac valve closed
3/29/2012	9:14:19 AM	Bypass valve closed
3/29/2012	9:14:19 AM	Bubbler valve closed
3/29/2012	9:14:19 AM	Helium MFC set to  0.000000
3/29/2012	9:14:19 AM	H2 MFC set to  0.000000
3/29/2012	9:14:19 AM	BCl3 MFC set to  0.000000
3/29/2012	9:14:19 AM	PH3 MFC set to  0.000000
3/29/2012	9:14:19 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:14:19 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:14:20 AM	Tube furnace set to 0
3/29/2012	9:14:23 AM	H2 valve closed
3/29/2012	9:14:23 AM	BCl3 valve closed
3/29/2012	9:14:23 AM	PH3 valve closed
3/29/2012	9:14:23 AM	SiCl4 pre valve closed
3/29/2012	9:14:23 AM	SiCl4 post valve closed
3/29/2012	9:14:23 AM	Main Vac valve closed
3/29/2012	9:14:23 AM	Bypass valve closed
3/29/2012	9:14:23 AM	Bubbler valve closed
3/29/2012	9:14:23 AM	Helium valve opened
3/29/2012	9:14:23 AM	Helium MFC set to  500.000000
3/29/2012	9:14:23 AM	H2 MFC set to  0.000000
3/29/2012	9:14:23 AM	BCl3 MFC set to  0.000000
3/29/2012	9:14:23 AM	PH3 MFC set to  0.000000
3/29/2012	9:14:23 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:14:23 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:14:23 AM	Tube furnace set to 0
3/29/2012	9:15:25 AM	Helium valve closed
3/29/2012	9:15:25 AM	H2 valve closed
3/29/2012	9:15:25 AM	BCl3 valve closed
3/29/2012	9:15:25 AM	PH3 valve closed
3/29/2012	9:15:25 AM	SiCl4 pre valve closed
3/29/2012	9:15:25 AM	SiCl4 post valve closed
3/29/2012	9:15:25 AM	Main Vac valve closed
3/29/2012	9:15:25 AM	Bypass valve closed
3/29/2012	9:15:25 AM	Bubbler valve closed
3/29/2012	9:15:25 AM	Helium MFC set to  0.000000
3/29/2012	9:15:25 AM	H2 MFC set to  0.000000
3/29/2012	9:15:25 AM	BCl3 MFC set to  0.000000
3/29/2012	9:15:25 AM	PH3 MFC set to  0.000000
3/29/2012	9:15:25 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:15:25 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:15:25 AM	Tube furnace set to 0
3/29/2012	9:15:26 AM	Run finished at 9:15 AM
3/29/2012	9:15:26 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2012	9:25:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2012	9:26:00 AM	Recipe started at 9:25 AM
3/29/2012	9:26:00 AM	Helium valve closed
3/29/2012	9:26:00 AM	H2 valve closed
3/29/2012	9:26:00 AM	BCl3 valve closed
3/29/2012	9:26:00 AM	PH3 valve closed
3/29/2012	9:26:00 AM	SiCl4 pre valve closed
3/29/2012	9:26:00 AM	SiCl4 post valve closed
3/29/2012	9:26:00 AM	Main Vac valve closed
3/29/2012	9:26:00 AM	Bubbler valve closed
3/29/2012	9:26:00 AM	Bypass valve opened
3/29/2012	9:26:00 AM	Helium MFC set to  0.000000
3/29/2012	9:26:00 AM	H2 MFC set to  0.000000
3/29/2012	9:26:00 AM	BCl3 MFC set to  0.000000
3/29/2012	9:26:00 AM	PH3 MFC set to  0.000000
3/29/2012	9:26:00 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:26:00 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:26:00 AM	Tube furnace set to 0
3/29/2012	9:27:05 AM	Helium valve closed
3/29/2012	9:27:05 AM	H2 valve closed
3/29/2012	9:27:05 AM	BCl3 valve closed
3/29/2012	9:27:05 AM	PH3 valve closed
3/29/2012	9:27:05 AM	SiCl4 pre valve closed
3/29/2012	9:27:05 AM	SiCl4 post valve closed
3/29/2012	9:27:05 AM	Main Vac valve closed
3/29/2012	9:27:05 AM	Bubbler valve closed
3/29/2012	9:27:05 AM	Bypass valve opened
3/29/2012	9:27:05 AM	Helium MFC set to  0.000000
3/29/2012	9:27:05 AM	H2 MFC set to  0.000000
3/29/2012	9:27:05 AM	BCl3 MFC set to  0.000000
3/29/2012	9:27:05 AM	PH3 MFC set to  0.000000
3/29/2012	9:27:05 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:27:05 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:27:05 AM	Tube furnace set to 0
3/29/2012	9:28:05 AM	Helium valve closed
3/29/2012	9:28:05 AM	H2 valve closed
3/29/2012	9:28:05 AM	BCl3 valve closed
3/29/2012	9:28:05 AM	PH3 valve closed
3/29/2012	9:28:05 AM	SiCl4 pre valve closed
3/29/2012	9:28:05 AM	SiCl4 post valve closed
3/29/2012	9:28:05 AM	Bypass valve closed
3/29/2012	9:28:05 AM	Bubbler valve closed
3/29/2012	9:28:05 AM	Main Vac valve opened
3/29/2012	9:28:05 AM	Helium MFC set to  0.000000
3/29/2012	9:28:05 AM	H2 MFC set to  0.000000
3/29/2012	9:28:05 AM	BCl3 MFC set to  0.000000
3/29/2012	9:28:05 AM	PH3 MFC set to  0.000000
3/29/2012	9:28:05 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:28:05 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:28:05 AM	Tube furnace set to 0
3/29/2012	9:28:06 AM	Run finished at 9:28 AM
3/29/2012	9:28:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2012	9:33:45 AM	Recipe started at 9:33 AM
3/29/2012	9:33:45 AM	Helium valve closed
3/29/2012	9:33:45 AM	H2 valve closed
3/29/2012	9:33:45 AM	BCl3 valve closed
3/29/2012	9:33:45 AM	PH3 valve closed
3/29/2012	9:33:45 AM	SiCl4 pre valve closed
3/29/2012	9:33:45 AM	SiCl4 post valve closed
3/29/2012	9:33:45 AM	Bypass valve closed
3/29/2012	9:33:45 AM	Bubbler valve closed
3/29/2012	9:33:45 AM	Main Vac valve opened
3/29/2012	9:33:45 AM	Helium MFC set to  0.000000
3/29/2012	9:33:45 AM	H2 MFC set to  0.000000
3/29/2012	9:33:45 AM	BCl3 MFC set to  0.000000
3/29/2012	9:33:45 AM	PH3 MFC set to  0.000000
3/29/2012	9:33:45 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:33:45 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:33:45 AM	Tube furnace set to 100
3/29/2012	9:34:15 AM	H2 valve closed
3/29/2012	9:34:15 AM	BCl3 valve closed
3/29/2012	9:34:15 AM	PH3 valve closed
3/29/2012	9:34:15 AM	SiCl4 pre valve closed
3/29/2012	9:34:15 AM	SiCl4 post valve closed
3/29/2012	9:34:15 AM	Bypass valve closed
3/29/2012	9:34:15 AM	Bubbler valve closed
3/29/2012	9:34:15 AM	Helium valve opened
3/29/2012	9:34:15 AM	Main Vac valve opened
3/29/2012	9:34:15 AM	Helium MFC set to  20.000000
3/29/2012	9:34:15 AM	H2 MFC set to  0.000000
3/29/2012	9:34:15 AM	BCl3 MFC set to  0.000000
3/29/2012	9:34:15 AM	PH3 MFC set to  0.000000
3/29/2012	9:34:15 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:34:15 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:34:16 AM	Tube furnace set to 100
3/29/2012	9:34:46 AM	Helium valve closed
3/29/2012	9:34:46 AM	H2 valve closed
3/29/2012	9:34:46 AM	BCl3 valve closed
3/29/2012	9:34:46 AM	PH3 valve closed
3/29/2012	9:34:46 AM	SiCl4 pre valve closed
3/29/2012	9:34:46 AM	SiCl4 post valve closed
3/29/2012	9:34:46 AM	Bypass valve closed
3/29/2012	9:34:46 AM	Bubbler valve closed
3/29/2012	9:34:46 AM	Main Vac valve opened
3/29/2012	9:34:46 AM	Helium MFC set to  0.000000
3/29/2012	9:34:46 AM	H2 MFC set to  0.000000
3/29/2012	9:34:46 AM	BCl3 MFC set to  0.000000
3/29/2012	9:34:46 AM	PH3 MFC set to  0.000000
3/29/2012	9:34:46 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:34:46 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:34:46 AM	Tube furnace set to 100
3/29/2012	9:35:16 AM	H2 valve closed
3/29/2012	9:35:16 AM	BCl3 valve closed
3/29/2012	9:35:16 AM	PH3 valve closed
3/29/2012	9:35:16 AM	SiCl4 pre valve closed
3/29/2012	9:35:16 AM	SiCl4 post valve closed
3/29/2012	9:35:16 AM	Bypass valve closed
3/29/2012	9:35:16 AM	Bubbler valve closed
3/29/2012	9:35:16 AM	Helium valve opened
3/29/2012	9:35:16 AM	Main Vac valve opened
3/29/2012	9:35:16 AM	Helium MFC set to  20.000000
3/29/2012	9:35:16 AM	H2 MFC set to  0.000000
3/29/2012	9:35:16 AM	BCl3 MFC set to  0.000000
3/29/2012	9:35:16 AM	PH3 MFC set to  0.000000
3/29/2012	9:35:16 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:35:16 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:35:16 AM	Tube furnace set to 100
3/29/2012	9:35:46 AM	Helium valve closed
3/29/2012	9:35:46 AM	H2 valve closed
3/29/2012	9:35:46 AM	BCl3 valve closed
3/29/2012	9:35:46 AM	PH3 valve closed
3/29/2012	9:35:46 AM	SiCl4 pre valve closed
3/29/2012	9:35:46 AM	SiCl4 post valve closed
3/29/2012	9:35:46 AM	Bypass valve closed
3/29/2012	9:35:46 AM	Bubbler valve closed
3/29/2012	9:35:46 AM	Main Vac valve opened
3/29/2012	9:35:46 AM	Helium MFC set to  0.000000
3/29/2012	9:35:46 AM	H2 MFC set to  0.000000
3/29/2012	9:35:46 AM	BCl3 MFC set to  0.000000
3/29/2012	9:35:46 AM	PH3 MFC set to  0.000000
3/29/2012	9:35:46 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:35:46 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:35:46 AM	Tube furnace set to 100
3/29/2012	9:36:16 AM	H2 valve closed
3/29/2012	9:36:16 AM	BCl3 valve closed
3/29/2012	9:36:16 AM	PH3 valve closed
3/29/2012	9:36:16 AM	SiCl4 pre valve closed
3/29/2012	9:36:16 AM	SiCl4 post valve closed
3/29/2012	9:36:16 AM	Bypass valve closed
3/29/2012	9:36:16 AM	Bubbler valve closed
3/29/2012	9:36:16 AM	Helium valve opened
3/29/2012	9:36:16 AM	Main Vac valve opened
3/29/2012	9:36:16 AM	Helium MFC set to  20.000000
3/29/2012	9:36:16 AM	H2 MFC set to  0.000000
3/29/2012	9:36:16 AM	BCl3 MFC set to  0.000000
3/29/2012	9:36:16 AM	PH3 MFC set to  0.000000
3/29/2012	9:36:16 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:36:16 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:36:17 AM	Tube furnace set to 100
3/29/2012	9:36:47 AM	Helium valve closed
3/29/2012	9:36:47 AM	H2 valve closed
3/29/2012	9:36:47 AM	BCl3 valve closed
3/29/2012	9:36:47 AM	PH3 valve closed
3/29/2012	9:36:47 AM	SiCl4 pre valve closed
3/29/2012	9:36:47 AM	SiCl4 post valve closed
3/29/2012	9:36:47 AM	Bypass valve closed
3/29/2012	9:36:47 AM	Bubbler valve closed
3/29/2012	9:36:47 AM	Main Vac valve opened
3/29/2012	9:36:47 AM	Helium MFC set to  0.000000
3/29/2012	9:36:47 AM	H2 MFC set to  0.000000
3/29/2012	9:36:47 AM	BCl3 MFC set to  0.000000
3/29/2012	9:36:47 AM	PH3 MFC set to  0.000000
3/29/2012	9:36:47 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:36:47 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:36:47 AM	Tube furnace set to 100
3/29/2012	9:37:17 AM	H2 valve closed
3/29/2012	9:37:17 AM	BCl3 valve closed
3/29/2012	9:37:17 AM	PH3 valve closed
3/29/2012	9:37:17 AM	SiCl4 pre valve closed
3/29/2012	9:37:17 AM	SiCl4 post valve closed
3/29/2012	9:37:17 AM	Bypass valve closed
3/29/2012	9:37:17 AM	Bubbler valve closed
3/29/2012	9:37:17 AM	Helium valve opened
3/29/2012	9:37:17 AM	Main Vac valve opened
3/29/2012	9:37:17 AM	Helium MFC set to  20.000000
3/29/2012	9:37:17 AM	H2 MFC set to  0.000000
3/29/2012	9:37:17 AM	BCl3 MFC set to  0.000000
3/29/2012	9:37:17 AM	PH3 MFC set to  0.000000
3/29/2012	9:37:17 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:37:17 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:37:17 AM	Tube furnace set to 100
3/29/2012	9:37:47 AM	Helium valve closed
3/29/2012	9:37:47 AM	H2 valve closed
3/29/2012	9:37:47 AM	BCl3 valve closed
3/29/2012	9:37:47 AM	PH3 valve closed
3/29/2012	9:37:47 AM	SiCl4 pre valve closed
3/29/2012	9:37:47 AM	SiCl4 post valve closed
3/29/2012	9:37:47 AM	Bypass valve closed
3/29/2012	9:37:47 AM	Bubbler valve closed
3/29/2012	9:37:47 AM	Main Vac valve opened
3/29/2012	9:37:47 AM	Helium MFC set to  0.000000
3/29/2012	9:37:47 AM	H2 MFC set to  0.000000
3/29/2012	9:37:47 AM	BCl3 MFC set to  0.000000
3/29/2012	9:37:47 AM	PH3 MFC set to  0.000000
3/29/2012	9:37:47 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:37:47 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:37:47 AM	Tube furnace set to 100
3/29/2012	9:38:17 AM	H2 valve closed
3/29/2012	9:38:17 AM	BCl3 valve closed
3/29/2012	9:38:17 AM	PH3 valve closed
3/29/2012	9:38:17 AM	SiCl4 pre valve closed
3/29/2012	9:38:17 AM	SiCl4 post valve closed
3/29/2012	9:38:17 AM	Bypass valve closed
3/29/2012	9:38:17 AM	Bubbler valve closed
3/29/2012	9:38:17 AM	Helium valve opened
3/29/2012	9:38:17 AM	Main Vac valve opened
3/29/2012	9:38:17 AM	Helium MFC set to  20.000000
3/29/2012	9:38:17 AM	H2 MFC set to  0.000000
3/29/2012	9:38:17 AM	BCl3 MFC set to  0.000000
3/29/2012	9:38:17 AM	PH3 MFC set to  0.000000
3/29/2012	9:38:17 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:38:17 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:38:17 AM	Tube furnace set to 100
3/29/2012	9:38:47 AM	Helium valve closed
3/29/2012	9:38:47 AM	H2 valve closed
3/29/2012	9:38:47 AM	BCl3 valve closed
3/29/2012	9:38:47 AM	PH3 valve closed
3/29/2012	9:38:47 AM	SiCl4 pre valve closed
3/29/2012	9:38:47 AM	SiCl4 post valve closed
3/29/2012	9:38:48 AM	Bypass valve closed
3/29/2012	9:38:48 AM	Bubbler valve closed
3/29/2012	9:38:48 AM	Main Vac valve opened
3/29/2012	9:38:48 AM	Helium MFC set to  0.000000
3/29/2012	9:38:48 AM	H2 MFC set to  0.000000
3/29/2012	9:38:48 AM	BCl3 MFC set to  0.000000
3/29/2012	9:38:48 AM	PH3 MFC set to  0.000000
3/29/2012	9:38:48 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:38:48 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:38:48 AM	Tube furnace set to 100
3/29/2012	9:39:18 AM	H2 valve closed
3/29/2012	9:39:18 AM	BCl3 valve closed
3/29/2012	9:39:18 AM	PH3 valve closed
3/29/2012	9:39:18 AM	SiCl4 pre valve closed
3/29/2012	9:39:18 AM	SiCl4 post valve closed
3/29/2012	9:39:18 AM	Bypass valve closed
3/29/2012	9:39:18 AM	Bubbler valve closed
3/29/2012	9:39:18 AM	Helium valve opened
3/29/2012	9:39:18 AM	Main Vac valve opened
3/29/2012	9:39:18 AM	Helium MFC set to  20.000000
3/29/2012	9:39:18 AM	H2 MFC set to  0.000000
3/29/2012	9:39:18 AM	BCl3 MFC set to  0.000000
3/29/2012	9:39:18 AM	PH3 MFC set to  0.000000
3/29/2012	9:39:18 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:39:18 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:39:18 AM	Tube furnace set to 100
3/29/2012	9:39:48 AM	Helium valve closed
3/29/2012	9:39:48 AM	H2 valve closed
3/29/2012	9:39:48 AM	BCl3 valve closed
3/29/2012	9:39:48 AM	PH3 valve closed
3/29/2012	9:39:48 AM	SiCl4 pre valve closed
3/29/2012	9:39:48 AM	SiCl4 post valve closed
3/29/2012	9:39:48 AM	Bypass valve closed
3/29/2012	9:39:48 AM	Bubbler valve closed
3/29/2012	9:39:48 AM	Main Vac valve opened
3/29/2012	9:39:48 AM	Helium MFC set to  0.000000
3/29/2012	9:39:48 AM	H2 MFC set to  0.000000
3/29/2012	9:39:48 AM	BCl3 MFC set to  0.000000
3/29/2012	9:39:48 AM	PH3 MFC set to  0.000000
3/29/2012	9:39:48 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:39:48 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:39:48 AM	Tube furnace set to 100
3/29/2012	9:40:18 AM	H2 valve closed
3/29/2012	9:40:18 AM	BCl3 valve closed
3/29/2012	9:40:18 AM	PH3 valve closed
3/29/2012	9:40:18 AM	SiCl4 pre valve closed
3/29/2012	9:40:18 AM	SiCl4 post valve closed
3/29/2012	9:40:18 AM	Bypass valve closed
3/29/2012	9:40:18 AM	Bubbler valve closed
3/29/2012	9:40:18 AM	Helium valve opened
3/29/2012	9:40:18 AM	Main Vac valve opened
3/29/2012	9:40:18 AM	Helium MFC set to  20.000000
3/29/2012	9:40:18 AM	H2 MFC set to  0.000000
3/29/2012	9:40:18 AM	BCl3 MFC set to  0.000000
3/29/2012	9:40:18 AM	PH3 MFC set to  0.000000
3/29/2012	9:40:18 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:40:18 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:40:18 AM	Tube furnace set to 100
3/29/2012	9:40:48 AM	Helium valve closed
3/29/2012	9:40:48 AM	H2 valve closed
3/29/2012	9:40:48 AM	BCl3 valve closed
3/29/2012	9:40:48 AM	PH3 valve closed
3/29/2012	9:40:48 AM	SiCl4 pre valve closed
3/29/2012	9:40:48 AM	SiCl4 post valve closed
3/29/2012	9:40:48 AM	Bypass valve closed
3/29/2012	9:40:48 AM	Bubbler valve closed
3/29/2012	9:40:48 AM	Main Vac valve opened
3/29/2012	9:40:48 AM	Helium MFC set to  0.000000
3/29/2012	9:40:48 AM	H2 MFC set to  0.000000
3/29/2012	9:40:48 AM	BCl3 MFC set to  0.000000
3/29/2012	9:40:48 AM	PH3 MFC set to  0.000000
3/29/2012	9:40:48 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:40:48 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:40:49 AM	Tube furnace set to 100
3/29/2012	9:41:19 AM	H2 valve closed
3/29/2012	9:41:19 AM	BCl3 valve closed
3/29/2012	9:41:19 AM	PH3 valve closed
3/29/2012	9:41:19 AM	SiCl4 pre valve closed
3/29/2012	9:41:19 AM	SiCl4 post valve closed
3/29/2012	9:41:19 AM	Bypass valve closed
3/29/2012	9:41:19 AM	Bubbler valve closed
3/29/2012	9:41:19 AM	Helium valve opened
3/29/2012	9:41:19 AM	Main Vac valve opened
3/29/2012	9:41:19 AM	Helium MFC set to  20.000000
3/29/2012	9:41:19 AM	H2 MFC set to  0.000000
3/29/2012	9:41:19 AM	BCl3 MFC set to  0.000000
3/29/2012	9:41:19 AM	PH3 MFC set to  0.000000
3/29/2012	9:41:19 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:41:19 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:41:19 AM	Tube furnace set to 100
3/29/2012	9:41:49 AM	Helium valve closed
3/29/2012	9:41:49 AM	H2 valve closed
3/29/2012	9:41:49 AM	BCl3 valve closed
3/29/2012	9:41:49 AM	PH3 valve closed
3/29/2012	9:41:49 AM	SiCl4 pre valve closed
3/29/2012	9:41:49 AM	SiCl4 post valve closed
3/29/2012	9:41:49 AM	Bypass valve closed
3/29/2012	9:41:49 AM	Bubbler valve closed
3/29/2012	9:41:49 AM	Main Vac valve opened
3/29/2012	9:41:49 AM	Helium MFC set to  0.000000
3/29/2012	9:41:49 AM	H2 MFC set to  0.000000
3/29/2012	9:41:49 AM	BCl3 MFC set to  0.000000
3/29/2012	9:41:49 AM	PH3 MFC set to  0.000000
3/29/2012	9:41:49 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:41:49 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:41:49 AM	Tube furnace set to 100
3/29/2012	9:42:19 AM	H2 valve closed
3/29/2012	9:42:19 AM	BCl3 valve closed
3/29/2012	9:42:19 AM	PH3 valve closed
3/29/2012	9:42:19 AM	SiCl4 pre valve closed
3/29/2012	9:42:19 AM	SiCl4 post valve closed
3/29/2012	9:42:19 AM	Bypass valve closed
3/29/2012	9:42:19 AM	Bubbler valve closed
3/29/2012	9:42:19 AM	Helium valve opened
3/29/2012	9:42:19 AM	Main Vac valve opened
3/29/2012	9:42:19 AM	Helium MFC set to  20.000000
3/29/2012	9:42:19 AM	H2 MFC set to  0.000000
3/29/2012	9:42:19 AM	BCl3 MFC set to  0.000000
3/29/2012	9:42:19 AM	PH3 MFC set to  0.000000
3/29/2012	9:42:19 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:42:19 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:42:19 AM	Tube furnace set to 100
3/29/2012	9:42:49 AM	Helium valve closed
3/29/2012	9:42:49 AM	H2 valve closed
3/29/2012	9:42:49 AM	BCl3 valve closed
3/29/2012	9:42:49 AM	PH3 valve closed
3/29/2012	9:42:49 AM	SiCl4 pre valve closed
3/29/2012	9:42:49 AM	SiCl4 post valve closed
3/29/2012	9:42:49 AM	Bypass valve closed
3/29/2012	9:42:49 AM	Bubbler valve closed
3/29/2012	9:42:49 AM	Main Vac valve opened
3/29/2012	9:42:49 AM	Helium MFC set to  0.000000
3/29/2012	9:42:49 AM	H2 MFC set to  0.000000
3/29/2012	9:42:49 AM	BCl3 MFC set to  0.000000
3/29/2012	9:42:49 AM	PH3 MFC set to  0.000000
3/29/2012	9:42:49 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:42:49 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:42:50 AM	Tube furnace set to 100
3/29/2012	9:43:20 AM	H2 valve closed
3/29/2012	9:43:20 AM	BCl3 valve closed
3/29/2012	9:43:20 AM	PH3 valve closed
3/29/2012	9:43:20 AM	SiCl4 pre valve closed
3/29/2012	9:43:20 AM	SiCl4 post valve closed
3/29/2012	9:43:20 AM	Bypass valve closed
3/29/2012	9:43:20 AM	Bubbler valve closed
3/29/2012	9:43:20 AM	Helium valve opened
3/29/2012	9:43:20 AM	Main Vac valve opened
3/29/2012	9:43:20 AM	Helium MFC set to  20.000000
3/29/2012	9:43:20 AM	H2 MFC set to  0.000000
3/29/2012	9:43:20 AM	BCl3 MFC set to  0.000000
3/29/2012	9:43:20 AM	PH3 MFC set to  0.000000
3/29/2012	9:43:20 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:43:20 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:43:20 AM	Tube furnace set to 100
3/29/2012	9:43:50 AM	Helium valve closed
3/29/2012	9:43:50 AM	H2 valve closed
3/29/2012	9:43:50 AM	BCl3 valve closed
3/29/2012	9:43:50 AM	PH3 valve closed
3/29/2012	9:43:50 AM	SiCl4 pre valve closed
3/29/2012	9:43:50 AM	SiCl4 post valve closed
3/29/2012	9:43:50 AM	Bypass valve closed
3/29/2012	9:43:50 AM	Bubbler valve closed
3/29/2012	9:43:50 AM	Main Vac valve opened
3/29/2012	9:43:50 AM	Helium MFC set to  0.000000
3/29/2012	9:43:50 AM	H2 MFC set to  0.000000
3/29/2012	9:43:50 AM	BCl3 MFC set to  0.000000
3/29/2012	9:43:50 AM	PH3 MFC set to  0.000000
3/29/2012	9:43:50 AM	SiCl4 MFC set to  0.000000
3/29/2012	9:43:50 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:43:50 AM	Tube furnace set to 100
3/29/2012	9:43:51 AM	Run finished at 9:43 AM
3/29/2012	10:06:42 AM	Recipe started at 10:06 AM
3/29/2012	10:06:42 AM	Helium valve closed
3/29/2012	10:06:42 AM	H2 valve closed
3/29/2012	10:06:42 AM	BCl3 valve closed
3/29/2012	10:06:42 AM	PH3 valve closed
3/29/2012	10:06:42 AM	SiCl4 pre valve closed
3/29/2012	10:06:42 AM	SiCl4 post valve closed
3/29/2012	10:06:42 AM	Bypass valve closed
3/29/2012	10:06:42 AM	Bubbler valve closed
3/29/2012	10:06:42 AM	Main Vac valve opened
3/29/2012	10:06:42 AM	Helium MFC set to  0.000000
3/29/2012	10:06:42 AM	H2 MFC set to  0.000000
3/29/2012	10:06:42 AM	BCl3 MFC set to  0.000000
3/29/2012	10:06:42 AM	PH3 MFC set to  0.000000
3/29/2012	10:06:42 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:06:42 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:06:42 AM	Tube furnace set to 100
3/29/2012	10:06:55 AM	H2 valve closed
3/29/2012	10:06:55 AM	BCl3 valve closed
3/29/2012	10:06:55 AM	PH3 valve closed
3/29/2012	10:06:55 AM	SiCl4 pre valve closed
3/29/2012	10:06:55 AM	SiCl4 post valve closed
3/29/2012	10:06:55 AM	Bypass valve closed
3/29/2012	10:06:55 AM	Bubbler valve closed
3/29/2012	10:06:55 AM	Helium valve opened
3/29/2012	10:06:55 AM	Main Vac valve opened
3/29/2012	10:06:55 AM	Helium MFC set to  20.000000
3/29/2012	10:06:55 AM	H2 MFC set to  0.000000
3/29/2012	10:06:55 AM	BCl3 MFC set to  0.000000
3/29/2012	10:06:55 AM	PH3 MFC set to  0.000000
3/29/2012	10:06:55 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:06:55 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:06:55 AM	Tube furnace set to 100
3/29/2012	10:07:25 AM	Helium valve closed
3/29/2012	10:07:25 AM	H2 valve closed
3/29/2012	10:07:25 AM	BCl3 valve closed
3/29/2012	10:07:25 AM	PH3 valve closed
3/29/2012	10:07:25 AM	SiCl4 pre valve closed
3/29/2012	10:07:25 AM	SiCl4 post valve closed
3/29/2012	10:07:25 AM	Bypass valve closed
3/29/2012	10:07:25 AM	Bubbler valve closed
3/29/2012	10:07:25 AM	Main Vac valve opened
3/29/2012	10:07:25 AM	Helium MFC set to  0.000000
3/29/2012	10:07:25 AM	H2 MFC set to  0.000000
3/29/2012	10:07:25 AM	BCl3 MFC set to  0.000000
3/29/2012	10:07:25 AM	PH3 MFC set to  0.000000
3/29/2012	10:07:25 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:07:25 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:07:25 AM	Tube furnace set to 100
3/29/2012	10:07:55 AM	H2 valve closed
3/29/2012	10:07:55 AM	BCl3 valve closed
3/29/2012	10:07:55 AM	PH3 valve closed
3/29/2012	10:07:55 AM	SiCl4 pre valve closed
3/29/2012	10:07:55 AM	SiCl4 post valve closed
3/29/2012	10:07:55 AM	Bypass valve closed
3/29/2012	10:07:55 AM	Bubbler valve closed
3/29/2012	10:07:55 AM	Helium valve opened
3/29/2012	10:07:55 AM	Main Vac valve opened
3/29/2012	10:07:55 AM	Helium MFC set to  20.000000
3/29/2012	10:07:55 AM	H2 MFC set to  0.000000
3/29/2012	10:07:55 AM	BCl3 MFC set to  0.000000
3/29/2012	10:07:55 AM	PH3 MFC set to  0.000000
3/29/2012	10:07:55 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:07:55 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:07:55 AM	Tube furnace set to 100
3/29/2012	10:08:25 AM	Helium valve closed
3/29/2012	10:08:25 AM	H2 valve closed
3/29/2012	10:08:25 AM	BCl3 valve closed
3/29/2012	10:08:25 AM	PH3 valve closed
3/29/2012	10:08:25 AM	SiCl4 pre valve closed
3/29/2012	10:08:25 AM	SiCl4 post valve closed
3/29/2012	10:08:25 AM	Bypass valve closed
3/29/2012	10:08:25 AM	Bubbler valve closed
3/29/2012	10:08:25 AM	Main Vac valve opened
3/29/2012	10:08:25 AM	Helium MFC set to  0.000000
3/29/2012	10:08:25 AM	H2 MFC set to  0.000000
3/29/2012	10:08:25 AM	BCl3 MFC set to  0.000000
3/29/2012	10:08:25 AM	PH3 MFC set to  0.000000
3/29/2012	10:08:25 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:08:25 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:08:26 AM	Tube furnace set to 100
3/29/2012	10:08:56 AM	H2 valve closed
3/29/2012	10:08:56 AM	BCl3 valve closed
3/29/2012	10:08:56 AM	PH3 valve closed
3/29/2012	10:08:56 AM	SiCl4 pre valve closed
3/29/2012	10:08:56 AM	SiCl4 post valve closed
3/29/2012	10:08:56 AM	Bypass valve closed
3/29/2012	10:08:56 AM	Bubbler valve closed
3/29/2012	10:08:56 AM	Helium valve opened
3/29/2012	10:08:56 AM	Main Vac valve opened
3/29/2012	10:08:56 AM	Helium MFC set to  20.000000
3/29/2012	10:08:56 AM	H2 MFC set to  0.000000
3/29/2012	10:08:56 AM	BCl3 MFC set to  0.000000
3/29/2012	10:08:56 AM	PH3 MFC set to  0.000000
3/29/2012	10:08:56 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:08:56 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:08:56 AM	Tube furnace set to 100
3/29/2012	10:09:26 AM	Helium valve closed
3/29/2012	10:09:26 AM	H2 valve closed
3/29/2012	10:09:26 AM	BCl3 valve closed
3/29/2012	10:09:26 AM	PH3 valve closed
3/29/2012	10:09:26 AM	SiCl4 pre valve closed
3/29/2012	10:09:26 AM	SiCl4 post valve closed
3/29/2012	10:09:26 AM	Bypass valve closed
3/29/2012	10:09:26 AM	Bubbler valve closed
3/29/2012	10:09:26 AM	Main Vac valve opened
3/29/2012	10:09:26 AM	Helium MFC set to  0.000000
3/29/2012	10:09:26 AM	H2 MFC set to  0.000000
3/29/2012	10:09:26 AM	BCl3 MFC set to  0.000000
3/29/2012	10:09:26 AM	PH3 MFC set to  0.000000
3/29/2012	10:09:26 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:09:26 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:09:26 AM	Tube furnace set to 100
3/29/2012	10:09:56 AM	H2 valve closed
3/29/2012	10:09:56 AM	BCl3 valve closed
3/29/2012	10:09:56 AM	PH3 valve closed
3/29/2012	10:09:56 AM	SiCl4 pre valve closed
3/29/2012	10:09:56 AM	SiCl4 post valve closed
3/29/2012	10:09:56 AM	Bypass valve closed
3/29/2012	10:09:56 AM	Bubbler valve closed
3/29/2012	10:09:56 AM	Helium valve opened
3/29/2012	10:09:56 AM	Main Vac valve opened
3/29/2012	10:09:56 AM	Helium MFC set to  20.000000
3/29/2012	10:09:56 AM	H2 MFC set to  0.000000
3/29/2012	10:09:56 AM	BCl3 MFC set to  0.000000
3/29/2012	10:09:56 AM	PH3 MFC set to  0.000000
3/29/2012	10:09:56 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:09:56 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:09:56 AM	Tube furnace set to 100
3/29/2012	10:10:26 AM	Helium valve closed
3/29/2012	10:10:26 AM	H2 valve closed
3/29/2012	10:10:26 AM	BCl3 valve closed
3/29/2012	10:10:26 AM	PH3 valve closed
3/29/2012	10:10:26 AM	SiCl4 pre valve closed
3/29/2012	10:10:26 AM	SiCl4 post valve closed
3/29/2012	10:10:26 AM	Bypass valve closed
3/29/2012	10:10:26 AM	Bubbler valve closed
3/29/2012	10:10:26 AM	Main Vac valve opened
3/29/2012	10:10:26 AM	Helium MFC set to  0.000000
3/29/2012	10:10:26 AM	H2 MFC set to  0.000000
3/29/2012	10:10:26 AM	BCl3 MFC set to  0.000000
3/29/2012	10:10:26 AM	PH3 MFC set to  0.000000
3/29/2012	10:10:26 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:10:26 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:10:27 AM	Tube furnace set to 100
3/29/2012	10:10:57 AM	H2 valve closed
3/29/2012	10:10:57 AM	BCl3 valve closed
3/29/2012	10:10:57 AM	PH3 valve closed
3/29/2012	10:10:57 AM	SiCl4 pre valve closed
3/29/2012	10:10:57 AM	SiCl4 post valve closed
3/29/2012	10:10:57 AM	Bypass valve closed
3/29/2012	10:10:57 AM	Bubbler valve closed
3/29/2012	10:10:57 AM	Helium valve opened
3/29/2012	10:10:57 AM	Main Vac valve opened
3/29/2012	10:10:57 AM	Helium MFC set to  20.000000
3/29/2012	10:10:57 AM	H2 MFC set to  0.000000
3/29/2012	10:10:57 AM	BCl3 MFC set to  0.000000
3/29/2012	10:10:57 AM	PH3 MFC set to  0.000000
3/29/2012	10:10:57 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:10:57 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:10:57 AM	Tube furnace set to 100
3/29/2012	10:11:27 AM	Helium valve closed
3/29/2012	10:11:27 AM	H2 valve closed
3/29/2012	10:11:27 AM	BCl3 valve closed
3/29/2012	10:11:27 AM	PH3 valve closed
3/29/2012	10:11:27 AM	SiCl4 pre valve closed
3/29/2012	10:11:27 AM	SiCl4 post valve closed
3/29/2012	10:11:27 AM	Bypass valve closed
3/29/2012	10:11:27 AM	Bubbler valve closed
3/29/2012	10:11:27 AM	Main Vac valve opened
3/29/2012	10:11:27 AM	Helium MFC set to  0.000000
3/29/2012	10:11:27 AM	H2 MFC set to  0.000000
3/29/2012	10:11:27 AM	BCl3 MFC set to  0.000000
3/29/2012	10:11:27 AM	PH3 MFC set to  0.000000
3/29/2012	10:11:27 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:11:27 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:11:27 AM	Tube furnace set to 100
3/29/2012	10:11:57 AM	H2 valve closed
3/29/2012	10:11:57 AM	BCl3 valve closed
3/29/2012	10:11:57 AM	PH3 valve closed
3/29/2012	10:11:57 AM	SiCl4 pre valve closed
3/29/2012	10:11:57 AM	SiCl4 post valve closed
3/29/2012	10:11:57 AM	Bypass valve closed
3/29/2012	10:11:57 AM	Bubbler valve closed
3/29/2012	10:11:57 AM	Helium valve opened
3/29/2012	10:11:57 AM	Main Vac valve opened
3/29/2012	10:11:57 AM	Helium MFC set to  20.000000
3/29/2012	10:11:57 AM	H2 MFC set to  0.000000
3/29/2012	10:11:57 AM	BCl3 MFC set to  0.000000
3/29/2012	10:11:57 AM	PH3 MFC set to  0.000000
3/29/2012	10:11:57 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:11:57 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:11:57 AM	Tube furnace set to 100
3/29/2012	10:12:27 AM	Helium valve closed
3/29/2012	10:12:27 AM	H2 valve closed
3/29/2012	10:12:27 AM	BCl3 valve closed
3/29/2012	10:12:27 AM	PH3 valve closed
3/29/2012	10:12:27 AM	SiCl4 pre valve closed
3/29/2012	10:12:27 AM	SiCl4 post valve closed
3/29/2012	10:12:27 AM	Bypass valve closed
3/29/2012	10:12:27 AM	Bubbler valve closed
3/29/2012	10:12:27 AM	Main Vac valve opened
3/29/2012	10:12:27 AM	Helium MFC set to  0.000000
3/29/2012	10:12:27 AM	H2 MFC set to  0.000000
3/29/2012	10:12:27 AM	BCl3 MFC set to  0.000000
3/29/2012	10:12:27 AM	PH3 MFC set to  0.000000
3/29/2012	10:12:27 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:12:27 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:12:27 AM	Tube furnace set to 100
3/29/2012	10:12:57 AM	H2 valve closed
3/29/2012	10:12:57 AM	BCl3 valve closed
3/29/2012	10:12:57 AM	PH3 valve closed
3/29/2012	10:12:58 AM	SiCl4 pre valve closed
3/29/2012	10:12:58 AM	SiCl4 post valve closed
3/29/2012	10:12:58 AM	Bypass valve closed
3/29/2012	10:12:58 AM	Bubbler valve closed
3/29/2012	10:12:58 AM	Helium valve opened
3/29/2012	10:12:58 AM	Main Vac valve opened
3/29/2012	10:12:58 AM	Helium MFC set to  20.000000
3/29/2012	10:12:58 AM	H2 MFC set to  0.000000
3/29/2012	10:12:58 AM	BCl3 MFC set to  0.000000
3/29/2012	10:12:58 AM	PH3 MFC set to  0.000000
3/29/2012	10:12:58 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:12:58 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:12:58 AM	Tube furnace set to 100
3/29/2012	10:13:28 AM	Helium valve closed
3/29/2012	10:13:28 AM	H2 valve closed
3/29/2012	10:13:28 AM	BCl3 valve closed
3/29/2012	10:13:28 AM	PH3 valve closed
3/29/2012	10:13:28 AM	SiCl4 pre valve closed
3/29/2012	10:13:28 AM	SiCl4 post valve closed
3/29/2012	10:13:28 AM	Bypass valve closed
3/29/2012	10:13:28 AM	Bubbler valve closed
3/29/2012	10:13:28 AM	Main Vac valve opened
3/29/2012	10:13:28 AM	Helium MFC set to  0.000000
3/29/2012	10:13:28 AM	H2 MFC set to  0.000000
3/29/2012	10:13:28 AM	BCl3 MFC set to  0.000000
3/29/2012	10:13:28 AM	PH3 MFC set to  0.000000
3/29/2012	10:13:28 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:13:28 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:13:28 AM	Tube furnace set to 100
3/29/2012	10:13:58 AM	H2 valve closed
3/29/2012	10:13:58 AM	BCl3 valve closed
3/29/2012	10:13:58 AM	PH3 valve closed
3/29/2012	10:13:58 AM	SiCl4 pre valve closed
3/29/2012	10:13:58 AM	SiCl4 post valve closed
3/29/2012	10:13:58 AM	Bypass valve closed
3/29/2012	10:13:58 AM	Bubbler valve closed
3/29/2012	10:13:58 AM	Helium valve opened
3/29/2012	10:13:58 AM	Main Vac valve opened
3/29/2012	10:13:58 AM	Helium MFC set to  20.000000
3/29/2012	10:13:58 AM	H2 MFC set to  0.000000
3/29/2012	10:13:58 AM	BCl3 MFC set to  0.000000
3/29/2012	10:13:58 AM	PH3 MFC set to  0.000000
3/29/2012	10:13:58 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:13:58 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:13:58 AM	Tube furnace set to 100
3/29/2012	10:14:28 AM	Helium valve closed
3/29/2012	10:14:28 AM	H2 valve closed
3/29/2012	10:14:28 AM	BCl3 valve closed
3/29/2012	10:14:28 AM	PH3 valve closed
3/29/2012	10:14:28 AM	SiCl4 pre valve closed
3/29/2012	10:14:28 AM	SiCl4 post valve closed
3/29/2012	10:14:28 AM	Bypass valve closed
3/29/2012	10:14:28 AM	Bubbler valve closed
3/29/2012	10:14:28 AM	Main Vac valve opened
3/29/2012	10:14:28 AM	Helium MFC set to  0.000000
3/29/2012	10:14:28 AM	H2 MFC set to  0.000000
3/29/2012	10:14:28 AM	BCl3 MFC set to  0.000000
3/29/2012	10:14:28 AM	PH3 MFC set to  0.000000
3/29/2012	10:14:28 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:14:28 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:14:28 AM	Tube furnace set to 100
3/29/2012	10:14:58 AM	H2 valve closed
3/29/2012	10:14:58 AM	BCl3 valve closed
3/29/2012	10:14:58 AM	PH3 valve closed
3/29/2012	10:14:58 AM	SiCl4 pre valve closed
3/29/2012	10:14:58 AM	SiCl4 post valve closed
3/29/2012	10:14:58 AM	Bypass valve closed
3/29/2012	10:14:58 AM	Bubbler valve closed
3/29/2012	10:14:58 AM	Helium valve opened
3/29/2012	10:14:58 AM	Main Vac valve opened
3/29/2012	10:14:58 AM	Helium MFC set to  20.000000
3/29/2012	10:14:58 AM	H2 MFC set to  0.000000
3/29/2012	10:14:58 AM	BCl3 MFC set to  0.000000
3/29/2012	10:14:58 AM	PH3 MFC set to  0.000000
3/29/2012	10:14:58 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:14:58 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:14:59 AM	Tube furnace set to 100
3/29/2012	10:15:29 AM	Helium valve closed
3/29/2012	10:15:29 AM	H2 valve closed
3/29/2012	10:15:29 AM	BCl3 valve closed
3/29/2012	10:15:29 AM	PH3 valve closed
3/29/2012	10:15:29 AM	SiCl4 pre valve closed
3/29/2012	10:15:29 AM	SiCl4 post valve closed
3/29/2012	10:15:29 AM	Bypass valve closed
3/29/2012	10:15:29 AM	Bubbler valve closed
3/29/2012	10:15:29 AM	Main Vac valve opened
3/29/2012	10:15:29 AM	Helium MFC set to  0.000000
3/29/2012	10:15:29 AM	H2 MFC set to  0.000000
3/29/2012	10:15:29 AM	BCl3 MFC set to  0.000000
3/29/2012	10:15:29 AM	PH3 MFC set to  0.000000
3/29/2012	10:15:29 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:15:29 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:15:29 AM	Tube furnace set to 100
3/29/2012	10:15:59 AM	H2 valve closed
3/29/2012	10:15:59 AM	BCl3 valve closed
3/29/2012	10:15:59 AM	PH3 valve closed
3/29/2012	10:15:59 AM	SiCl4 pre valve closed
3/29/2012	10:15:59 AM	SiCl4 post valve closed
3/29/2012	10:15:59 AM	Bypass valve closed
3/29/2012	10:15:59 AM	Bubbler valve closed
3/29/2012	10:15:59 AM	Helium valve opened
3/29/2012	10:15:59 AM	Main Vac valve opened
3/29/2012	10:15:59 AM	Helium MFC set to  20.000000
3/29/2012	10:15:59 AM	H2 MFC set to  0.000000
3/29/2012	10:15:59 AM	BCl3 MFC set to  0.000000
3/29/2012	10:15:59 AM	PH3 MFC set to  0.000000
3/29/2012	10:15:59 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:15:59 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:15:59 AM	Tube furnace set to 100
3/29/2012	10:16:29 AM	Helium valve closed
3/29/2012	10:16:29 AM	H2 valve closed
3/29/2012	10:16:29 AM	BCl3 valve closed
3/29/2012	10:16:29 AM	PH3 valve closed
3/29/2012	10:16:29 AM	SiCl4 pre valve closed
3/29/2012	10:16:29 AM	SiCl4 post valve closed
3/29/2012	10:16:29 AM	Bypass valve closed
3/29/2012	10:16:29 AM	Bubbler valve closed
3/29/2012	10:16:29 AM	Main Vac valve opened
3/29/2012	10:16:29 AM	Helium MFC set to  0.000000
3/29/2012	10:16:29 AM	H2 MFC set to  0.000000
3/29/2012	10:16:29 AM	BCl3 MFC set to  0.000000
3/29/2012	10:16:29 AM	PH3 MFC set to  0.000000
3/29/2012	10:16:29 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:16:29 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:16:29 AM	Tube furnace set to 100
3/29/2012	10:16:30 AM	Run finished at 10:16 AM
3/29/2012	10:16:52 AM	Recipe started at 10:16 AM
3/29/2012	10:16:52 AM	Helium valve closed
3/29/2012	10:16:52 AM	H2 valve closed
3/29/2012	10:16:52 AM	BCl3 valve closed
3/29/2012	10:16:52 AM	PH3 valve closed
3/29/2012	10:16:52 AM	SiCl4 pre valve closed
3/29/2012	10:16:52 AM	SiCl4 post valve closed
3/29/2012	10:16:52 AM	Bypass valve closed
3/29/2012	10:16:52 AM	Bubbler valve closed
3/29/2012	10:16:52 AM	Main Vac valve opened
3/29/2012	10:16:52 AM	Helium MFC set to  0.000000
3/29/2012	10:16:52 AM	H2 MFC set to  0.000000
3/29/2012	10:16:52 AM	BCl3 MFC set to  0.000000
3/29/2012	10:16:52 AM	PH3 MFC set to  0.000000
3/29/2012	10:16:52 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:16:52 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:16:52 AM	Tube furnace set to 100
3/29/2012	10:17:22 AM	H2 valve closed
3/29/2012	10:17:22 AM	BCl3 valve closed
3/29/2012	10:17:22 AM	PH3 valve closed
3/29/2012	10:17:22 AM	SiCl4 pre valve closed
3/29/2012	10:17:22 AM	SiCl4 post valve closed
3/29/2012	10:17:22 AM	Bypass valve closed
3/29/2012	10:17:22 AM	Bubbler valve closed
3/29/2012	10:17:22 AM	Helium valve opened
3/29/2012	10:17:22 AM	Main Vac valve opened
3/29/2012	10:17:22 AM	Helium MFC set to  20.000000
3/29/2012	10:17:22 AM	H2 MFC set to  0.000000
3/29/2012	10:17:22 AM	BCl3 MFC set to  0.000000
3/29/2012	10:17:22 AM	PH3 MFC set to  0.000000
3/29/2012	10:17:22 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:17:22 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:17:22 AM	Tube furnace set to 100
3/29/2012	10:17:52 AM	Helium valve closed
3/29/2012	10:17:52 AM	H2 valve closed
3/29/2012	10:17:52 AM	BCl3 valve closed
3/29/2012	10:17:52 AM	PH3 valve closed
3/29/2012	10:17:52 AM	SiCl4 pre valve closed
3/29/2012	10:17:52 AM	SiCl4 post valve closed
3/29/2012	10:17:52 AM	Bypass valve closed
3/29/2012	10:17:52 AM	Bubbler valve closed
3/29/2012	10:17:52 AM	Main Vac valve opened
3/29/2012	10:17:52 AM	Helium MFC set to  0.000000
3/29/2012	10:17:52 AM	H2 MFC set to  0.000000
3/29/2012	10:17:52 AM	BCl3 MFC set to  0.000000
3/29/2012	10:17:52 AM	PH3 MFC set to  0.000000
3/29/2012	10:17:52 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:17:52 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:17:52 AM	Tube furnace set to 100
3/29/2012	10:18:22 AM	H2 valve closed
3/29/2012	10:18:22 AM	BCl3 valve closed
3/29/2012	10:18:22 AM	PH3 valve closed
3/29/2012	10:18:22 AM	SiCl4 pre valve closed
3/29/2012	10:18:22 AM	SiCl4 post valve closed
3/29/2012	10:18:22 AM	Bypass valve closed
3/29/2012	10:18:22 AM	Bubbler valve closed
3/29/2012	10:18:22 AM	Helium valve opened
3/29/2012	10:18:22 AM	Main Vac valve opened
3/29/2012	10:18:22 AM	Helium MFC set to  20.000000
3/29/2012	10:18:22 AM	H2 MFC set to  0.000000
3/29/2012	10:18:22 AM	BCl3 MFC set to  0.000000
3/29/2012	10:18:22 AM	PH3 MFC set to  0.000000
3/29/2012	10:18:22 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:18:22 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:18:23 AM	Tube furnace set to 100
3/29/2012	10:18:53 AM	Helium valve closed
3/29/2012	10:18:53 AM	H2 valve closed
3/29/2012	10:18:53 AM	BCl3 valve closed
3/29/2012	10:18:53 AM	PH3 valve closed
3/29/2012	10:18:53 AM	SiCl4 pre valve closed
3/29/2012	10:18:53 AM	SiCl4 post valve closed
3/29/2012	10:18:53 AM	Bypass valve closed
3/29/2012	10:18:53 AM	Bubbler valve closed
3/29/2012	10:18:53 AM	Main Vac valve opened
3/29/2012	10:18:53 AM	Helium MFC set to  0.000000
3/29/2012	10:18:53 AM	H2 MFC set to  0.000000
3/29/2012	10:18:53 AM	BCl3 MFC set to  0.000000
3/29/2012	10:18:53 AM	PH3 MFC set to  0.000000
3/29/2012	10:18:53 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:18:53 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:18:53 AM	Tube furnace set to 100
3/29/2012	10:19:23 AM	H2 valve closed
3/29/2012	10:19:23 AM	BCl3 valve closed
3/29/2012	10:19:23 AM	PH3 valve closed
3/29/2012	10:19:23 AM	SiCl4 pre valve closed
3/29/2012	10:19:23 AM	SiCl4 post valve closed
3/29/2012	10:19:23 AM	Bypass valve closed
3/29/2012	10:19:23 AM	Bubbler valve closed
3/29/2012	10:19:23 AM	Helium valve opened
3/29/2012	10:19:23 AM	Main Vac valve opened
3/29/2012	10:19:23 AM	Helium MFC set to  20.000000
3/29/2012	10:19:23 AM	H2 MFC set to  0.000000
3/29/2012	10:19:23 AM	BCl3 MFC set to  0.000000
3/29/2012	10:19:23 AM	PH3 MFC set to  0.000000
3/29/2012	10:19:23 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:19:23 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:19:23 AM	Tube furnace set to 100
3/29/2012	10:19:53 AM	Helium valve closed
3/29/2012	10:19:53 AM	H2 valve closed
3/29/2012	10:19:53 AM	BCl3 valve closed
3/29/2012	10:19:53 AM	PH3 valve closed
3/29/2012	10:19:53 AM	SiCl4 pre valve closed
3/29/2012	10:19:53 AM	SiCl4 post valve closed
3/29/2012	10:19:53 AM	Bypass valve closed
3/29/2012	10:19:53 AM	Bubbler valve closed
3/29/2012	10:19:53 AM	Main Vac valve opened
3/29/2012	10:19:53 AM	Helium MFC set to  0.000000
3/29/2012	10:19:53 AM	H2 MFC set to  0.000000
3/29/2012	10:19:53 AM	BCl3 MFC set to  0.000000
3/29/2012	10:19:53 AM	PH3 MFC set to  0.000000
3/29/2012	10:19:53 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:19:53 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:19:53 AM	Tube furnace set to 100
3/29/2012	10:20:23 AM	H2 valve closed
3/29/2012	10:20:23 AM	BCl3 valve closed
3/29/2012	10:20:23 AM	PH3 valve closed
3/29/2012	10:20:23 AM	SiCl4 pre valve closed
3/29/2012	10:20:23 AM	SiCl4 post valve closed
3/29/2012	10:20:23 AM	Bypass valve closed
3/29/2012	10:20:23 AM	Bubbler valve closed
3/29/2012	10:20:23 AM	Helium valve opened
3/29/2012	10:20:23 AM	Main Vac valve opened
3/29/2012	10:20:23 AM	Helium MFC set to  20.000000
3/29/2012	10:20:23 AM	H2 MFC set to  0.000000
3/29/2012	10:20:23 AM	BCl3 MFC set to  0.000000
3/29/2012	10:20:23 AM	PH3 MFC set to  0.000000
3/29/2012	10:20:23 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:20:23 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:20:23 AM	Tube furnace set to 100
3/29/2012	10:20:53 AM	Helium valve closed
3/29/2012	10:20:54 AM	H2 valve closed
3/29/2012	10:20:54 AM	BCl3 valve closed
3/29/2012	10:20:54 AM	PH3 valve closed
3/29/2012	10:20:54 AM	SiCl4 pre valve closed
3/29/2012	10:20:54 AM	SiCl4 post valve closed
3/29/2012	10:20:54 AM	Bypass valve closed
3/29/2012	10:20:54 AM	Bubbler valve closed
3/29/2012	10:20:54 AM	Main Vac valve opened
3/29/2012	10:20:54 AM	Helium MFC set to  0.000000
3/29/2012	10:20:54 AM	H2 MFC set to  0.000000
3/29/2012	10:20:54 AM	BCl3 MFC set to  0.000000
3/29/2012	10:20:54 AM	PH3 MFC set to  0.000000
3/29/2012	10:20:54 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:20:54 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:20:54 AM	Tube furnace set to 100
3/29/2012	10:21:24 AM	H2 valve closed
3/29/2012	10:21:24 AM	BCl3 valve closed
3/29/2012	10:21:24 AM	PH3 valve closed
3/29/2012	10:21:24 AM	SiCl4 pre valve closed
3/29/2012	10:21:24 AM	SiCl4 post valve closed
3/29/2012	10:21:24 AM	Bypass valve closed
3/29/2012	10:21:24 AM	Bubbler valve closed
3/29/2012	10:21:24 AM	Helium valve opened
3/29/2012	10:21:24 AM	Main Vac valve opened
3/29/2012	10:21:24 AM	Helium MFC set to  20.000000
3/29/2012	10:21:24 AM	H2 MFC set to  0.000000
3/29/2012	10:21:24 AM	BCl3 MFC set to  0.000000
3/29/2012	10:21:24 AM	PH3 MFC set to  0.000000
3/29/2012	10:21:24 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:21:24 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:21:24 AM	Tube furnace set to 100
3/29/2012	10:21:54 AM	Helium valve closed
3/29/2012	10:21:54 AM	H2 valve closed
3/29/2012	10:21:54 AM	BCl3 valve closed
3/29/2012	10:21:54 AM	PH3 valve closed
3/29/2012	10:21:54 AM	SiCl4 pre valve closed
3/29/2012	10:21:54 AM	SiCl4 post valve closed
3/29/2012	10:21:54 AM	Bypass valve closed
3/29/2012	10:21:54 AM	Bubbler valve closed
3/29/2012	10:21:54 AM	Main Vac valve opened
3/29/2012	10:21:54 AM	Helium MFC set to  0.000000
3/29/2012	10:21:54 AM	H2 MFC set to  0.000000
3/29/2012	10:21:54 AM	BCl3 MFC set to  0.000000
3/29/2012	10:21:54 AM	PH3 MFC set to  0.000000
3/29/2012	10:21:54 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:21:54 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:21:54 AM	Tube furnace set to 100
3/29/2012	10:22:24 AM	H2 valve closed
3/29/2012	10:22:24 AM	BCl3 valve closed
3/29/2012	10:22:24 AM	PH3 valve closed
3/29/2012	10:22:24 AM	SiCl4 pre valve closed
3/29/2012	10:22:24 AM	SiCl4 post valve closed
3/29/2012	10:22:24 AM	Bypass valve closed
3/29/2012	10:22:24 AM	Bubbler valve closed
3/29/2012	10:22:24 AM	Helium valve opened
3/29/2012	10:22:24 AM	Main Vac valve opened
3/29/2012	10:22:24 AM	Helium MFC set to  20.000000
3/29/2012	10:22:24 AM	H2 MFC set to  0.000000
3/29/2012	10:22:24 AM	BCl3 MFC set to  0.000000
3/29/2012	10:22:24 AM	PH3 MFC set to  0.000000
3/29/2012	10:22:24 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:22:24 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:22:24 AM	Tube furnace set to 100
3/29/2012	10:22:54 AM	Helium valve closed
3/29/2012	10:22:54 AM	H2 valve closed
3/29/2012	10:22:54 AM	BCl3 valve closed
3/29/2012	10:22:54 AM	PH3 valve closed
3/29/2012	10:22:54 AM	SiCl4 pre valve closed
3/29/2012	10:22:54 AM	SiCl4 post valve closed
3/29/2012	10:22:54 AM	Bypass valve closed
3/29/2012	10:22:54 AM	Bubbler valve closed
3/29/2012	10:22:54 AM	Main Vac valve opened
3/29/2012	10:22:54 AM	Helium MFC set to  0.000000
3/29/2012	10:22:54 AM	H2 MFC set to  0.000000
3/29/2012	10:22:54 AM	BCl3 MFC set to  0.000000
3/29/2012	10:22:54 AM	PH3 MFC set to  0.000000
3/29/2012	10:22:54 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:22:54 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:22:55 AM	Tube furnace set to 100
3/29/2012	10:23:25 AM	H2 valve closed
3/29/2012	10:23:25 AM	BCl3 valve closed
3/29/2012	10:23:25 AM	PH3 valve closed
3/29/2012	10:23:25 AM	SiCl4 pre valve closed
3/29/2012	10:23:25 AM	SiCl4 post valve closed
3/29/2012	10:23:25 AM	Bypass valve closed
3/29/2012	10:23:25 AM	Bubbler valve closed
3/29/2012	10:23:25 AM	Helium valve opened
3/29/2012	10:23:25 AM	Main Vac valve opened
3/29/2012	10:23:25 AM	Helium MFC set to  20.000000
3/29/2012	10:23:25 AM	H2 MFC set to  0.000000
3/29/2012	10:23:25 AM	BCl3 MFC set to  0.000000
3/29/2012	10:23:25 AM	PH3 MFC set to  0.000000
3/29/2012	10:23:25 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:23:25 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:23:25 AM	Tube furnace set to 100
3/29/2012	10:23:55 AM	Helium valve closed
3/29/2012	10:23:55 AM	H2 valve closed
3/29/2012	10:23:55 AM	BCl3 valve closed
3/29/2012	10:23:55 AM	PH3 valve closed
3/29/2012	10:23:55 AM	SiCl4 pre valve closed
3/29/2012	10:23:55 AM	SiCl4 post valve closed
3/29/2012	10:23:55 AM	Bypass valve closed
3/29/2012	10:23:55 AM	Bubbler valve closed
3/29/2012	10:23:55 AM	Main Vac valve opened
3/29/2012	10:23:55 AM	Helium MFC set to  0.000000
3/29/2012	10:23:55 AM	H2 MFC set to  0.000000
3/29/2012	10:23:55 AM	BCl3 MFC set to  0.000000
3/29/2012	10:23:55 AM	PH3 MFC set to  0.000000
3/29/2012	10:23:55 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:23:55 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:23:55 AM	Tube furnace set to 100
3/29/2012	10:24:25 AM	H2 valve closed
3/29/2012	10:24:25 AM	BCl3 valve closed
3/29/2012	10:24:25 AM	PH3 valve closed
3/29/2012	10:24:25 AM	SiCl4 pre valve closed
3/29/2012	10:24:25 AM	SiCl4 post valve closed
3/29/2012	10:24:25 AM	Bypass valve closed
3/29/2012	10:24:25 AM	Bubbler valve closed
3/29/2012	10:24:25 AM	Helium valve opened
3/29/2012	10:24:25 AM	Main Vac valve opened
3/29/2012	10:24:25 AM	Helium MFC set to  20.000000
3/29/2012	10:24:25 AM	H2 MFC set to  0.000000
3/29/2012	10:24:25 AM	BCl3 MFC set to  0.000000
3/29/2012	10:24:25 AM	PH3 MFC set to  0.000000
3/29/2012	10:24:25 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:24:25 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:24:25 AM	Tube furnace set to 100
3/29/2012	10:24:55 AM	Helium valve closed
3/29/2012	10:24:55 AM	H2 valve closed
3/29/2012	10:24:55 AM	BCl3 valve closed
3/29/2012	10:24:55 AM	PH3 valve closed
3/29/2012	10:24:55 AM	SiCl4 pre valve closed
3/29/2012	10:24:55 AM	SiCl4 post valve closed
3/29/2012	10:24:55 AM	Bypass valve closed
3/29/2012	10:24:55 AM	Bubbler valve closed
3/29/2012	10:24:55 AM	Main Vac valve opened
3/29/2012	10:24:55 AM	Helium MFC set to  0.000000
3/29/2012	10:24:55 AM	H2 MFC set to  0.000000
3/29/2012	10:24:55 AM	BCl3 MFC set to  0.000000
3/29/2012	10:24:55 AM	PH3 MFC set to  0.000000
3/29/2012	10:24:55 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:24:55 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:24:56 AM	Tube furnace set to 100
3/29/2012	10:25:26 AM	H2 valve closed
3/29/2012	10:25:26 AM	BCl3 valve closed
3/29/2012	10:25:26 AM	PH3 valve closed
3/29/2012	10:25:26 AM	SiCl4 pre valve closed
3/29/2012	10:25:26 AM	SiCl4 post valve closed
3/29/2012	10:25:26 AM	Bypass valve closed
3/29/2012	10:25:26 AM	Bubbler valve closed
3/29/2012	10:25:26 AM	Helium valve opened
3/29/2012	10:25:26 AM	Main Vac valve opened
3/29/2012	10:25:26 AM	Helium MFC set to  20.000000
3/29/2012	10:25:26 AM	H2 MFC set to  0.000000
3/29/2012	10:25:26 AM	BCl3 MFC set to  0.000000
3/29/2012	10:25:26 AM	PH3 MFC set to  0.000000
3/29/2012	10:25:26 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:25:26 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:25:26 AM	Tube furnace set to 100
3/29/2012	10:25:56 AM	Helium valve closed
3/29/2012	10:25:56 AM	H2 valve closed
3/29/2012	10:25:56 AM	BCl3 valve closed
3/29/2012	10:25:56 AM	PH3 valve closed
3/29/2012	10:25:56 AM	SiCl4 pre valve closed
3/29/2012	10:25:56 AM	SiCl4 post valve closed
3/29/2012	10:25:56 AM	Bypass valve closed
3/29/2012	10:25:56 AM	Bubbler valve closed
3/29/2012	10:25:56 AM	Main Vac valve opened
3/29/2012	10:25:56 AM	Helium MFC set to  0.000000
3/29/2012	10:25:56 AM	H2 MFC set to  0.000000
3/29/2012	10:25:56 AM	BCl3 MFC set to  0.000000
3/29/2012	10:25:56 AM	PH3 MFC set to  0.000000
3/29/2012	10:25:56 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:25:56 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:25:56 AM	Tube furnace set to 100
3/29/2012	10:26:26 AM	H2 valve closed
3/29/2012	10:26:26 AM	BCl3 valve closed
3/29/2012	10:26:26 AM	PH3 valve closed
3/29/2012	10:26:26 AM	SiCl4 pre valve closed
3/29/2012	10:26:26 AM	SiCl4 post valve closed
3/29/2012	10:26:26 AM	Bypass valve closed
3/29/2012	10:26:26 AM	Bubbler valve closed
3/29/2012	10:26:26 AM	Helium valve opened
3/29/2012	10:26:26 AM	Main Vac valve opened
3/29/2012	10:26:26 AM	Helium MFC set to  20.000000
3/29/2012	10:26:26 AM	H2 MFC set to  0.000000
3/29/2012	10:26:26 AM	BCl3 MFC set to  0.000000
3/29/2012	10:26:26 AM	PH3 MFC set to  0.000000
3/29/2012	10:26:26 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:26:26 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:26:26 AM	Tube furnace set to 100
3/29/2012	10:26:56 AM	Helium valve closed
3/29/2012	10:26:56 AM	H2 valve closed
3/29/2012	10:26:56 AM	BCl3 valve closed
3/29/2012	10:26:56 AM	PH3 valve closed
3/29/2012	10:26:56 AM	SiCl4 pre valve closed
3/29/2012	10:26:56 AM	SiCl4 post valve closed
3/29/2012	10:26:56 AM	Bypass valve closed
3/29/2012	10:26:56 AM	Bubbler valve closed
3/29/2012	10:26:56 AM	Main Vac valve opened
3/29/2012	10:26:56 AM	Helium MFC set to  0.000000
3/29/2012	10:26:56 AM	H2 MFC set to  0.000000
3/29/2012	10:26:56 AM	BCl3 MFC set to  0.000000
3/29/2012	10:26:56 AM	PH3 MFC set to  0.000000
3/29/2012	10:26:56 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:26:56 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:26:57 AM	Tube furnace set to 100
3/29/2012	10:26:58 AM	Run finished at 10:26 AM
3/29/2012	10:31:19 AM	Main Vac valve closed
3/29/2012	10:31:34 AM	Main Vac valve opened
3/29/2012	10:33:29 AM	Recipe started at 10:33 AM
3/29/2012	10:33:29 AM	Helium valve closed
3/29/2012	10:33:29 AM	H2 valve closed
3/29/2012	10:33:29 AM	BCl3 valve closed
3/29/2012	10:33:29 AM	PH3 valve closed
3/29/2012	10:33:29 AM	SiCl4 pre valve closed
3/29/2012	10:33:29 AM	SiCl4 post valve closed
3/29/2012	10:33:29 AM	Main Vac valve closed
3/29/2012	10:33:29 AM	Bypass valve closed
3/29/2012	10:33:29 AM	Bubbler valve closed
3/29/2012	10:33:29 AM	Helium MFC set to  0.000000
3/29/2012	10:33:29 AM	H2 MFC set to  0.000000
3/29/2012	10:33:29 AM	BCl3 MFC set to  0.000000
3/29/2012	10:33:29 AM	PH3 MFC set to  0.000000
3/29/2012	10:33:29 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:33:29 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:33:29 AM	Tube furnace set to 0
3/29/2012	10:33:32 AM	Helium valve closed
3/29/2012	10:33:32 AM	BCl3 valve closed
3/29/2012	10:33:32 AM	PH3 valve closed
3/29/2012	10:33:32 AM	SiCl4 pre valve closed
3/29/2012	10:33:32 AM	SiCl4 post valve closed
3/29/2012	10:33:32 AM	Main Vac valve closed
3/29/2012	10:33:32 AM	Bypass valve closed
3/29/2012	10:33:32 AM	Bubbler valve closed
3/29/2012	10:33:32 AM	H2 valve opened
3/29/2012	10:33:32 AM	Helium MFC set to  0.000000
3/29/2012	10:33:32 AM	H2 MFC set to  500.000000
3/29/2012	10:33:32 AM	BCl3 MFC set to  0.000000
3/29/2012	10:33:32 AM	PH3 MFC set to  0.000000
3/29/2012	10:33:32 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:33:32 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:33:32 AM	Tube furnace set to 0
3/29/2012	10:34:37 AM	Helium valve closed
3/29/2012	10:34:37 AM	BCl3 valve closed
3/29/2012	10:34:37 AM	PH3 valve closed
3/29/2012	10:34:37 AM	SiCl4 pre valve closed
3/29/2012	10:34:37 AM	SiCl4 post valve closed
3/29/2012	10:34:37 AM	Main Vac valve closed
3/29/2012	10:34:37 AM	Bypass valve closed
3/29/2012	10:34:37 AM	H2 valve opened
3/29/2012	10:34:37 AM	Bubbler valve opened
3/29/2012	10:34:37 AM	Helium MFC set to  0.000000
3/29/2012	10:34:37 AM	H2 MFC set to  500.000000
3/29/2012	10:34:37 AM	BCl3 MFC set to  0.000000
3/29/2012	10:34:37 AM	PH3 MFC set to  0.000000
3/29/2012	10:34:37 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:34:37 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:34:37 AM	Tube furnace set to 0
3/29/2012	10:34:38 AM	Helium valve closed
3/29/2012	10:34:38 AM	BCl3 valve closed
3/29/2012	10:34:38 AM	PH3 valve closed
3/29/2012	10:34:38 AM	SiCl4 pre valve closed
3/29/2012	10:34:38 AM	SiCl4 post valve closed
3/29/2012	10:34:38 AM	Main Vac valve closed
3/29/2012	10:34:38 AM	Bypass valve closed
3/29/2012	10:34:38 AM	H2 valve opened
3/29/2012	10:34:38 AM	Bubbler valve opened
3/29/2012	10:34:38 AM	Helium MFC set to  0.000000
3/29/2012	10:34:38 AM	H2 MFC set to  450.000000
3/29/2012	10:34:38 AM	BCl3 MFC set to  0.000000
3/29/2012	10:34:38 AM	PH3 MFC set to  0.000000
3/29/2012	10:34:38 AM	SiCl4 MFC set to  0.000000
3/29/2012	10:34:38 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:34:38 AM	Tube furnace set to 1000
3/29/2012	10:59:38 AM	Helium valve closed
3/29/2012	10:59:38 AM	PH3 valve closed
3/29/2012	10:59:38 AM	Main Vac valve closed
3/29/2012	10:59:38 AM	Bypass valve closed
3/29/2012	10:59:38 AM	H2 valve opened
3/29/2012	10:59:38 AM	BCl3 valve opened
3/29/2012	10:59:38 AM	SiCl4 pre valve opened
3/29/2012	10:59:38 AM	SiCl4 post valve opened
3/29/2012	10:59:38 AM	Bubbler valve opened
3/29/2012	10:59:38 AM	Helium MFC set to  0.000000
3/29/2012	10:59:38 AM	H2 MFC set to  450.000000
3/29/2012	10:59:38 AM	BCl3 MFC set to  1.500000
3/29/2012	10:59:38 AM	PH3 MFC set to  0.000000
3/29/2012	10:59:38 AM	SiCl4 MFC set to  50.000000
3/29/2012	10:59:38 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	10:59:38 AM	Tube furnace set to 1000
3/29/2012	11:04:38 AM	Helium valve closed
3/29/2012	11:04:38 AM	BCl3 valve closed
3/29/2012	11:04:38 AM	PH3 valve closed
3/29/2012	11:04:38 AM	SiCl4 pre valve closed
3/29/2012	11:04:38 AM	SiCl4 post valve closed
3/29/2012	11:04:38 AM	Main Vac valve closed
3/29/2012	11:04:38 AM	Bypass valve closed
3/29/2012	11:04:38 AM	H2 valve opened
3/29/2012	11:04:38 AM	Bubbler valve opened
3/29/2012	11:04:38 AM	Helium MFC set to  0.000000
3/29/2012	11:04:38 AM	H2 MFC set to  500.000000
3/29/2012	11:04:38 AM	BCl3 MFC set to  0.000000
3/29/2012	11:04:38 AM	PH3 MFC set to  0.000000
3/29/2012	11:04:38 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:04:38 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:04:38 AM	Tube furnace set to 750
3/29/2012	11:09:38 AM	H2 valve closed
3/29/2012	11:09:38 AM	BCl3 valve closed
3/29/2012	11:09:38 AM	PH3 valve closed
3/29/2012	11:09:38 AM	SiCl4 pre valve closed
3/29/2012	11:09:38 AM	SiCl4 post valve closed
3/29/2012	11:09:38 AM	Main Vac valve closed
3/29/2012	11:09:38 AM	Bypass valve closed
3/29/2012	11:09:38 AM	Helium valve opened
3/29/2012	11:09:38 AM	Bubbler valve opened
3/29/2012	11:09:38 AM	Helium MFC set to  500.000000
3/29/2012	11:09:38 AM	H2 MFC set to  0.000000
3/29/2012	11:09:38 AM	BCl3 MFC set to  0.000000
3/29/2012	11:09:38 AM	PH3 MFC set to  0.000000
3/29/2012	11:09:38 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:09:38 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:09:39 AM	Tube furnace set to 0
3/29/2012	11:18:30 AM	Helium valve closed
3/29/2012	11:18:30 AM	H2 valve closed
3/29/2012	11:18:30 AM	BCl3 valve closed
3/29/2012	11:18:30 AM	PH3 valve closed
3/29/2012	11:18:30 AM	SiCl4 pre valve closed
3/29/2012	11:18:30 AM	SiCl4 post valve closed
3/29/2012	11:18:30 AM	Main Vac valve closed
3/29/2012	11:18:30 AM	Bypass valve closed
3/29/2012	11:18:30 AM	Bubbler valve closed
3/29/2012	11:18:30 AM	Helium MFC set to  0.000000
3/29/2012	11:18:30 AM	H2 MFC set to  0.000000
3/29/2012	11:18:30 AM	BCl3 MFC set to  0.000000
3/29/2012	11:18:30 AM	PH3 MFC set to  0.000000
3/29/2012	11:18:30 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:18:30 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:18:30 AM	Tube furnace set to 0
3/29/2012	11:18:31 AM	Run finished at 11:18 AM
3/29/2012	11:18:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2012	11:18:37 AM	Recipe started at 11:18 AM
3/29/2012	11:18:37 AM	Helium valve closed
3/29/2012	11:18:37 AM	H2 valve closed
3/29/2012	11:18:37 AM	BCl3 valve closed
3/29/2012	11:18:37 AM	PH3 valve closed
3/29/2012	11:18:37 AM	SiCl4 pre valve closed
3/29/2012	11:18:37 AM	SiCl4 post valve closed
3/29/2012	11:18:37 AM	Main Vac valve closed
3/29/2012	11:18:37 AM	Bypass valve closed
3/29/2012	11:18:37 AM	Bubbler valve closed
3/29/2012	11:18:37 AM	Helium MFC set to  0.000000
3/29/2012	11:18:37 AM	H2 MFC set to  0.000000
3/29/2012	11:18:37 AM	BCl3 MFC set to  0.000000
3/29/2012	11:18:37 AM	PH3 MFC set to  0.000000
3/29/2012	11:18:37 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:18:37 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:18:37 AM	Tube furnace set to 0
3/29/2012	11:18:40 AM	H2 valve closed
3/29/2012	11:18:40 AM	BCl3 valve closed
3/29/2012	11:18:40 AM	PH3 valve closed
3/29/2012	11:18:40 AM	SiCl4 pre valve closed
3/29/2012	11:18:40 AM	SiCl4 post valve closed
3/29/2012	11:18:40 AM	Main Vac valve closed
3/29/2012	11:18:40 AM	Bypass valve closed
3/29/2012	11:18:40 AM	Bubbler valve closed
3/29/2012	11:18:40 AM	Helium valve opened
3/29/2012	11:18:40 AM	Helium MFC set to  500.000000
3/29/2012	11:18:40 AM	H2 MFC set to  0.000000
3/29/2012	11:18:40 AM	BCl3 MFC set to  0.000000
3/29/2012	11:18:40 AM	PH3 MFC set to  0.000000
3/29/2012	11:18:40 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:18:40 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:18:40 AM	Tube furnace set to 0
3/29/2012	11:18:41 AM	Helium valve closed
3/29/2012	11:18:41 AM	H2 valve closed
3/29/2012	11:18:41 AM	BCl3 valve closed
3/29/2012	11:18:41 AM	PH3 valve closed
3/29/2012	11:18:41 AM	SiCl4 pre valve closed
3/29/2012	11:18:41 AM	SiCl4 post valve closed
3/29/2012	11:18:41 AM	Main Vac valve closed
3/29/2012	11:18:41 AM	Bypass valve closed
3/29/2012	11:18:41 AM	Bubbler valve closed
3/29/2012	11:18:41 AM	Helium MFC set to  0.000000
3/29/2012	11:18:41 AM	H2 MFC set to  0.000000
3/29/2012	11:18:41 AM	BCl3 MFC set to  0.000000
3/29/2012	11:18:41 AM	PH3 MFC set to  0.000000
3/29/2012	11:18:41 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:18:41 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:18:41 AM	Tube furnace set to 0
3/29/2012	11:18:42 AM	Run finished at 11:18 AM
3/29/2012	11:18:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2012	11:24:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2012	11:24:24 AM	Recipe started at 11:24 AM
3/29/2012	11:24:24 AM	Helium valve closed
3/29/2012	11:24:24 AM	H2 valve closed
3/29/2012	11:24:24 AM	BCl3 valve closed
3/29/2012	11:24:24 AM	PH3 valve closed
3/29/2012	11:24:24 AM	SiCl4 pre valve closed
3/29/2012	11:24:24 AM	SiCl4 post valve closed
3/29/2012	11:24:24 AM	Main Vac valve closed
3/29/2012	11:24:24 AM	Bubbler valve closed
3/29/2012	11:24:24 AM	Bypass valve opened
3/29/2012	11:24:24 AM	Helium MFC set to  0.000000
3/29/2012	11:24:24 AM	H2 MFC set to  0.000000
3/29/2012	11:24:24 AM	BCl3 MFC set to  0.000000
3/29/2012	11:24:24 AM	PH3 MFC set to  0.000000
3/29/2012	11:24:24 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:24:24 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:24:24 AM	Tube furnace set to 0
3/29/2012	11:25:23 AM	Helium valve closed
3/29/2012	11:25:23 AM	H2 valve closed
3/29/2012	11:25:23 AM	BCl3 valve closed
3/29/2012	11:25:23 AM	PH3 valve closed
3/29/2012	11:25:23 AM	SiCl4 pre valve closed
3/29/2012	11:25:23 AM	SiCl4 post valve closed
3/29/2012	11:25:23 AM	Main Vac valve closed
3/29/2012	11:25:23 AM	Bubbler valve closed
3/29/2012	11:25:23 AM	Bypass valve opened
3/29/2012	11:25:23 AM	Helium MFC set to  0.000000
3/29/2012	11:25:23 AM	H2 MFC set to  0.000000
3/29/2012	11:25:23 AM	BCl3 MFC set to  0.000000
3/29/2012	11:25:23 AM	PH3 MFC set to  0.000000
3/29/2012	11:25:23 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:25:23 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:25:23 AM	Tube furnace set to 0
3/29/2012	11:26:23 AM	Helium valve closed
3/29/2012	11:26:23 AM	H2 valve closed
3/29/2012	11:26:23 AM	BCl3 valve closed
3/29/2012	11:26:23 AM	PH3 valve closed
3/29/2012	11:26:23 AM	SiCl4 pre valve closed
3/29/2012	11:26:23 AM	SiCl4 post valve closed
3/29/2012	11:26:23 AM	Bypass valve closed
3/29/2012	11:26:23 AM	Bubbler valve closed
3/29/2012	11:26:23 AM	Main Vac valve opened
3/29/2012	11:26:23 AM	Helium MFC set to  0.000000
3/29/2012	11:26:23 AM	H2 MFC set to  0.000000
3/29/2012	11:26:23 AM	BCl3 MFC set to  0.000000
3/29/2012	11:26:23 AM	PH3 MFC set to  0.000000
3/29/2012	11:26:23 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:26:23 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:26:23 AM	Tube furnace set to 0
3/29/2012	11:26:24 AM	Run finished at 11:26 AM
3/29/2012	11:26:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2012	11:53:02 AM	Recipe started at 11:52 AM
3/29/2012	11:53:02 AM	Helium valve closed
3/29/2012	11:53:02 AM	H2 valve closed
3/29/2012	11:53:02 AM	BCl3 valve closed
3/29/2012	11:53:02 AM	PH3 valve closed
3/29/2012	11:53:02 AM	SiCl4 pre valve closed
3/29/2012	11:53:02 AM	SiCl4 post valve closed
3/29/2012	11:53:02 AM	Bypass valve closed
3/29/2012	11:53:02 AM	Bubbler valve closed
3/29/2012	11:53:02 AM	Main Vac valve opened
3/29/2012	11:53:02 AM	Helium MFC set to  0.000000
3/29/2012	11:53:02 AM	H2 MFC set to  0.000000
3/29/2012	11:53:02 AM	BCl3 MFC set to  0.000000
3/29/2012	11:53:02 AM	PH3 MFC set to  0.000000
3/29/2012	11:53:02 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:53:02 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:53:02 AM	Tube furnace set to 100
3/29/2012	11:53:32 AM	H2 valve closed
3/29/2012	11:53:32 AM	BCl3 valve closed
3/29/2012	11:53:32 AM	PH3 valve closed
3/29/2012	11:53:32 AM	SiCl4 pre valve closed
3/29/2012	11:53:32 AM	SiCl4 post valve closed
3/29/2012	11:53:32 AM	Bypass valve closed
3/29/2012	11:53:32 AM	Bubbler valve closed
3/29/2012	11:53:32 AM	Helium valve opened
3/29/2012	11:53:32 AM	Main Vac valve opened
3/29/2012	11:53:32 AM	Helium MFC set to  20.000000
3/29/2012	11:53:32 AM	H2 MFC set to  0.000000
3/29/2012	11:53:32 AM	BCl3 MFC set to  0.000000
3/29/2012	11:53:32 AM	PH3 MFC set to  0.000000
3/29/2012	11:53:32 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:53:32 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:53:33 AM	Tube furnace set to 100
3/29/2012	11:54:03 AM	Helium valve closed
3/29/2012	11:54:03 AM	H2 valve closed
3/29/2012	11:54:03 AM	BCl3 valve closed
3/29/2012	11:54:03 AM	PH3 valve closed
3/29/2012	11:54:03 AM	SiCl4 pre valve closed
3/29/2012	11:54:03 AM	SiCl4 post valve closed
3/29/2012	11:54:03 AM	Bypass valve closed
3/29/2012	11:54:03 AM	Bubbler valve closed
3/29/2012	11:54:03 AM	Main Vac valve opened
3/29/2012	11:54:03 AM	Helium MFC set to  0.000000
3/29/2012	11:54:03 AM	H2 MFC set to  0.000000
3/29/2012	11:54:03 AM	BCl3 MFC set to  0.000000
3/29/2012	11:54:03 AM	PH3 MFC set to  0.000000
3/29/2012	11:54:03 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:54:03 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:54:03 AM	Tube furnace set to 100
3/29/2012	11:54:33 AM	H2 valve closed
3/29/2012	11:54:33 AM	BCl3 valve closed
3/29/2012	11:54:33 AM	PH3 valve closed
3/29/2012	11:54:33 AM	SiCl4 pre valve closed
3/29/2012	11:54:33 AM	SiCl4 post valve closed
3/29/2012	11:54:33 AM	Bypass valve closed
3/29/2012	11:54:33 AM	Bubbler valve closed
3/29/2012	11:54:33 AM	Helium valve opened
3/29/2012	11:54:33 AM	Main Vac valve opened
3/29/2012	11:54:33 AM	Helium MFC set to  20.000000
3/29/2012	11:54:33 AM	H2 MFC set to  0.000000
3/29/2012	11:54:33 AM	BCl3 MFC set to  0.000000
3/29/2012	11:54:33 AM	PH3 MFC set to  0.000000
3/29/2012	11:54:33 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:54:33 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:54:33 AM	Tube furnace set to 100
3/29/2012	11:55:03 AM	Helium valve closed
3/29/2012	11:55:03 AM	H2 valve closed
3/29/2012	11:55:03 AM	BCl3 valve closed
3/29/2012	11:55:03 AM	PH3 valve closed
3/29/2012	11:55:03 AM	SiCl4 pre valve closed
3/29/2012	11:55:03 AM	SiCl4 post valve closed
3/29/2012	11:55:03 AM	Bypass valve closed
3/29/2012	11:55:03 AM	Bubbler valve closed
3/29/2012	11:55:03 AM	Main Vac valve opened
3/29/2012	11:55:03 AM	Helium MFC set to  0.000000
3/29/2012	11:55:03 AM	H2 MFC set to  0.000000
3/29/2012	11:55:03 AM	BCl3 MFC set to  0.000000
3/29/2012	11:55:03 AM	PH3 MFC set to  0.000000
3/29/2012	11:55:03 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:55:03 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:55:03 AM	Tube furnace set to 100
3/29/2012	11:55:33 AM	H2 valve closed
3/29/2012	11:55:33 AM	BCl3 valve closed
3/29/2012	11:55:33 AM	PH3 valve closed
3/29/2012	11:55:33 AM	SiCl4 pre valve closed
3/29/2012	11:55:33 AM	SiCl4 post valve closed
3/29/2012	11:55:33 AM	Bypass valve closed
3/29/2012	11:55:33 AM	Bubbler valve closed
3/29/2012	11:55:33 AM	Helium valve opened
3/29/2012	11:55:33 AM	Main Vac valve opened
3/29/2012	11:55:33 AM	Helium MFC set to  20.000000
3/29/2012	11:55:33 AM	H2 MFC set to  0.000000
3/29/2012	11:55:33 AM	BCl3 MFC set to  0.000000
3/29/2012	11:55:33 AM	PH3 MFC set to  0.000000
3/29/2012	11:55:33 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:55:33 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:55:34 AM	Tube furnace set to 100
3/29/2012	11:56:04 AM	Helium valve closed
3/29/2012	11:56:04 AM	H2 valve closed
3/29/2012	11:56:04 AM	BCl3 valve closed
3/29/2012	11:56:04 AM	PH3 valve closed
3/29/2012	11:56:04 AM	SiCl4 pre valve closed
3/29/2012	11:56:04 AM	SiCl4 post valve closed
3/29/2012	11:56:04 AM	Bypass valve closed
3/29/2012	11:56:04 AM	Bubbler valve closed
3/29/2012	11:56:04 AM	Main Vac valve opened
3/29/2012	11:56:04 AM	Helium MFC set to  0.000000
3/29/2012	11:56:04 AM	H2 MFC set to  0.000000
3/29/2012	11:56:04 AM	BCl3 MFC set to  0.000000
3/29/2012	11:56:04 AM	PH3 MFC set to  0.000000
3/29/2012	11:56:04 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:56:04 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:56:04 AM	Tube furnace set to 100
3/29/2012	11:56:34 AM	H2 valve closed
3/29/2012	11:56:34 AM	BCl3 valve closed
3/29/2012	11:56:34 AM	PH3 valve closed
3/29/2012	11:56:34 AM	SiCl4 pre valve closed
3/29/2012	11:56:34 AM	SiCl4 post valve closed
3/29/2012	11:56:34 AM	Bypass valve closed
3/29/2012	11:56:34 AM	Bubbler valve closed
3/29/2012	11:56:34 AM	Helium valve opened
3/29/2012	11:56:34 AM	Main Vac valve opened
3/29/2012	11:56:34 AM	Helium MFC set to  20.000000
3/29/2012	11:56:34 AM	H2 MFC set to  0.000000
3/29/2012	11:56:34 AM	BCl3 MFC set to  0.000000
3/29/2012	11:56:34 AM	PH3 MFC set to  0.000000
3/29/2012	11:56:34 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:56:34 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:56:34 AM	Tube furnace set to 100
3/29/2012	11:57:04 AM	Helium valve closed
3/29/2012	11:57:04 AM	H2 valve closed
3/29/2012	11:57:04 AM	BCl3 valve closed
3/29/2012	11:57:04 AM	PH3 valve closed
3/29/2012	11:57:04 AM	SiCl4 pre valve closed
3/29/2012	11:57:04 AM	SiCl4 post valve closed
3/29/2012	11:57:04 AM	Bypass valve closed
3/29/2012	11:57:04 AM	Bubbler valve closed
3/29/2012	11:57:04 AM	Main Vac valve opened
3/29/2012	11:57:04 AM	Helium MFC set to  0.000000
3/29/2012	11:57:04 AM	H2 MFC set to  0.000000
3/29/2012	11:57:04 AM	BCl3 MFC set to  0.000000
3/29/2012	11:57:04 AM	PH3 MFC set to  0.000000
3/29/2012	11:57:04 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:57:04 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:57:04 AM	Tube furnace set to 100
3/29/2012	11:57:34 AM	H2 valve closed
3/29/2012	11:57:34 AM	BCl3 valve closed
3/29/2012	11:57:34 AM	PH3 valve closed
3/29/2012	11:57:34 AM	SiCl4 pre valve closed
3/29/2012	11:57:34 AM	SiCl4 post valve closed
3/29/2012	11:57:34 AM	Bypass valve closed
3/29/2012	11:57:34 AM	Bubbler valve closed
3/29/2012	11:57:34 AM	Helium valve opened
3/29/2012	11:57:34 AM	Main Vac valve opened
3/29/2012	11:57:34 AM	Helium MFC set to  20.000000
3/29/2012	11:57:34 AM	H2 MFC set to  0.000000
3/29/2012	11:57:34 AM	BCl3 MFC set to  0.000000
3/29/2012	11:57:34 AM	PH3 MFC set to  0.000000
3/29/2012	11:57:34 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:57:34 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:57:35 AM	Tube furnace set to 100
3/29/2012	11:58:05 AM	Helium valve closed
3/29/2012	11:58:05 AM	H2 valve closed
3/29/2012	11:58:05 AM	BCl3 valve closed
3/29/2012	11:58:05 AM	PH3 valve closed
3/29/2012	11:58:05 AM	SiCl4 pre valve closed
3/29/2012	11:58:05 AM	SiCl4 post valve closed
3/29/2012	11:58:05 AM	Bypass valve closed
3/29/2012	11:58:05 AM	Bubbler valve closed
3/29/2012	11:58:05 AM	Main Vac valve opened
3/29/2012	11:58:05 AM	Helium MFC set to  0.000000
3/29/2012	11:58:05 AM	H2 MFC set to  0.000000
3/29/2012	11:58:05 AM	BCl3 MFC set to  0.000000
3/29/2012	11:58:05 AM	PH3 MFC set to  0.000000
3/29/2012	11:58:05 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:58:05 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:58:05 AM	Tube furnace set to 100
3/29/2012	11:58:35 AM	H2 valve closed
3/29/2012	11:58:35 AM	BCl3 valve closed
3/29/2012	11:58:35 AM	PH3 valve closed
3/29/2012	11:58:35 AM	SiCl4 pre valve closed
3/29/2012	11:58:35 AM	SiCl4 post valve closed
3/29/2012	11:58:35 AM	Bypass valve closed
3/29/2012	11:58:35 AM	Bubbler valve closed
3/29/2012	11:58:35 AM	Helium valve opened
3/29/2012	11:58:35 AM	Main Vac valve opened
3/29/2012	11:58:35 AM	Helium MFC set to  20.000000
3/29/2012	11:58:35 AM	H2 MFC set to  0.000000
3/29/2012	11:58:35 AM	BCl3 MFC set to  0.000000
3/29/2012	11:58:35 AM	PH3 MFC set to  0.000000
3/29/2012	11:58:35 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:58:35 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:58:35 AM	Tube furnace set to 100
3/29/2012	11:59:05 AM	Helium valve closed
3/29/2012	11:59:05 AM	H2 valve closed
3/29/2012	11:59:05 AM	BCl3 valve closed
3/29/2012	11:59:05 AM	PH3 valve closed
3/29/2012	11:59:05 AM	SiCl4 pre valve closed
3/29/2012	11:59:05 AM	SiCl4 post valve closed
3/29/2012	11:59:05 AM	Bypass valve closed
3/29/2012	11:59:05 AM	Bubbler valve closed
3/29/2012	11:59:05 AM	Main Vac valve opened
3/29/2012	11:59:05 AM	Helium MFC set to  0.000000
3/29/2012	11:59:05 AM	H2 MFC set to  0.000000
3/29/2012	11:59:05 AM	BCl3 MFC set to  0.000000
3/29/2012	11:59:05 AM	PH3 MFC set to  0.000000
3/29/2012	11:59:05 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:59:05 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:59:05 AM	Tube furnace set to 100
3/29/2012	11:59:35 AM	H2 valve closed
3/29/2012	11:59:35 AM	BCl3 valve closed
3/29/2012	11:59:35 AM	PH3 valve closed
3/29/2012	11:59:35 AM	SiCl4 pre valve closed
3/29/2012	11:59:35 AM	SiCl4 post valve closed
3/29/2012	11:59:35 AM	Bypass valve closed
3/29/2012	11:59:35 AM	Bubbler valve closed
3/29/2012	11:59:35 AM	Helium valve opened
3/29/2012	11:59:35 AM	Main Vac valve opened
3/29/2012	11:59:35 AM	Helium MFC set to  20.000000
3/29/2012	11:59:35 AM	H2 MFC set to  0.000000
3/29/2012	11:59:35 AM	BCl3 MFC set to  0.000000
3/29/2012	11:59:35 AM	PH3 MFC set to  0.000000
3/29/2012	11:59:35 AM	SiCl4 MFC set to  0.000000
3/29/2012	11:59:35 AM	Bypass solenoid MFC set to  0.000000
3/29/2012	11:59:35 AM	Tube furnace set to 100
3/29/2012	12:00:05 PM	Helium valve closed
3/29/2012	12:00:06 PM	H2 valve closed
3/29/2012	12:00:06 PM	BCl3 valve closed
3/29/2012	12:00:06 PM	PH3 valve closed
3/29/2012	12:00:06 PM	SiCl4 pre valve closed
3/29/2012	12:00:06 PM	SiCl4 post valve closed
3/29/2012	12:00:06 PM	Bypass valve closed
3/29/2012	12:00:06 PM	Bubbler valve closed
3/29/2012	12:00:06 PM	Main Vac valve opened
3/29/2012	12:00:06 PM	Helium MFC set to  0.000000
3/29/2012	12:00:06 PM	H2 MFC set to  0.000000
3/29/2012	12:00:06 PM	BCl3 MFC set to  0.000000
3/29/2012	12:00:06 PM	PH3 MFC set to  0.000000
3/29/2012	12:00:06 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:00:06 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:00:06 PM	Tube furnace set to 100
3/29/2012	12:00:36 PM	H2 valve closed
3/29/2012	12:00:36 PM	BCl3 valve closed
3/29/2012	12:00:36 PM	PH3 valve closed
3/29/2012	12:00:36 PM	SiCl4 pre valve closed
3/29/2012	12:00:36 PM	SiCl4 post valve closed
3/29/2012	12:00:36 PM	Bypass valve closed
3/29/2012	12:00:36 PM	Bubbler valve closed
3/29/2012	12:00:36 PM	Helium valve opened
3/29/2012	12:00:36 PM	Main Vac valve opened
3/29/2012	12:00:36 PM	Helium MFC set to  20.000000
3/29/2012	12:00:36 PM	H2 MFC set to  0.000000
3/29/2012	12:00:36 PM	BCl3 MFC set to  0.000000
3/29/2012	12:00:36 PM	PH3 MFC set to  0.000000
3/29/2012	12:00:36 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:00:36 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:00:36 PM	Tube furnace set to 100
3/29/2012	12:01:06 PM	Helium valve closed
3/29/2012	12:01:06 PM	H2 valve closed
3/29/2012	12:01:06 PM	BCl3 valve closed
3/29/2012	12:01:06 PM	PH3 valve closed
3/29/2012	12:01:06 PM	SiCl4 pre valve closed
3/29/2012	12:01:06 PM	SiCl4 post valve closed
3/29/2012	12:01:06 PM	Bypass valve closed
3/29/2012	12:01:06 PM	Bubbler valve closed
3/29/2012	12:01:06 PM	Main Vac valve opened
3/29/2012	12:01:06 PM	Helium MFC set to  0.000000
3/29/2012	12:01:06 PM	H2 MFC set to  0.000000
3/29/2012	12:01:06 PM	BCl3 MFC set to  0.000000
3/29/2012	12:01:06 PM	PH3 MFC set to  0.000000
3/29/2012	12:01:06 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:01:06 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:01:06 PM	Tube furnace set to 100
3/29/2012	12:01:36 PM	H2 valve closed
3/29/2012	12:01:36 PM	BCl3 valve closed
3/29/2012	12:01:36 PM	PH3 valve closed
3/29/2012	12:01:36 PM	SiCl4 pre valve closed
3/29/2012	12:01:36 PM	SiCl4 post valve closed
3/29/2012	12:01:36 PM	Bypass valve closed
3/29/2012	12:01:36 PM	Bubbler valve closed
3/29/2012	12:01:36 PM	Helium valve opened
3/29/2012	12:01:36 PM	Main Vac valve opened
3/29/2012	12:01:36 PM	Helium MFC set to  20.000000
3/29/2012	12:01:36 PM	H2 MFC set to  0.000000
3/29/2012	12:01:36 PM	BCl3 MFC set to  0.000000
3/29/2012	12:01:36 PM	PH3 MFC set to  0.000000
3/29/2012	12:01:36 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:01:36 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:01:36 PM	Tube furnace set to 100
3/29/2012	12:02:06 PM	Helium valve closed
3/29/2012	12:02:06 PM	H2 valve closed
3/29/2012	12:02:06 PM	BCl3 valve closed
3/29/2012	12:02:06 PM	PH3 valve closed
3/29/2012	12:02:06 PM	SiCl4 pre valve closed
3/29/2012	12:02:06 PM	SiCl4 post valve closed
3/29/2012	12:02:06 PM	Bypass valve closed
3/29/2012	12:02:06 PM	Bubbler valve closed
3/29/2012	12:02:06 PM	Main Vac valve opened
3/29/2012	12:02:06 PM	Helium MFC set to  0.000000
3/29/2012	12:02:06 PM	H2 MFC set to  0.000000
3/29/2012	12:02:06 PM	BCl3 MFC set to  0.000000
3/29/2012	12:02:06 PM	PH3 MFC set to  0.000000
3/29/2012	12:02:06 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:02:06 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:02:07 PM	Tube furnace set to 100
3/29/2012	12:02:37 PM	H2 valve closed
3/29/2012	12:02:37 PM	BCl3 valve closed
3/29/2012	12:02:37 PM	PH3 valve closed
3/29/2012	12:02:37 PM	SiCl4 pre valve closed
3/29/2012	12:02:37 PM	SiCl4 post valve closed
3/29/2012	12:02:37 PM	Bypass valve closed
3/29/2012	12:02:37 PM	Bubbler valve closed
3/29/2012	12:02:37 PM	Helium valve opened
3/29/2012	12:02:37 PM	Main Vac valve opened
3/29/2012	12:02:37 PM	Helium MFC set to  20.000000
3/29/2012	12:02:37 PM	H2 MFC set to  0.000000
3/29/2012	12:02:37 PM	BCl3 MFC set to  0.000000
3/29/2012	12:02:37 PM	PH3 MFC set to  0.000000
3/29/2012	12:02:37 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:02:37 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:02:37 PM	Tube furnace set to 100
3/29/2012	12:03:07 PM	Helium valve closed
3/29/2012	12:03:07 PM	H2 valve closed
3/29/2012	12:03:07 PM	BCl3 valve closed
3/29/2012	12:03:07 PM	PH3 valve closed
3/29/2012	12:03:07 PM	SiCl4 pre valve closed
3/29/2012	12:03:07 PM	SiCl4 post valve closed
3/29/2012	12:03:07 PM	Bypass valve closed
3/29/2012	12:03:07 PM	Bubbler valve closed
3/29/2012	12:03:07 PM	Main Vac valve opened
3/29/2012	12:03:07 PM	Helium MFC set to  0.000000
3/29/2012	12:03:07 PM	H2 MFC set to  0.000000
3/29/2012	12:03:07 PM	BCl3 MFC set to  0.000000
3/29/2012	12:03:07 PM	PH3 MFC set to  0.000000
3/29/2012	12:03:07 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:03:07 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:03:07 PM	Tube furnace set to 100
3/29/2012	12:03:08 PM	Run finished at 12:03 PM
3/29/2012	12:06:47 PM	Recipe started at 12:06 PM
3/29/2012	12:06:47 PM	Helium valve closed
3/29/2012	12:06:47 PM	H2 valve closed
3/29/2012	12:06:47 PM	BCl3 valve closed
3/29/2012	12:06:47 PM	PH3 valve closed
3/29/2012	12:06:47 PM	SiCl4 pre valve closed
3/29/2012	12:06:47 PM	SiCl4 post valve closed
3/29/2012	12:06:47 PM	Bypass valve closed
3/29/2012	12:06:47 PM	Bubbler valve closed
3/29/2012	12:06:47 PM	Main Vac valve opened
3/29/2012	12:06:47 PM	Helium MFC set to  0.000000
3/29/2012	12:06:47 PM	H2 MFC set to  0.000000
3/29/2012	12:06:47 PM	BCl3 MFC set to  0.000000
3/29/2012	12:06:47 PM	PH3 MFC set to  0.000000
3/29/2012	12:06:47 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:06:47 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:06:47 PM	Tube furnace set to 100
3/29/2012	12:07:04 PM	H2 valve closed
3/29/2012	12:07:04 PM	BCl3 valve closed
3/29/2012	12:07:04 PM	PH3 valve closed
3/29/2012	12:07:04 PM	SiCl4 pre valve closed
3/29/2012	12:07:04 PM	SiCl4 post valve closed
3/29/2012	12:07:04 PM	Bypass valve closed
3/29/2012	12:07:04 PM	Bubbler valve closed
3/29/2012	12:07:04 PM	Helium valve opened
3/29/2012	12:07:04 PM	Main Vac valve opened
3/29/2012	12:07:04 PM	Helium MFC set to  20.000000
3/29/2012	12:07:04 PM	H2 MFC set to  0.000000
3/29/2012	12:07:04 PM	BCl3 MFC set to  0.000000
3/29/2012	12:07:04 PM	PH3 MFC set to  0.000000
3/29/2012	12:07:04 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:07:04 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:07:04 PM	Tube furnace set to 100
3/29/2012	12:07:34 PM	Helium valve closed
3/29/2012	12:07:34 PM	H2 valve closed
3/29/2012	12:07:34 PM	BCl3 valve closed
3/29/2012	12:07:34 PM	PH3 valve closed
3/29/2012	12:07:34 PM	SiCl4 pre valve closed
3/29/2012	12:07:34 PM	SiCl4 post valve closed
3/29/2012	12:07:34 PM	Bypass valve closed
3/29/2012	12:07:34 PM	Bubbler valve closed
3/29/2012	12:07:34 PM	Main Vac valve opened
3/29/2012	12:07:34 PM	Helium MFC set to  0.000000
3/29/2012	12:07:34 PM	H2 MFC set to  0.000000
3/29/2012	12:07:34 PM	BCl3 MFC set to  0.000000
3/29/2012	12:07:34 PM	PH3 MFC set to  0.000000
3/29/2012	12:07:34 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:07:34 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:07:34 PM	Tube furnace set to 100
3/29/2012	12:08:04 PM	H2 valve closed
3/29/2012	12:08:04 PM	BCl3 valve closed
3/29/2012	12:08:04 PM	PH3 valve closed
3/29/2012	12:08:04 PM	SiCl4 pre valve closed
3/29/2012	12:08:04 PM	SiCl4 post valve closed
3/29/2012	12:08:04 PM	Bypass valve closed
3/29/2012	12:08:04 PM	Bubbler valve closed
3/29/2012	12:08:04 PM	Helium valve opened
3/29/2012	12:08:04 PM	Main Vac valve opened
3/29/2012	12:08:04 PM	Helium MFC set to  20.000000
3/29/2012	12:08:04 PM	H2 MFC set to  0.000000
3/29/2012	12:08:04 PM	BCl3 MFC set to  0.000000
3/29/2012	12:08:04 PM	PH3 MFC set to  0.000000
3/29/2012	12:08:04 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:08:04 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:08:05 PM	Tube furnace set to 100
3/29/2012	12:08:35 PM	Helium valve closed
3/29/2012	12:08:35 PM	H2 valve closed
3/29/2012	12:08:35 PM	BCl3 valve closed
3/29/2012	12:08:35 PM	PH3 valve closed
3/29/2012	12:08:35 PM	SiCl4 pre valve closed
3/29/2012	12:08:35 PM	SiCl4 post valve closed
3/29/2012	12:08:35 PM	Bypass valve closed
3/29/2012	12:08:35 PM	Bubbler valve closed
3/29/2012	12:08:35 PM	Main Vac valve opened
3/29/2012	12:08:35 PM	Helium MFC set to  0.000000
3/29/2012	12:08:35 PM	H2 MFC set to  0.000000
3/29/2012	12:08:35 PM	BCl3 MFC set to  0.000000
3/29/2012	12:08:35 PM	PH3 MFC set to  0.000000
3/29/2012	12:08:35 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:08:35 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:08:35 PM	Tube furnace set to 100
3/29/2012	12:09:05 PM	H2 valve closed
3/29/2012	12:09:05 PM	BCl3 valve closed
3/29/2012	12:09:05 PM	PH3 valve closed
3/29/2012	12:09:05 PM	SiCl4 pre valve closed
3/29/2012	12:09:05 PM	SiCl4 post valve closed
3/29/2012	12:09:05 PM	Bypass valve closed
3/29/2012	12:09:05 PM	Bubbler valve closed
3/29/2012	12:09:05 PM	Helium valve opened
3/29/2012	12:09:05 PM	Main Vac valve opened
3/29/2012	12:09:05 PM	Helium MFC set to  20.000000
3/29/2012	12:09:05 PM	H2 MFC set to  0.000000
3/29/2012	12:09:05 PM	BCl3 MFC set to  0.000000
3/29/2012	12:09:05 PM	PH3 MFC set to  0.000000
3/29/2012	12:09:05 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:09:05 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:09:05 PM	Tube furnace set to 100
3/29/2012	12:09:35 PM	Helium valve closed
3/29/2012	12:09:35 PM	H2 valve closed
3/29/2012	12:09:35 PM	BCl3 valve closed
3/29/2012	12:09:35 PM	PH3 valve closed
3/29/2012	12:09:35 PM	SiCl4 pre valve closed
3/29/2012	12:09:35 PM	SiCl4 post valve closed
3/29/2012	12:09:35 PM	Bypass valve closed
3/29/2012	12:09:35 PM	Bubbler valve closed
3/29/2012	12:09:35 PM	Main Vac valve opened
3/29/2012	12:09:35 PM	Helium MFC set to  0.000000
3/29/2012	12:09:35 PM	H2 MFC set to  0.000000
3/29/2012	12:09:35 PM	BCl3 MFC set to  0.000000
3/29/2012	12:09:35 PM	PH3 MFC set to  0.000000
3/29/2012	12:09:35 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:09:35 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:09:35 PM	Tube furnace set to 100
3/29/2012	12:10:05 PM	H2 valve closed
3/29/2012	12:10:05 PM	BCl3 valve closed
3/29/2012	12:10:05 PM	PH3 valve closed
3/29/2012	12:10:05 PM	SiCl4 pre valve closed
3/29/2012	12:10:05 PM	SiCl4 post valve closed
3/29/2012	12:10:05 PM	Bypass valve closed
3/29/2012	12:10:05 PM	Bubbler valve closed
3/29/2012	12:10:05 PM	Helium valve opened
3/29/2012	12:10:05 PM	Main Vac valve opened
3/29/2012	12:10:05 PM	Helium MFC set to  20.000000
3/29/2012	12:10:05 PM	H2 MFC set to  0.000000
3/29/2012	12:10:05 PM	BCl3 MFC set to  0.000000
3/29/2012	12:10:05 PM	PH3 MFC set to  0.000000
3/29/2012	12:10:05 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:10:05 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:10:05 PM	Tube furnace set to 100
3/29/2012	12:10:35 PM	Helium valve closed
3/29/2012	12:10:36 PM	H2 valve closed
3/29/2012	12:10:36 PM	BCl3 valve closed
3/29/2012	12:10:36 PM	PH3 valve closed
3/29/2012	12:10:36 PM	SiCl4 pre valve closed
3/29/2012	12:10:36 PM	SiCl4 post valve closed
3/29/2012	12:10:36 PM	Bypass valve closed
3/29/2012	12:10:36 PM	Bubbler valve closed
3/29/2012	12:10:36 PM	Main Vac valve opened
3/29/2012	12:10:36 PM	Helium MFC set to  0.000000
3/29/2012	12:10:36 PM	H2 MFC set to  0.000000
3/29/2012	12:10:36 PM	BCl3 MFC set to  0.000000
3/29/2012	12:10:36 PM	PH3 MFC set to  0.000000
3/29/2012	12:10:36 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:10:36 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:10:36 PM	Tube furnace set to 100
3/29/2012	12:11:06 PM	H2 valve closed
3/29/2012	12:11:06 PM	BCl3 valve closed
3/29/2012	12:11:06 PM	PH3 valve closed
3/29/2012	12:11:06 PM	SiCl4 pre valve closed
3/29/2012	12:11:06 PM	SiCl4 post valve closed
3/29/2012	12:11:06 PM	Bypass valve closed
3/29/2012	12:11:06 PM	Bubbler valve closed
3/29/2012	12:11:06 PM	Helium valve opened
3/29/2012	12:11:06 PM	Main Vac valve opened
3/29/2012	12:11:06 PM	Helium MFC set to  20.000000
3/29/2012	12:11:06 PM	H2 MFC set to  0.000000
3/29/2012	12:11:06 PM	BCl3 MFC set to  0.000000
3/29/2012	12:11:06 PM	PH3 MFC set to  0.000000
3/29/2012	12:11:06 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:11:06 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:11:06 PM	Tube furnace set to 100
3/29/2012	12:11:36 PM	Helium valve closed
3/29/2012	12:11:36 PM	H2 valve closed
3/29/2012	12:11:36 PM	BCl3 valve closed
3/29/2012	12:11:36 PM	PH3 valve closed
3/29/2012	12:11:36 PM	SiCl4 pre valve closed
3/29/2012	12:11:36 PM	SiCl4 post valve closed
3/29/2012	12:11:36 PM	Bypass valve closed
3/29/2012	12:11:36 PM	Bubbler valve closed
3/29/2012	12:11:36 PM	Main Vac valve opened
3/29/2012	12:11:36 PM	Helium MFC set to  0.000000
3/29/2012	12:11:36 PM	H2 MFC set to  0.000000
3/29/2012	12:11:36 PM	BCl3 MFC set to  0.000000
3/29/2012	12:11:36 PM	PH3 MFC set to  0.000000
3/29/2012	12:11:36 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:11:36 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:11:36 PM	Tube furnace set to 100
3/29/2012	12:12:06 PM	H2 valve closed
3/29/2012	12:12:06 PM	BCl3 valve closed
3/29/2012	12:12:06 PM	PH3 valve closed
3/29/2012	12:12:06 PM	SiCl4 pre valve closed
3/29/2012	12:12:06 PM	SiCl4 post valve closed
3/29/2012	12:12:06 PM	Bypass valve closed
3/29/2012	12:12:06 PM	Bubbler valve closed
3/29/2012	12:12:06 PM	Helium valve opened
3/29/2012	12:12:06 PM	Main Vac valve opened
3/29/2012	12:12:06 PM	Helium MFC set to  20.000000
3/29/2012	12:12:06 PM	H2 MFC set to  0.000000
3/29/2012	12:12:06 PM	BCl3 MFC set to  0.000000
3/29/2012	12:12:06 PM	PH3 MFC set to  0.000000
3/29/2012	12:12:06 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:12:06 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:12:06 PM	Tube furnace set to 100
3/29/2012	12:12:36 PM	Helium valve closed
3/29/2012	12:12:36 PM	H2 valve closed
3/29/2012	12:12:36 PM	BCl3 valve closed
3/29/2012	12:12:36 PM	PH3 valve closed
3/29/2012	12:12:36 PM	SiCl4 pre valve closed
3/29/2012	12:12:36 PM	SiCl4 post valve closed
3/29/2012	12:12:36 PM	Bypass valve closed
3/29/2012	12:12:36 PM	Bubbler valve closed
3/29/2012	12:12:36 PM	Main Vac valve opened
3/29/2012	12:12:36 PM	Helium MFC set to  0.000000
3/29/2012	12:12:36 PM	H2 MFC set to  0.000000
3/29/2012	12:12:36 PM	BCl3 MFC set to  0.000000
3/29/2012	12:12:36 PM	PH3 MFC set to  0.000000
3/29/2012	12:12:36 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:12:37 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:12:37 PM	Tube furnace set to 100
3/29/2012	12:13:07 PM	H2 valve closed
3/29/2012	12:13:07 PM	BCl3 valve closed
3/29/2012	12:13:07 PM	PH3 valve closed
3/29/2012	12:13:07 PM	SiCl4 pre valve closed
3/29/2012	12:13:07 PM	SiCl4 post valve closed
3/29/2012	12:13:07 PM	Bypass valve closed
3/29/2012	12:13:07 PM	Bubbler valve closed
3/29/2012	12:13:07 PM	Helium valve opened
3/29/2012	12:13:07 PM	Main Vac valve opened
3/29/2012	12:13:07 PM	Helium MFC set to  20.000000
3/29/2012	12:13:07 PM	H2 MFC set to  0.000000
3/29/2012	12:13:07 PM	BCl3 MFC set to  0.000000
3/29/2012	12:13:07 PM	PH3 MFC set to  0.000000
3/29/2012	12:13:07 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:13:07 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:13:07 PM	Tube furnace set to 100
3/29/2012	12:13:37 PM	Helium valve closed
3/29/2012	12:13:37 PM	H2 valve closed
3/29/2012	12:13:37 PM	BCl3 valve closed
3/29/2012	12:13:37 PM	PH3 valve closed
3/29/2012	12:13:37 PM	SiCl4 pre valve closed
3/29/2012	12:13:37 PM	SiCl4 post valve closed
3/29/2012	12:13:37 PM	Bypass valve closed
3/29/2012	12:13:37 PM	Bubbler valve closed
3/29/2012	12:13:37 PM	Main Vac valve opened
3/29/2012	12:13:37 PM	Helium MFC set to  0.000000
3/29/2012	12:13:37 PM	H2 MFC set to  0.000000
3/29/2012	12:13:37 PM	BCl3 MFC set to  0.000000
3/29/2012	12:13:37 PM	PH3 MFC set to  0.000000
3/29/2012	12:13:37 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:13:37 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:13:37 PM	Tube furnace set to 100
3/29/2012	12:14:07 PM	H2 valve closed
3/29/2012	12:14:07 PM	BCl3 valve closed
3/29/2012	12:14:07 PM	PH3 valve closed
3/29/2012	12:14:07 PM	SiCl4 pre valve closed
3/29/2012	12:14:07 PM	SiCl4 post valve closed
3/29/2012	12:14:07 PM	Bypass valve closed
3/29/2012	12:14:07 PM	Bubbler valve closed
3/29/2012	12:14:07 PM	Helium valve opened
3/29/2012	12:14:07 PM	Main Vac valve opened
3/29/2012	12:14:07 PM	Helium MFC set to  20.000000
3/29/2012	12:14:07 PM	H2 MFC set to  0.000000
3/29/2012	12:14:07 PM	BCl3 MFC set to  0.000000
3/29/2012	12:14:07 PM	PH3 MFC set to  0.000000
3/29/2012	12:14:07 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:14:07 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:14:07 PM	Tube furnace set to 100
3/29/2012	12:14:37 PM	Helium valve closed
3/29/2012	12:14:37 PM	H2 valve closed
3/29/2012	12:14:37 PM	BCl3 valve closed
3/29/2012	12:14:37 PM	PH3 valve closed
3/29/2012	12:14:37 PM	SiCl4 pre valve closed
3/29/2012	12:14:37 PM	SiCl4 post valve closed
3/29/2012	12:14:37 PM	Bypass valve closed
3/29/2012	12:14:37 PM	Bubbler valve closed
3/29/2012	12:14:37 PM	Main Vac valve opened
3/29/2012	12:14:37 PM	Helium MFC set to  0.000000
3/29/2012	12:14:37 PM	H2 MFC set to  0.000000
3/29/2012	12:14:37 PM	BCl3 MFC set to  0.000000
3/29/2012	12:14:37 PM	PH3 MFC set to  0.000000
3/29/2012	12:14:37 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:14:37 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:14:38 PM	Tube furnace set to 100
3/29/2012	12:15:08 PM	H2 valve closed
3/29/2012	12:15:08 PM	BCl3 valve closed
3/29/2012	12:15:08 PM	PH3 valve closed
3/29/2012	12:15:08 PM	SiCl4 pre valve closed
3/29/2012	12:15:08 PM	SiCl4 post valve closed
3/29/2012	12:15:08 PM	Bypass valve closed
3/29/2012	12:15:08 PM	Bubbler valve closed
3/29/2012	12:15:08 PM	Helium valve opened
3/29/2012	12:15:08 PM	Main Vac valve opened
3/29/2012	12:15:08 PM	Helium MFC set to  20.000000
3/29/2012	12:15:08 PM	H2 MFC set to  0.000000
3/29/2012	12:15:08 PM	BCl3 MFC set to  0.000000
3/29/2012	12:15:08 PM	PH3 MFC set to  0.000000
3/29/2012	12:15:08 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:15:08 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:15:08 PM	Tube furnace set to 100
3/29/2012	12:15:38 PM	Helium valve closed
3/29/2012	12:15:38 PM	H2 valve closed
3/29/2012	12:15:38 PM	BCl3 valve closed
3/29/2012	12:15:38 PM	PH3 valve closed
3/29/2012	12:15:38 PM	SiCl4 pre valve closed
3/29/2012	12:15:38 PM	SiCl4 post valve closed
3/29/2012	12:15:38 PM	Bypass valve closed
3/29/2012	12:15:38 PM	Bubbler valve closed
3/29/2012	12:15:38 PM	Main Vac valve opened
3/29/2012	12:15:38 PM	Helium MFC set to  0.000000
3/29/2012	12:15:38 PM	H2 MFC set to  0.000000
3/29/2012	12:15:38 PM	BCl3 MFC set to  0.000000
3/29/2012	12:15:38 PM	PH3 MFC set to  0.000000
3/29/2012	12:15:38 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:15:38 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:15:38 PM	Tube furnace set to 100
3/29/2012	12:16:08 PM	H2 valve closed
3/29/2012	12:16:08 PM	BCl3 valve closed
3/29/2012	12:16:08 PM	PH3 valve closed
3/29/2012	12:16:08 PM	SiCl4 pre valve closed
3/29/2012	12:16:08 PM	SiCl4 post valve closed
3/29/2012	12:16:08 PM	Bypass valve closed
3/29/2012	12:16:08 PM	Bubbler valve closed
3/29/2012	12:16:08 PM	Helium valve opened
3/29/2012	12:16:08 PM	Main Vac valve opened
3/29/2012	12:16:08 PM	Helium MFC set to  20.000000
3/29/2012	12:16:08 PM	H2 MFC set to  0.000000
3/29/2012	12:16:08 PM	BCl3 MFC set to  0.000000
3/29/2012	12:16:08 PM	PH3 MFC set to  0.000000
3/29/2012	12:16:08 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:16:08 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:16:08 PM	Tube furnace set to 100
3/29/2012	12:16:38 PM	Helium valve closed
3/29/2012	12:16:38 PM	H2 valve closed
3/29/2012	12:16:38 PM	BCl3 valve closed
3/29/2012	12:16:38 PM	PH3 valve closed
3/29/2012	12:16:38 PM	SiCl4 pre valve closed
3/29/2012	12:16:38 PM	SiCl4 post valve closed
3/29/2012	12:16:38 PM	Bypass valve closed
3/29/2012	12:16:38 PM	Bubbler valve closed
3/29/2012	12:16:38 PM	Main Vac valve opened
3/29/2012	12:16:38 PM	Helium MFC set to  0.000000
3/29/2012	12:16:38 PM	H2 MFC set to  0.000000
3/29/2012	12:16:38 PM	BCl3 MFC set to  0.000000
3/29/2012	12:16:38 PM	PH3 MFC set to  0.000000
3/29/2012	12:16:38 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:16:38 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:16:39 PM	Tube furnace set to 100
3/29/2012	12:16:40 PM	Run finished at 12:16 PM
3/29/2012	12:17:25 PM	Main Vac valve closed
3/29/2012	12:17:34 PM	Main Vac valve opened
3/29/2012	12:17:44 PM	Recipe started at 12:17 PM
3/29/2012	12:17:44 PM	Helium valve closed
3/29/2012	12:17:44 PM	H2 valve closed
3/29/2012	12:17:44 PM	BCl3 valve closed
3/29/2012	12:17:44 PM	PH3 valve closed
3/29/2012	12:17:44 PM	SiCl4 pre valve closed
3/29/2012	12:17:44 PM	SiCl4 post valve closed
3/29/2012	12:17:44 PM	Bypass valve closed
3/29/2012	12:17:44 PM	Bubbler valve closed
3/29/2012	12:17:44 PM	Main Vac valve opened
3/29/2012	12:17:44 PM	Helium MFC set to  0.000000
3/29/2012	12:17:44 PM	H2 MFC set to  0.000000
3/29/2012	12:17:44 PM	BCl3 MFC set to  0.000000
3/29/2012	12:17:44 PM	PH3 MFC set to  0.000000
3/29/2012	12:17:44 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:17:44 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:17:44 PM	Tube furnace set to 100
3/29/2012	12:18:14 PM	H2 valve closed
3/29/2012	12:18:14 PM	BCl3 valve closed
3/29/2012	12:18:14 PM	PH3 valve closed
3/29/2012	12:18:14 PM	SiCl4 pre valve closed
3/29/2012	12:18:14 PM	SiCl4 post valve closed
3/29/2012	12:18:14 PM	Bypass valve closed
3/29/2012	12:18:14 PM	Bubbler valve closed
3/29/2012	12:18:14 PM	Helium valve opened
3/29/2012	12:18:14 PM	Main Vac valve opened
3/29/2012	12:18:14 PM	Helium MFC set to  20.000000
3/29/2012	12:18:14 PM	H2 MFC set to  0.000000
3/29/2012	12:18:14 PM	BCl3 MFC set to  0.000000
3/29/2012	12:18:14 PM	PH3 MFC set to  0.000000
3/29/2012	12:18:14 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:18:14 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:18:14 PM	Tube furnace set to 100
3/29/2012	12:18:44 PM	Helium valve closed
3/29/2012	12:18:44 PM	H2 valve closed
3/29/2012	12:18:44 PM	BCl3 valve closed
3/29/2012	12:18:44 PM	PH3 valve closed
3/29/2012	12:18:44 PM	SiCl4 pre valve closed
3/29/2012	12:18:44 PM	SiCl4 post valve closed
3/29/2012	12:18:44 PM	Bypass valve closed
3/29/2012	12:18:44 PM	Bubbler valve closed
3/29/2012	12:18:44 PM	Main Vac valve opened
3/29/2012	12:18:44 PM	Helium MFC set to  0.000000
3/29/2012	12:18:44 PM	H2 MFC set to  0.000000
3/29/2012	12:18:44 PM	BCl3 MFC set to  0.000000
3/29/2012	12:18:44 PM	PH3 MFC set to  0.000000
3/29/2012	12:18:44 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:18:44 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:18:44 PM	Tube furnace set to 100
3/29/2012	12:19:15 PM	H2 valve closed
3/29/2012	12:19:15 PM	BCl3 valve closed
3/29/2012	12:19:15 PM	PH3 valve closed
3/29/2012	12:19:15 PM	SiCl4 pre valve closed
3/29/2012	12:19:15 PM	SiCl4 post valve closed
3/29/2012	12:19:15 PM	Bypass valve closed
3/29/2012	12:19:15 PM	Bubbler valve closed
3/29/2012	12:19:15 PM	Helium valve opened
3/29/2012	12:19:15 PM	Main Vac valve opened
3/29/2012	12:19:15 PM	Helium MFC set to  20.000000
3/29/2012	12:19:15 PM	H2 MFC set to  0.000000
3/29/2012	12:19:15 PM	BCl3 MFC set to  0.000000
3/29/2012	12:19:15 PM	PH3 MFC set to  0.000000
3/29/2012	12:19:15 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:19:15 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:19:15 PM	Tube furnace set to 100
3/29/2012	12:19:45 PM	Helium valve closed
3/29/2012	12:19:45 PM	H2 valve closed
3/29/2012	12:19:45 PM	BCl3 valve closed
3/29/2012	12:19:45 PM	PH3 valve closed
3/29/2012	12:19:45 PM	SiCl4 pre valve closed
3/29/2012	12:19:45 PM	SiCl4 post valve closed
3/29/2012	12:19:45 PM	Bypass valve closed
3/29/2012	12:19:45 PM	Bubbler valve closed
3/29/2012	12:19:45 PM	Main Vac valve opened
3/29/2012	12:19:45 PM	Helium MFC set to  0.000000
3/29/2012	12:19:45 PM	H2 MFC set to  0.000000
3/29/2012	12:19:45 PM	BCl3 MFC set to  0.000000
3/29/2012	12:19:45 PM	PH3 MFC set to  0.000000
3/29/2012	12:19:45 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:19:45 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:19:45 PM	Tube furnace set to 100
3/29/2012	12:20:15 PM	H2 valve closed
3/29/2012	12:20:15 PM	BCl3 valve closed
3/29/2012	12:20:15 PM	PH3 valve closed
3/29/2012	12:20:15 PM	SiCl4 pre valve closed
3/29/2012	12:20:15 PM	SiCl4 post valve closed
3/29/2012	12:20:15 PM	Bypass valve closed
3/29/2012	12:20:15 PM	Bubbler valve closed
3/29/2012	12:20:15 PM	Helium valve opened
3/29/2012	12:20:15 PM	Main Vac valve opened
3/29/2012	12:20:15 PM	Helium MFC set to  20.000000
3/29/2012	12:20:15 PM	H2 MFC set to  0.000000
3/29/2012	12:20:15 PM	BCl3 MFC set to  0.000000
3/29/2012	12:20:15 PM	PH3 MFC set to  0.000000
3/29/2012	12:20:15 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:20:15 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:20:15 PM	Tube furnace set to 100
3/29/2012	12:20:45 PM	Helium valve closed
3/29/2012	12:20:45 PM	H2 valve closed
3/29/2012	12:20:45 PM	BCl3 valve closed
3/29/2012	12:20:45 PM	PH3 valve closed
3/29/2012	12:20:45 PM	SiCl4 pre valve closed
3/29/2012	12:20:45 PM	SiCl4 post valve closed
3/29/2012	12:20:45 PM	Bypass valve closed
3/29/2012	12:20:45 PM	Bubbler valve closed
3/29/2012	12:20:45 PM	Main Vac valve opened
3/29/2012	12:20:45 PM	Helium MFC set to  0.000000
3/29/2012	12:20:45 PM	H2 MFC set to  0.000000
3/29/2012	12:20:45 PM	BCl3 MFC set to  0.000000
3/29/2012	12:20:45 PM	PH3 MFC set to  0.000000
3/29/2012	12:20:45 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:20:45 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:20:45 PM	Tube furnace set to 100
3/29/2012	12:21:15 PM	H2 valve closed
3/29/2012	12:21:15 PM	BCl3 valve closed
3/29/2012	12:21:15 PM	PH3 valve closed
3/29/2012	12:21:15 PM	SiCl4 pre valve closed
3/29/2012	12:21:15 PM	SiCl4 post valve closed
3/29/2012	12:21:15 PM	Bypass valve closed
3/29/2012	12:21:15 PM	Bubbler valve closed
3/29/2012	12:21:15 PM	Helium valve opened
3/29/2012	12:21:15 PM	Main Vac valve opened
3/29/2012	12:21:15 PM	Helium MFC set to  20.000000
3/29/2012	12:21:15 PM	H2 MFC set to  0.000000
3/29/2012	12:21:15 PM	BCl3 MFC set to  0.000000
3/29/2012	12:21:15 PM	PH3 MFC set to  0.000000
3/29/2012	12:21:16 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:21:16 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:21:16 PM	Tube furnace set to 100
3/29/2012	12:21:46 PM	Helium valve closed
3/29/2012	12:21:46 PM	H2 valve closed
3/29/2012	12:21:46 PM	BCl3 valve closed
3/29/2012	12:21:46 PM	PH3 valve closed
3/29/2012	12:21:46 PM	SiCl4 pre valve closed
3/29/2012	12:21:46 PM	SiCl4 post valve closed
3/29/2012	12:21:46 PM	Bypass valve closed
3/29/2012	12:21:46 PM	Bubbler valve closed
3/29/2012	12:21:46 PM	Main Vac valve opened
3/29/2012	12:21:46 PM	Helium MFC set to  0.000000
3/29/2012	12:21:46 PM	H2 MFC set to  0.000000
3/29/2012	12:21:46 PM	BCl3 MFC set to  0.000000
3/29/2012	12:21:46 PM	PH3 MFC set to  0.000000
3/29/2012	12:21:46 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:21:46 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:21:46 PM	Tube furnace set to 100
3/29/2012	12:22:16 PM	H2 valve closed
3/29/2012	12:22:16 PM	BCl3 valve closed
3/29/2012	12:22:16 PM	PH3 valve closed
3/29/2012	12:22:16 PM	SiCl4 pre valve closed
3/29/2012	12:22:16 PM	SiCl4 post valve closed
3/29/2012	12:22:16 PM	Bypass valve closed
3/29/2012	12:22:16 PM	Bubbler valve closed
3/29/2012	12:22:16 PM	Helium valve opened
3/29/2012	12:22:16 PM	Main Vac valve opened
3/29/2012	12:22:16 PM	Helium MFC set to  20.000000
3/29/2012	12:22:16 PM	H2 MFC set to  0.000000
3/29/2012	12:22:16 PM	BCl3 MFC set to  0.000000
3/29/2012	12:22:16 PM	PH3 MFC set to  0.000000
3/29/2012	12:22:16 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:22:16 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:22:16 PM	Tube furnace set to 100
3/29/2012	12:22:46 PM	Helium valve closed
3/29/2012	12:22:46 PM	H2 valve closed
3/29/2012	12:22:46 PM	BCl3 valve closed
3/29/2012	12:22:46 PM	PH3 valve closed
3/29/2012	12:22:46 PM	SiCl4 pre valve closed
3/29/2012	12:22:46 PM	SiCl4 post valve closed
3/29/2012	12:22:46 PM	Bypass valve closed
3/29/2012	12:22:46 PM	Bubbler valve closed
3/29/2012	12:22:46 PM	Main Vac valve opened
3/29/2012	12:22:46 PM	Helium MFC set to  0.000000
3/29/2012	12:22:46 PM	H2 MFC set to  0.000000
3/29/2012	12:22:46 PM	BCl3 MFC set to  0.000000
3/29/2012	12:22:46 PM	PH3 MFC set to  0.000000
3/29/2012	12:22:46 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:22:46 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:22:46 PM	Tube furnace set to 100
3/29/2012	12:23:16 PM	H2 valve closed
3/29/2012	12:23:16 PM	BCl3 valve closed
3/29/2012	12:23:16 PM	PH3 valve closed
3/29/2012	12:23:16 PM	SiCl4 pre valve closed
3/29/2012	12:23:16 PM	SiCl4 post valve closed
3/29/2012	12:23:16 PM	Bypass valve closed
3/29/2012	12:23:16 PM	Bubbler valve closed
3/29/2012	12:23:16 PM	Helium valve opened
3/29/2012	12:23:16 PM	Main Vac valve opened
3/29/2012	12:23:16 PM	Helium MFC set to  20.000000
3/29/2012	12:23:16 PM	H2 MFC set to  0.000000
3/29/2012	12:23:16 PM	BCl3 MFC set to  0.000000
3/29/2012	12:23:16 PM	PH3 MFC set to  0.000000
3/29/2012	12:23:16 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:23:16 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:23:17 PM	Tube furnace set to 100
3/29/2012	12:23:47 PM	Helium valve closed
3/29/2012	12:23:47 PM	H2 valve closed
3/29/2012	12:23:47 PM	BCl3 valve closed
3/29/2012	12:23:47 PM	PH3 valve closed
3/29/2012	12:23:47 PM	SiCl4 pre valve closed
3/29/2012	12:23:47 PM	SiCl4 post valve closed
3/29/2012	12:23:47 PM	Bypass valve closed
3/29/2012	12:23:47 PM	Bubbler valve closed
3/29/2012	12:23:47 PM	Main Vac valve opened
3/29/2012	12:23:47 PM	Helium MFC set to  0.000000
3/29/2012	12:23:47 PM	H2 MFC set to  0.000000
3/29/2012	12:23:47 PM	BCl3 MFC set to  0.000000
3/29/2012	12:23:47 PM	PH3 MFC set to  0.000000
3/29/2012	12:23:47 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:23:47 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:23:47 PM	Tube furnace set to 100
3/29/2012	12:24:17 PM	H2 valve closed
3/29/2012	12:24:17 PM	BCl3 valve closed
3/29/2012	12:24:17 PM	PH3 valve closed
3/29/2012	12:24:17 PM	SiCl4 pre valve closed
3/29/2012	12:24:17 PM	SiCl4 post valve closed
3/29/2012	12:24:17 PM	Bypass valve closed
3/29/2012	12:24:17 PM	Bubbler valve closed
3/29/2012	12:24:17 PM	Helium valve opened
3/29/2012	12:24:17 PM	Main Vac valve opened
3/29/2012	12:24:17 PM	Helium MFC set to  20.000000
3/29/2012	12:24:17 PM	H2 MFC set to  0.000000
3/29/2012	12:24:17 PM	BCl3 MFC set to  0.000000
3/29/2012	12:24:17 PM	PH3 MFC set to  0.000000
3/29/2012	12:24:17 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:24:17 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:24:17 PM	Tube furnace set to 100
3/29/2012	12:24:47 PM	Helium valve closed
3/29/2012	12:24:47 PM	H2 valve closed
3/29/2012	12:24:47 PM	BCl3 valve closed
3/29/2012	12:24:47 PM	PH3 valve closed
3/29/2012	12:24:47 PM	SiCl4 pre valve closed
3/29/2012	12:24:47 PM	SiCl4 post valve closed
3/29/2012	12:24:47 PM	Bypass valve closed
3/29/2012	12:24:47 PM	Bubbler valve closed
3/29/2012	12:24:47 PM	Main Vac valve opened
3/29/2012	12:24:47 PM	Helium MFC set to  0.000000
3/29/2012	12:24:47 PM	H2 MFC set to  0.000000
3/29/2012	12:24:47 PM	BCl3 MFC set to  0.000000
3/29/2012	12:24:47 PM	PH3 MFC set to  0.000000
3/29/2012	12:24:47 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:24:47 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:24:47 PM	Tube furnace set to 100
3/29/2012	12:25:17 PM	H2 valve closed
3/29/2012	12:25:17 PM	BCl3 valve closed
3/29/2012	12:25:17 PM	PH3 valve closed
3/29/2012	12:25:17 PM	SiCl4 pre valve closed
3/29/2012	12:25:17 PM	SiCl4 post valve closed
3/29/2012	12:25:17 PM	Bypass valve closed
3/29/2012	12:25:17 PM	Bubbler valve closed
3/29/2012	12:25:17 PM	Helium valve opened
3/29/2012	12:25:17 PM	Main Vac valve opened
3/29/2012	12:25:17 PM	Helium MFC set to  20.000000
3/29/2012	12:25:17 PM	H2 MFC set to  0.000000
3/29/2012	12:25:17 PM	BCl3 MFC set to  0.000000
3/29/2012	12:25:17 PM	PH3 MFC set to  0.000000
3/29/2012	12:25:17 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:25:17 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:25:17 PM	Tube furnace set to 100
3/29/2012	12:25:47 PM	Helium valve closed
3/29/2012	12:25:47 PM	H2 valve closed
3/29/2012	12:25:48 PM	BCl3 valve closed
3/29/2012	12:25:48 PM	PH3 valve closed
3/29/2012	12:25:48 PM	SiCl4 pre valve closed
3/29/2012	12:25:48 PM	SiCl4 post valve closed
3/29/2012	12:25:48 PM	Bypass valve closed
3/29/2012	12:25:48 PM	Bubbler valve closed
3/29/2012	12:25:48 PM	Main Vac valve opened
3/29/2012	12:25:48 PM	Helium MFC set to  0.000000
3/29/2012	12:25:48 PM	H2 MFC set to  0.000000
3/29/2012	12:25:48 PM	BCl3 MFC set to  0.000000
3/29/2012	12:25:48 PM	PH3 MFC set to  0.000000
3/29/2012	12:25:48 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:25:48 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:25:48 PM	Tube furnace set to 100
3/29/2012	12:26:18 PM	H2 valve closed
3/29/2012	12:26:18 PM	BCl3 valve closed
3/29/2012	12:26:18 PM	PH3 valve closed
3/29/2012	12:26:18 PM	SiCl4 pre valve closed
3/29/2012	12:26:18 PM	SiCl4 post valve closed
3/29/2012	12:26:18 PM	Bypass valve closed
3/29/2012	12:26:18 PM	Bubbler valve closed
3/29/2012	12:26:18 PM	Helium valve opened
3/29/2012	12:26:18 PM	Main Vac valve opened
3/29/2012	12:26:18 PM	Helium MFC set to  20.000000
3/29/2012	12:26:18 PM	H2 MFC set to  0.000000
3/29/2012	12:26:18 PM	BCl3 MFC set to  0.000000
3/29/2012	12:26:18 PM	PH3 MFC set to  0.000000
3/29/2012	12:26:18 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:26:18 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:26:18 PM	Tube furnace set to 100
3/29/2012	12:26:48 PM	Helium valve closed
3/29/2012	12:26:48 PM	H2 valve closed
3/29/2012	12:26:48 PM	BCl3 valve closed
3/29/2012	12:26:48 PM	PH3 valve closed
3/29/2012	12:26:48 PM	SiCl4 pre valve closed
3/29/2012	12:26:48 PM	SiCl4 post valve closed
3/29/2012	12:26:48 PM	Bypass valve closed
3/29/2012	12:26:48 PM	Bubbler valve closed
3/29/2012	12:26:48 PM	Main Vac valve opened
3/29/2012	12:26:48 PM	Helium MFC set to  0.000000
3/29/2012	12:26:48 PM	H2 MFC set to  0.000000
3/29/2012	12:26:48 PM	BCl3 MFC set to  0.000000
3/29/2012	12:26:48 PM	PH3 MFC set to  0.000000
3/29/2012	12:26:48 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:26:48 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:26:48 PM	Tube furnace set to 100
3/29/2012	12:27:18 PM	H2 valve closed
3/29/2012	12:27:18 PM	BCl3 valve closed
3/29/2012	12:27:18 PM	PH3 valve closed
3/29/2012	12:27:18 PM	SiCl4 pre valve closed
3/29/2012	12:27:18 PM	SiCl4 post valve closed
3/29/2012	12:27:18 PM	Bypass valve closed
3/29/2012	12:27:18 PM	Bubbler valve closed
3/29/2012	12:27:18 PM	Helium valve opened
3/29/2012	12:27:18 PM	Main Vac valve opened
3/29/2012	12:27:18 PM	Helium MFC set to  20.000000
3/29/2012	12:27:18 PM	H2 MFC set to  0.000000
3/29/2012	12:27:18 PM	BCl3 MFC set to  0.000000
3/29/2012	12:27:18 PM	PH3 MFC set to  0.000000
3/29/2012	12:27:18 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:27:18 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:27:18 PM	Tube furnace set to 100
3/29/2012	12:27:48 PM	Helium valve closed
3/29/2012	12:27:48 PM	H2 valve closed
3/29/2012	12:27:48 PM	BCl3 valve closed
3/29/2012	12:27:48 PM	PH3 valve closed
3/29/2012	12:27:48 PM	SiCl4 pre valve closed
3/29/2012	12:27:48 PM	SiCl4 post valve closed
3/29/2012	12:27:48 PM	Bypass valve closed
3/29/2012	12:27:48 PM	Bubbler valve closed
3/29/2012	12:27:48 PM	Main Vac valve opened
3/29/2012	12:27:48 PM	Helium MFC set to  0.000000
3/29/2012	12:27:48 PM	H2 MFC set to  0.000000
3/29/2012	12:27:48 PM	BCl3 MFC set to  0.000000
3/29/2012	12:27:48 PM	PH3 MFC set to  0.000000
3/29/2012	12:27:48 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:27:48 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:27:49 PM	Tube furnace set to 100
3/29/2012	12:27:50 PM	Run finished at 12:27 PM
3/29/2012	12:29:00 PM	Main Vac valve closed
3/29/2012	12:29:15 PM	Main Vac valve opened
3/29/2012	12:30:28 PM	Recipe started at 12:30 PM
3/29/2012	12:30:28 PM	Helium valve closed
3/29/2012	12:30:28 PM	H2 valve closed
3/29/2012	12:30:28 PM	BCl3 valve closed
3/29/2012	12:30:28 PM	PH3 valve closed
3/29/2012	12:30:28 PM	SiCl4 pre valve closed
3/29/2012	12:30:28 PM	SiCl4 post valve closed
3/29/2012	12:30:28 PM	Main Vac valve closed
3/29/2012	12:30:28 PM	Bypass valve closed
3/29/2012	12:30:28 PM	Bubbler valve closed
3/29/2012	12:30:28 PM	Helium MFC set to  0.000000
3/29/2012	12:30:28 PM	H2 MFC set to  0.000000
3/29/2012	12:30:28 PM	BCl3 MFC set to  0.000000
3/29/2012	12:30:28 PM	PH3 MFC set to  0.000000
3/29/2012	12:30:28 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:30:28 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:30:28 PM	Tube furnace set to 0
3/29/2012	12:30:31 PM	Helium valve closed
3/29/2012	12:30:31 PM	BCl3 valve closed
3/29/2012	12:30:31 PM	PH3 valve closed
3/29/2012	12:30:31 PM	SiCl4 pre valve closed
3/29/2012	12:30:31 PM	SiCl4 post valve closed
3/29/2012	12:30:31 PM	Main Vac valve closed
3/29/2012	12:30:31 PM	Bypass valve closed
3/29/2012	12:30:31 PM	Bubbler valve closed
3/29/2012	12:30:31 PM	H2 valve opened
3/29/2012	12:30:31 PM	Helium MFC set to  0.000000
3/29/2012	12:30:31 PM	H2 MFC set to  500.000000
3/29/2012	12:30:31 PM	BCl3 MFC set to  0.000000
3/29/2012	12:30:31 PM	PH3 MFC set to  0.000000
3/29/2012	12:30:31 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:30:31 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:30:31 PM	Tube furnace set to 0
3/29/2012	12:31:35 PM	Helium valve closed
3/29/2012	12:31:35 PM	BCl3 valve closed
3/29/2012	12:31:35 PM	PH3 valve closed
3/29/2012	12:31:35 PM	SiCl4 pre valve closed
3/29/2012	12:31:35 PM	SiCl4 post valve closed
3/29/2012	12:31:35 PM	Main Vac valve closed
3/29/2012	12:31:35 PM	Bypass valve closed
3/29/2012	12:31:35 PM	H2 valve opened
3/29/2012	12:31:35 PM	Bubbler valve opened
3/29/2012	12:31:35 PM	Helium MFC set to  0.000000
3/29/2012	12:31:35 PM	H2 MFC set to  500.000000
3/29/2012	12:31:35 PM	BCl3 MFC set to  0.000000
3/29/2012	12:31:35 PM	PH3 MFC set to  0.000000
3/29/2012	12:31:35 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:31:35 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:31:35 PM	Tube furnace set to 0
3/29/2012	12:31:36 PM	Helium valve closed
3/29/2012	12:31:36 PM	BCl3 valve closed
3/29/2012	12:31:36 PM	PH3 valve closed
3/29/2012	12:31:36 PM	SiCl4 pre valve closed
3/29/2012	12:31:36 PM	SiCl4 post valve closed
3/29/2012	12:31:36 PM	Main Vac valve closed
3/29/2012	12:31:36 PM	Bypass valve closed
3/29/2012	12:31:36 PM	H2 valve opened
3/29/2012	12:31:36 PM	Bubbler valve opened
3/29/2012	12:31:36 PM	Helium MFC set to  0.000000
3/29/2012	12:31:36 PM	H2 MFC set to  450.000000
3/29/2012	12:31:36 PM	BCl3 MFC set to  0.000000
3/29/2012	12:31:36 PM	PH3 MFC set to  0.000000
3/29/2012	12:31:36 PM	SiCl4 MFC set to  0.000000
3/29/2012	12:31:36 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:31:36 PM	Tube furnace set to 1000
3/29/2012	12:56:36 PM	Helium valve closed
3/29/2012	12:56:36 PM	PH3 valve closed
3/29/2012	12:56:36 PM	Main Vac valve closed
3/29/2012	12:56:36 PM	Bypass valve closed
3/29/2012	12:56:36 PM	H2 valve opened
3/29/2012	12:56:36 PM	BCl3 valve opened
3/29/2012	12:56:36 PM	SiCl4 pre valve opened
3/29/2012	12:56:36 PM	SiCl4 post valve opened
3/29/2012	12:56:36 PM	Bubbler valve opened
3/29/2012	12:56:36 PM	Helium MFC set to  0.000000
3/29/2012	12:56:36 PM	H2 MFC set to  450.000000
3/29/2012	12:56:36 PM	BCl3 MFC set to  1.500000
3/29/2012	12:56:36 PM	PH3 MFC set to  0.000000
3/29/2012	12:56:36 PM	SiCl4 MFC set to  50.000000
3/29/2012	12:56:36 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	12:56:36 PM	Tube furnace set to 1000
3/29/2012	1:01:36 PM	Helium valve closed
3/29/2012	1:01:36 PM	BCl3 valve closed
3/29/2012	1:01:36 PM	PH3 valve closed
3/29/2012	1:01:36 PM	SiCl4 pre valve closed
3/29/2012	1:01:36 PM	SiCl4 post valve closed
3/29/2012	1:01:36 PM	Main Vac valve closed
3/29/2012	1:01:36 PM	Bypass valve closed
3/29/2012	1:01:36 PM	H2 valve opened
3/29/2012	1:01:36 PM	Bubbler valve opened
3/29/2012	1:01:36 PM	Helium MFC set to  0.000000
3/29/2012	1:01:36 PM	H2 MFC set to  500.000000
3/29/2012	1:01:36 PM	BCl3 MFC set to  0.000000
3/29/2012	1:01:36 PM	PH3 MFC set to  0.000000
3/29/2012	1:01:36 PM	SiCl4 MFC set to  0.000000
3/29/2012	1:01:36 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	1:01:37 PM	Tube furnace set to 750
3/29/2012	1:06:37 PM	H2 valve closed
3/29/2012	1:06:37 PM	BCl3 valve closed
3/29/2012	1:06:37 PM	PH3 valve closed
3/29/2012	1:06:37 PM	SiCl4 pre valve closed
3/29/2012	1:06:37 PM	SiCl4 post valve closed
3/29/2012	1:06:37 PM	Main Vac valve closed
3/29/2012	1:06:37 PM	Bypass valve closed
3/29/2012	1:06:37 PM	Helium valve opened
3/29/2012	1:06:37 PM	Bubbler valve opened
3/29/2012	1:06:37 PM	Helium MFC set to  500.000000
3/29/2012	1:06:37 PM	H2 MFC set to  0.000000
3/29/2012	1:06:37 PM	BCl3 MFC set to  0.000000
3/29/2012	1:06:37 PM	PH3 MFC set to  0.000000
3/29/2012	1:06:37 PM	SiCl4 MFC set to  0.000000
3/29/2012	1:06:37 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	1:06:37 PM	Tube furnace set to 0
3/29/2012	1:23:17 PM	Helium valve closed
3/29/2012	1:23:17 PM	H2 valve closed
3/29/2012	1:23:17 PM	BCl3 valve closed
3/29/2012	1:23:17 PM	PH3 valve closed
3/29/2012	1:23:17 PM	SiCl4 pre valve closed
3/29/2012	1:23:17 PM	SiCl4 post valve closed
3/29/2012	1:23:17 PM	Main Vac valve closed
3/29/2012	1:23:17 PM	Bypass valve closed
3/29/2012	1:23:17 PM	Bubbler valve closed
3/29/2012	1:23:17 PM	Helium MFC set to  0.000000
3/29/2012	1:23:17 PM	H2 MFC set to  0.000000
3/29/2012	1:23:17 PM	BCl3 MFC set to  0.000000
3/29/2012	1:23:17 PM	PH3 MFC set to  0.000000
3/29/2012	1:23:17 PM	SiCl4 MFC set to  0.000000
3/29/2012	1:23:17 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	1:23:18 PM	Tube furnace set to 0
3/29/2012	1:23:19 PM	Run finished at 1:23 PM
3/29/2012	1:23:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2012	1:23:24 PM	Recipe started at 1:23 PM
3/29/2012	1:23:24 PM	Helium valve closed
3/29/2012	1:23:24 PM	H2 valve closed
3/29/2012	1:23:24 PM	BCl3 valve closed
3/29/2012	1:23:24 PM	PH3 valve closed
3/29/2012	1:23:24 PM	SiCl4 pre valve closed
3/29/2012	1:23:24 PM	SiCl4 post valve closed
3/29/2012	1:23:24 PM	Main Vac valve closed
3/29/2012	1:23:24 PM	Bypass valve closed
3/29/2012	1:23:24 PM	Bubbler valve closed
3/29/2012	1:23:24 PM	Helium MFC set to  0.000000
3/29/2012	1:23:24 PM	H2 MFC set to  0.000000
3/29/2012	1:23:24 PM	BCl3 MFC set to  0.000000
3/29/2012	1:23:24 PM	PH3 MFC set to  0.000000
3/29/2012	1:23:24 PM	SiCl4 MFC set to  0.000000
3/29/2012	1:23:24 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	1:23:24 PM	Tube furnace set to 0
3/29/2012	1:23:27 PM	H2 valve closed
3/29/2012	1:23:27 PM	BCl3 valve closed
3/29/2012	1:23:27 PM	PH3 valve closed
3/29/2012	1:23:27 PM	SiCl4 pre valve closed
3/29/2012	1:23:27 PM	SiCl4 post valve closed
3/29/2012	1:23:27 PM	Main Vac valve closed
3/29/2012	1:23:27 PM	Bypass valve closed
3/29/2012	1:23:27 PM	Bubbler valve closed
3/29/2012	1:23:27 PM	Helium valve opened
3/29/2012	1:23:27 PM	Helium MFC set to  500.000000
3/29/2012	1:23:27 PM	H2 MFC set to  0.000000
3/29/2012	1:23:27 PM	BCl3 MFC set to  0.000000
3/29/2012	1:23:27 PM	PH3 MFC set to  0.000000
3/29/2012	1:23:27 PM	SiCl4 MFC set to  0.000000
3/29/2012	1:23:27 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	1:23:27 PM	Tube furnace set to 0
3/29/2012	1:23:27 PM	Helium valve closed
3/29/2012	1:23:27 PM	H2 valve closed
3/29/2012	1:23:27 PM	BCl3 valve closed
3/29/2012	1:23:27 PM	PH3 valve closed
3/29/2012	1:23:27 PM	SiCl4 pre valve closed
3/29/2012	1:23:27 PM	SiCl4 post valve closed
3/29/2012	1:23:27 PM	Main Vac valve closed
3/29/2012	1:23:27 PM	Bypass valve closed
3/29/2012	1:23:27 PM	Bubbler valve closed
3/29/2012	1:23:27 PM	Helium MFC set to  0.000000
3/29/2012	1:23:27 PM	H2 MFC set to  0.000000
3/29/2012	1:23:27 PM	BCl3 MFC set to  0.000000
3/29/2012	1:23:27 PM	PH3 MFC set to  0.000000
3/29/2012	1:23:27 PM	SiCl4 MFC set to  0.000000
3/29/2012	1:23:27 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	1:23:27 PM	Tube furnace set to 0
3/29/2012	1:23:29 PM	Run finished at 1:23 PM
3/29/2012	1:23:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2012	1:31:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2012	1:31:47 PM	Recipe started at 1:31 PM
3/29/2012	1:31:47 PM	Helium valve closed
3/29/2012	1:31:47 PM	H2 valve closed
3/29/2012	1:31:47 PM	BCl3 valve closed
3/29/2012	1:31:47 PM	PH3 valve closed
3/29/2012	1:31:47 PM	SiCl4 pre valve closed
3/29/2012	1:31:47 PM	SiCl4 post valve closed
3/29/2012	1:31:47 PM	Main Vac valve closed
3/29/2012	1:31:47 PM	Bubbler valve closed
3/29/2012	1:31:47 PM	Bypass valve opened
3/29/2012	1:31:47 PM	Helium MFC set to  0.000000
3/29/2012	1:31:47 PM	H2 MFC set to  0.000000
3/29/2012	1:31:47 PM	BCl3 MFC set to  0.000000
3/29/2012	1:31:47 PM	PH3 MFC set to  0.000000
3/29/2012	1:31:47 PM	SiCl4 MFC set to  0.000000
3/29/2012	1:31:47 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	1:31:47 PM	Tube furnace set to 0
3/29/2012	1:32:52 PM	Helium valve closed
3/29/2012	1:32:52 PM	H2 valve closed
3/29/2012	1:32:52 PM	BCl3 valve closed
3/29/2012	1:32:52 PM	PH3 valve closed
3/29/2012	1:32:52 PM	SiCl4 pre valve closed
3/29/2012	1:32:52 PM	SiCl4 post valve closed
3/29/2012	1:32:52 PM	Main Vac valve closed
3/29/2012	1:32:52 PM	Bubbler valve closed
3/29/2012	1:32:52 PM	Bypass valve opened
3/29/2012	1:32:52 PM	Helium MFC set to  0.000000
3/29/2012	1:32:52 PM	H2 MFC set to  0.000000
3/29/2012	1:32:52 PM	BCl3 MFC set to  0.000000
3/29/2012	1:32:52 PM	PH3 MFC set to  0.000000
3/29/2012	1:32:52 PM	SiCl4 MFC set to  0.000000
3/29/2012	1:32:52 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	1:32:52 PM	Tube furnace set to 0
3/29/2012	1:33:52 PM	Helium valve closed
3/29/2012	1:33:52 PM	H2 valve closed
3/29/2012	1:33:52 PM	BCl3 valve closed
3/29/2012	1:33:52 PM	PH3 valve closed
3/29/2012	1:33:52 PM	SiCl4 pre valve closed
3/29/2012	1:33:52 PM	SiCl4 post valve closed
3/29/2012	1:33:52 PM	Bypass valve closed
3/29/2012	1:33:52 PM	Bubbler valve closed
3/29/2012	1:33:52 PM	Main Vac valve opened
3/29/2012	1:33:52 PM	Helium MFC set to  0.000000
3/29/2012	1:33:52 PM	H2 MFC set to  0.000000
3/29/2012	1:33:52 PM	BCl3 MFC set to  0.000000
3/29/2012	1:33:52 PM	PH3 MFC set to  0.000000
3/29/2012	1:33:52 PM	SiCl4 MFC set to  0.000000
3/29/2012	1:33:52 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	1:33:52 PM	Tube furnace set to 0
3/29/2012	1:33:53 PM	Run finished at 1:33 PM
3/29/2012	1:33:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2012	2:08:30 PM	Recipe started at 2:08 PM
3/29/2012	2:08:30 PM	Helium valve closed
3/29/2012	2:08:30 PM	H2 valve closed
3/29/2012	2:08:30 PM	BCl3 valve closed
3/29/2012	2:08:30 PM	PH3 valve closed
3/29/2012	2:08:30 PM	SiCl4 pre valve closed
3/29/2012	2:08:30 PM	SiCl4 post valve closed
3/29/2012	2:08:30 PM	Bypass valve closed
3/29/2012	2:08:30 PM	Bubbler valve closed
3/29/2012	2:08:30 PM	Main Vac valve opened
3/29/2012	2:08:30 PM	Helium MFC set to  0.000000
3/29/2012	2:08:31 PM	H2 MFC set to  0.000000
3/29/2012	2:08:31 PM	BCl3 MFC set to  0.000000
3/29/2012	2:08:31 PM	PH3 MFC set to  0.000000
3/29/2012	2:08:31 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:08:31 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:08:31 PM	Tube furnace set to 200
3/29/2012	2:09:01 PM	H2 valve closed
3/29/2012	2:09:01 PM	BCl3 valve closed
3/29/2012	2:09:01 PM	PH3 valve closed
3/29/2012	2:09:01 PM	SiCl4 pre valve closed
3/29/2012	2:09:01 PM	SiCl4 post valve closed
3/29/2012	2:09:01 PM	Bypass valve closed
3/29/2012	2:09:01 PM	Bubbler valve closed
3/29/2012	2:09:01 PM	Helium valve opened
3/29/2012	2:09:01 PM	Main Vac valve opened
3/29/2012	2:09:01 PM	Helium MFC set to  20.000000
3/29/2012	2:09:01 PM	H2 MFC set to  0.000000
3/29/2012	2:09:01 PM	BCl3 MFC set to  0.000000
3/29/2012	2:09:01 PM	PH3 MFC set to  0.000000
3/29/2012	2:09:01 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:09:01 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:09:01 PM	Tube furnace set to 200
3/29/2012	2:09:31 PM	Helium valve closed
3/29/2012	2:09:31 PM	H2 valve closed
3/29/2012	2:09:31 PM	BCl3 valve closed
3/29/2012	2:09:31 PM	PH3 valve closed
3/29/2012	2:09:31 PM	SiCl4 pre valve closed
3/29/2012	2:09:31 PM	SiCl4 post valve closed
3/29/2012	2:09:31 PM	Bypass valve closed
3/29/2012	2:09:31 PM	Bubbler valve closed
3/29/2012	2:09:31 PM	Main Vac valve opened
3/29/2012	2:09:31 PM	Helium MFC set to  0.000000
3/29/2012	2:09:31 PM	H2 MFC set to  0.000000
3/29/2012	2:09:31 PM	BCl3 MFC set to  0.000000
3/29/2012	2:09:31 PM	PH3 MFC set to  0.000000
3/29/2012	2:09:31 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:09:31 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:09:31 PM	Tube furnace set to 200
3/29/2012	2:10:01 PM	H2 valve closed
3/29/2012	2:10:01 PM	BCl3 valve closed
3/29/2012	2:10:01 PM	PH3 valve closed
3/29/2012	2:10:01 PM	SiCl4 pre valve closed
3/29/2012	2:10:01 PM	SiCl4 post valve closed
3/29/2012	2:10:01 PM	Bypass valve closed
3/29/2012	2:10:01 PM	Bubbler valve closed
3/29/2012	2:10:01 PM	Helium valve opened
3/29/2012	2:10:01 PM	Main Vac valve opened
3/29/2012	2:10:01 PM	Helium MFC set to  20.000000
3/29/2012	2:10:01 PM	H2 MFC set to  0.000000
3/29/2012	2:10:01 PM	BCl3 MFC set to  0.000000
3/29/2012	2:10:01 PM	PH3 MFC set to  0.000000
3/29/2012	2:10:01 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:10:01 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:10:01 PM	Tube furnace set to 200
3/29/2012	2:10:31 PM	Helium valve closed
3/29/2012	2:10:31 PM	H2 valve closed
3/29/2012	2:10:31 PM	BCl3 valve closed
3/29/2012	2:10:31 PM	PH3 valve closed
3/29/2012	2:10:31 PM	SiCl4 pre valve closed
3/29/2012	2:10:31 PM	SiCl4 post valve closed
3/29/2012	2:10:31 PM	Bypass valve closed
3/29/2012	2:10:31 PM	Bubbler valve closed
3/29/2012	2:10:31 PM	Main Vac valve opened
3/29/2012	2:10:31 PM	Helium MFC set to  0.000000
3/29/2012	2:10:31 PM	H2 MFC set to  0.000000
3/29/2012	2:10:31 PM	BCl3 MFC set to  0.000000
3/29/2012	2:10:31 PM	PH3 MFC set to  0.000000
3/29/2012	2:10:31 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:10:31 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:10:32 PM	Tube furnace set to 200
3/29/2012	2:11:02 PM	H2 valve closed
3/29/2012	2:11:02 PM	BCl3 valve closed
3/29/2012	2:11:02 PM	PH3 valve closed
3/29/2012	2:11:02 PM	SiCl4 pre valve closed
3/29/2012	2:11:02 PM	SiCl4 post valve closed
3/29/2012	2:11:02 PM	Bypass valve closed
3/29/2012	2:11:02 PM	Bubbler valve closed
3/29/2012	2:11:02 PM	Helium valve opened
3/29/2012	2:11:02 PM	Main Vac valve opened
3/29/2012	2:11:02 PM	Helium MFC set to  20.000000
3/29/2012	2:11:02 PM	H2 MFC set to  0.000000
3/29/2012	2:11:02 PM	BCl3 MFC set to  0.000000
3/29/2012	2:11:02 PM	PH3 MFC set to  0.000000
3/29/2012	2:11:02 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:11:02 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:11:02 PM	Tube furnace set to 200
3/29/2012	2:11:32 PM	Helium valve closed
3/29/2012	2:11:32 PM	H2 valve closed
3/29/2012	2:11:32 PM	BCl3 valve closed
3/29/2012	2:11:32 PM	PH3 valve closed
3/29/2012	2:11:32 PM	SiCl4 pre valve closed
3/29/2012	2:11:32 PM	SiCl4 post valve closed
3/29/2012	2:11:32 PM	Bypass valve closed
3/29/2012	2:11:32 PM	Bubbler valve closed
3/29/2012	2:11:32 PM	Main Vac valve opened
3/29/2012	2:11:32 PM	Helium MFC set to  0.000000
3/29/2012	2:11:32 PM	H2 MFC set to  0.000000
3/29/2012	2:11:32 PM	BCl3 MFC set to  0.000000
3/29/2012	2:11:32 PM	PH3 MFC set to  0.000000
3/29/2012	2:11:32 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:11:32 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:11:32 PM	Tube furnace set to 200
3/29/2012	2:12:02 PM	H2 valve closed
3/29/2012	2:12:02 PM	BCl3 valve closed
3/29/2012	2:12:02 PM	PH3 valve closed
3/29/2012	2:12:02 PM	SiCl4 pre valve closed
3/29/2012	2:12:02 PM	SiCl4 post valve closed
3/29/2012	2:12:02 PM	Bypass valve closed
3/29/2012	2:12:02 PM	Bubbler valve closed
3/29/2012	2:12:02 PM	Helium valve opened
3/29/2012	2:12:02 PM	Main Vac valve opened
3/29/2012	2:12:02 PM	Helium MFC set to  20.000000
3/29/2012	2:12:02 PM	H2 MFC set to  0.000000
3/29/2012	2:12:02 PM	BCl3 MFC set to  0.000000
3/29/2012	2:12:02 PM	PH3 MFC set to  0.000000
3/29/2012	2:12:02 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:12:02 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:12:02 PM	Tube furnace set to 200
3/29/2012	2:12:32 PM	Helium valve closed
3/29/2012	2:12:32 PM	H2 valve closed
3/29/2012	2:12:32 PM	BCl3 valve closed
3/29/2012	2:12:32 PM	PH3 valve closed
3/29/2012	2:12:32 PM	SiCl4 pre valve closed
3/29/2012	2:12:32 PM	SiCl4 post valve closed
3/29/2012	2:12:32 PM	Bypass valve closed
3/29/2012	2:12:32 PM	Bubbler valve closed
3/29/2012	2:12:32 PM	Main Vac valve opened
3/29/2012	2:12:32 PM	Helium MFC set to  0.000000
3/29/2012	2:12:32 PM	H2 MFC set to  0.000000
3/29/2012	2:12:32 PM	BCl3 MFC set to  0.000000
3/29/2012	2:12:32 PM	PH3 MFC set to  0.000000
3/29/2012	2:12:32 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:12:32 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:12:33 PM	Tube furnace set to 200
3/29/2012	2:13:03 PM	H2 valve closed
3/29/2012	2:13:03 PM	BCl3 valve closed
3/29/2012	2:13:03 PM	PH3 valve closed
3/29/2012	2:13:03 PM	SiCl4 pre valve closed
3/29/2012	2:13:03 PM	SiCl4 post valve closed
3/29/2012	2:13:03 PM	Bypass valve closed
3/29/2012	2:13:03 PM	Bubbler valve closed
3/29/2012	2:13:03 PM	Helium valve opened
3/29/2012	2:13:03 PM	Main Vac valve opened
3/29/2012	2:13:03 PM	Helium MFC set to  20.000000
3/29/2012	2:13:03 PM	H2 MFC set to  0.000000
3/29/2012	2:13:03 PM	BCl3 MFC set to  0.000000
3/29/2012	2:13:03 PM	PH3 MFC set to  0.000000
3/29/2012	2:13:03 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:13:03 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:13:03 PM	Tube furnace set to 200
3/29/2012	2:13:33 PM	Helium valve closed
3/29/2012	2:13:33 PM	H2 valve closed
3/29/2012	2:13:33 PM	BCl3 valve closed
3/29/2012	2:13:33 PM	PH3 valve closed
3/29/2012	2:13:33 PM	SiCl4 pre valve closed
3/29/2012	2:13:33 PM	SiCl4 post valve closed
3/29/2012	2:13:33 PM	Bypass valve closed
3/29/2012	2:13:33 PM	Bubbler valve closed
3/29/2012	2:13:33 PM	Main Vac valve opened
3/29/2012	2:13:33 PM	Helium MFC set to  0.000000
3/29/2012	2:13:33 PM	H2 MFC set to  0.000000
3/29/2012	2:13:33 PM	BCl3 MFC set to  0.000000
3/29/2012	2:13:33 PM	PH3 MFC set to  0.000000
3/29/2012	2:13:33 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:13:33 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:13:33 PM	Tube furnace set to 200
3/29/2012	2:14:03 PM	H2 valve closed
3/29/2012	2:14:03 PM	BCl3 valve closed
3/29/2012	2:14:03 PM	PH3 valve closed
3/29/2012	2:14:03 PM	SiCl4 pre valve closed
3/29/2012	2:14:03 PM	SiCl4 post valve closed
3/29/2012	2:14:03 PM	Bypass valve closed
3/29/2012	2:14:03 PM	Bubbler valve closed
3/29/2012	2:14:03 PM	Helium valve opened
3/29/2012	2:14:03 PM	Main Vac valve opened
3/29/2012	2:14:03 PM	Helium MFC set to  20.000000
3/29/2012	2:14:03 PM	H2 MFC set to  0.000000
3/29/2012	2:14:03 PM	BCl3 MFC set to  0.000000
3/29/2012	2:14:03 PM	PH3 MFC set to  0.000000
3/29/2012	2:14:03 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:14:03 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:14:03 PM	Tube furnace set to 200
3/29/2012	2:14:33 PM	Helium valve closed
3/29/2012	2:14:33 PM	H2 valve closed
3/29/2012	2:14:33 PM	BCl3 valve closed
3/29/2012	2:14:33 PM	PH3 valve closed
3/29/2012	2:14:33 PM	SiCl4 pre valve closed
3/29/2012	2:14:33 PM	SiCl4 post valve closed
3/29/2012	2:14:33 PM	Bypass valve closed
3/29/2012	2:14:33 PM	Bubbler valve closed
3/29/2012	2:14:33 PM	Main Vac valve opened
3/29/2012	2:14:33 PM	Helium MFC set to  0.000000
3/29/2012	2:14:33 PM	H2 MFC set to  0.000000
3/29/2012	2:14:33 PM	BCl3 MFC set to  0.000000
3/29/2012	2:14:33 PM	PH3 MFC set to  0.000000
3/29/2012	2:14:33 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:14:33 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:14:34 PM	Tube furnace set to 200
3/29/2012	2:15:04 PM	H2 valve closed
3/29/2012	2:15:04 PM	BCl3 valve closed
3/29/2012	2:15:04 PM	PH3 valve closed
3/29/2012	2:15:04 PM	SiCl4 pre valve closed
3/29/2012	2:15:04 PM	SiCl4 post valve closed
3/29/2012	2:15:04 PM	Bypass valve closed
3/29/2012	2:15:04 PM	Bubbler valve closed
3/29/2012	2:15:04 PM	Helium valve opened
3/29/2012	2:15:04 PM	Main Vac valve opened
3/29/2012	2:15:04 PM	Helium MFC set to  20.000000
3/29/2012	2:15:04 PM	H2 MFC set to  0.000000
3/29/2012	2:15:04 PM	BCl3 MFC set to  0.000000
3/29/2012	2:15:04 PM	PH3 MFC set to  0.000000
3/29/2012	2:15:04 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:15:04 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:15:04 PM	Tube furnace set to 200
3/29/2012	2:15:34 PM	Helium valve closed
3/29/2012	2:15:34 PM	H2 valve closed
3/29/2012	2:15:34 PM	BCl3 valve closed
3/29/2012	2:15:34 PM	PH3 valve closed
3/29/2012	2:15:34 PM	SiCl4 pre valve closed
3/29/2012	2:15:34 PM	SiCl4 post valve closed
3/29/2012	2:15:34 PM	Bypass valve closed
3/29/2012	2:15:34 PM	Bubbler valve closed
3/29/2012	2:15:34 PM	Main Vac valve opened
3/29/2012	2:15:34 PM	Helium MFC set to  0.000000
3/29/2012	2:15:34 PM	H2 MFC set to  0.000000
3/29/2012	2:15:34 PM	BCl3 MFC set to  0.000000
3/29/2012	2:15:34 PM	PH3 MFC set to  0.000000
3/29/2012	2:15:34 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:15:34 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:15:34 PM	Tube furnace set to 200
3/29/2012	2:16:04 PM	H2 valve closed
3/29/2012	2:16:04 PM	BCl3 valve closed
3/29/2012	2:16:04 PM	PH3 valve closed
3/29/2012	2:16:04 PM	SiCl4 pre valve closed
3/29/2012	2:16:04 PM	SiCl4 post valve closed
3/29/2012	2:16:04 PM	Bypass valve closed
3/29/2012	2:16:04 PM	Bubbler valve closed
3/29/2012	2:16:04 PM	Helium valve opened
3/29/2012	2:16:04 PM	Main Vac valve opened
3/29/2012	2:16:04 PM	Helium MFC set to  20.000000
3/29/2012	2:16:04 PM	H2 MFC set to  0.000000
3/29/2012	2:16:04 PM	BCl3 MFC set to  0.000000
3/29/2012	2:16:04 PM	PH3 MFC set to  0.000000
3/29/2012	2:16:04 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:16:04 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:16:04 PM	Tube furnace set to 200
3/29/2012	2:16:34 PM	Helium valve closed
3/29/2012	2:16:34 PM	H2 valve closed
3/29/2012	2:16:34 PM	BCl3 valve closed
3/29/2012	2:16:34 PM	PH3 valve closed
3/29/2012	2:16:34 PM	SiCl4 pre valve closed
3/29/2012	2:16:34 PM	SiCl4 post valve closed
3/29/2012	2:16:34 PM	Bypass valve closed
3/29/2012	2:16:34 PM	Bubbler valve closed
3/29/2012	2:16:34 PM	Main Vac valve opened
3/29/2012	2:16:34 PM	Helium MFC set to  0.000000
3/29/2012	2:16:34 PM	H2 MFC set to  0.000000
3/29/2012	2:16:34 PM	BCl3 MFC set to  0.000000
3/29/2012	2:16:34 PM	PH3 MFC set to  0.000000
3/29/2012	2:16:34 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:16:34 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:16:34 PM	Tube furnace set to 200
3/29/2012	2:17:04 PM	H2 valve closed
3/29/2012	2:17:04 PM	BCl3 valve closed
3/29/2012	2:17:04 PM	PH3 valve closed
3/29/2012	2:17:04 PM	SiCl4 pre valve closed
3/29/2012	2:17:04 PM	SiCl4 post valve closed
3/29/2012	2:17:04 PM	Bypass valve closed
3/29/2012	2:17:04 PM	Bubbler valve closed
3/29/2012	2:17:04 PM	Helium valve opened
3/29/2012	2:17:05 PM	Main Vac valve opened
3/29/2012	2:17:05 PM	Helium MFC set to  20.000000
3/29/2012	2:17:05 PM	H2 MFC set to  0.000000
3/29/2012	2:17:05 PM	BCl3 MFC set to  0.000000
3/29/2012	2:17:05 PM	PH3 MFC set to  0.000000
3/29/2012	2:17:05 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:17:05 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:17:05 PM	Tube furnace set to 200
3/29/2012	2:17:35 PM	Helium valve closed
3/29/2012	2:17:35 PM	H2 valve closed
3/29/2012	2:17:35 PM	BCl3 valve closed
3/29/2012	2:17:35 PM	PH3 valve closed
3/29/2012	2:17:35 PM	SiCl4 pre valve closed
3/29/2012	2:17:35 PM	SiCl4 post valve closed
3/29/2012	2:17:35 PM	Bypass valve closed
3/29/2012	2:17:35 PM	Bubbler valve closed
3/29/2012	2:17:35 PM	Main Vac valve opened
3/29/2012	2:17:35 PM	Helium MFC set to  0.000000
3/29/2012	2:17:35 PM	H2 MFC set to  0.000000
3/29/2012	2:17:35 PM	BCl3 MFC set to  0.000000
3/29/2012	2:17:35 PM	PH3 MFC set to  0.000000
3/29/2012	2:17:35 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:17:35 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:17:35 PM	Tube furnace set to 200
3/29/2012	2:18:05 PM	H2 valve closed
3/29/2012	2:18:05 PM	BCl3 valve closed
3/29/2012	2:18:05 PM	PH3 valve closed
3/29/2012	2:18:05 PM	SiCl4 pre valve closed
3/29/2012	2:18:05 PM	SiCl4 post valve closed
3/29/2012	2:18:05 PM	Bypass valve closed
3/29/2012	2:18:05 PM	Bubbler valve closed
3/29/2012	2:18:05 PM	Helium valve opened
3/29/2012	2:18:05 PM	Main Vac valve opened
3/29/2012	2:18:05 PM	Helium MFC set to  20.000000
3/29/2012	2:18:05 PM	H2 MFC set to  0.000000
3/29/2012	2:18:05 PM	BCl3 MFC set to  0.000000
3/29/2012	2:18:05 PM	PH3 MFC set to  0.000000
3/29/2012	2:18:05 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:18:05 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:18:05 PM	Tube furnace set to 200
3/29/2012	2:18:35 PM	Helium valve closed
3/29/2012	2:18:35 PM	H2 valve closed
3/29/2012	2:18:35 PM	BCl3 valve closed
3/29/2012	2:18:35 PM	PH3 valve closed
3/29/2012	2:18:35 PM	SiCl4 pre valve closed
3/29/2012	2:18:35 PM	SiCl4 post valve closed
3/29/2012	2:18:35 PM	Bypass valve closed
3/29/2012	2:18:35 PM	Bubbler valve closed
3/29/2012	2:18:35 PM	Main Vac valve opened
3/29/2012	2:18:35 PM	Helium MFC set to  0.000000
3/29/2012	2:18:35 PM	H2 MFC set to  0.000000
3/29/2012	2:18:35 PM	BCl3 MFC set to  0.000000
3/29/2012	2:18:35 PM	PH3 MFC set to  0.000000
3/29/2012	2:18:35 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:18:35 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:18:35 PM	Tube furnace set to 200
3/29/2012	2:18:36 PM	Run finished at 2:18 PM
3/29/2012	2:23:07 PM	Main Vac valve closed
3/29/2012	2:23:13 PM	Main Vac valve opened
3/29/2012	2:23:21 PM	Recipe started at 2:23 PM
3/29/2012	2:23:21 PM	Helium valve closed
3/29/2012	2:23:21 PM	H2 valve closed
3/29/2012	2:23:21 PM	BCl3 valve closed
3/29/2012	2:23:21 PM	PH3 valve closed
3/29/2012	2:23:21 PM	SiCl4 pre valve closed
3/29/2012	2:23:21 PM	SiCl4 post valve closed
3/29/2012	2:23:21 PM	Bypass valve closed
3/29/2012	2:23:21 PM	Bubbler valve closed
3/29/2012	2:23:21 PM	Main Vac valve opened
3/29/2012	2:23:21 PM	Helium MFC set to  0.000000
3/29/2012	2:23:21 PM	H2 MFC set to  0.000000
3/29/2012	2:23:21 PM	BCl3 MFC set to  0.000000
3/29/2012	2:23:21 PM	PH3 MFC set to  0.000000
3/29/2012	2:23:21 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:23:21 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:23:21 PM	Tube furnace set to 200
3/29/2012	2:23:51 PM	H2 valve closed
3/29/2012	2:23:51 PM	BCl3 valve closed
3/29/2012	2:23:51 PM	PH3 valve closed
3/29/2012	2:23:51 PM	SiCl4 pre valve closed
3/29/2012	2:23:51 PM	SiCl4 post valve closed
3/29/2012	2:23:51 PM	Bypass valve closed
3/29/2012	2:23:51 PM	Bubbler valve closed
3/29/2012	2:23:51 PM	Helium valve opened
3/29/2012	2:23:51 PM	Main Vac valve opened
3/29/2012	2:23:51 PM	Helium MFC set to  20.000000
3/29/2012	2:23:51 PM	H2 MFC set to  0.000000
3/29/2012	2:23:51 PM	BCl3 MFC set to  0.000000
3/29/2012	2:23:51 PM	PH3 MFC set to  0.000000
3/29/2012	2:23:51 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:23:51 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:23:51 PM	Tube furnace set to 200
3/29/2012	2:24:21 PM	Helium valve closed
3/29/2012	2:24:21 PM	H2 valve closed
3/29/2012	2:24:21 PM	BCl3 valve closed
3/29/2012	2:24:21 PM	PH3 valve closed
3/29/2012	2:24:21 PM	SiCl4 pre valve closed
3/29/2012	2:24:21 PM	SiCl4 post valve closed
3/29/2012	2:24:21 PM	Bypass valve closed
3/29/2012	2:24:21 PM	Bubbler valve closed
3/29/2012	2:24:21 PM	Main Vac valve opened
3/29/2012	2:24:21 PM	Helium MFC set to  0.000000
3/29/2012	2:24:21 PM	H2 MFC set to  0.000000
3/29/2012	2:24:21 PM	BCl3 MFC set to  0.000000
3/29/2012	2:24:21 PM	PH3 MFC set to  0.000000
3/29/2012	2:24:21 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:24:21 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:24:21 PM	Tube furnace set to 200
3/29/2012	2:24:51 PM	H2 valve closed
3/29/2012	2:24:51 PM	BCl3 valve closed
3/29/2012	2:24:51 PM	PH3 valve closed
3/29/2012	2:24:51 PM	SiCl4 pre valve closed
3/29/2012	2:24:51 PM	SiCl4 post valve closed
3/29/2012	2:24:51 PM	Bypass valve closed
3/29/2012	2:24:51 PM	Bubbler valve closed
3/29/2012	2:24:51 PM	Helium valve opened
3/29/2012	2:24:51 PM	Main Vac valve opened
3/29/2012	2:24:51 PM	Helium MFC set to  20.000000
3/29/2012	2:24:51 PM	H2 MFC set to  0.000000
3/29/2012	2:24:51 PM	BCl3 MFC set to  0.000000
3/29/2012	2:24:51 PM	PH3 MFC set to  0.000000
3/29/2012	2:24:51 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:24:51 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:24:52 PM	Tube furnace set to 200
3/29/2012	2:25:22 PM	Helium valve closed
3/29/2012	2:25:22 PM	H2 valve closed
3/29/2012	2:25:22 PM	BCl3 valve closed
3/29/2012	2:25:22 PM	PH3 valve closed
3/29/2012	2:25:22 PM	SiCl4 pre valve closed
3/29/2012	2:25:22 PM	SiCl4 post valve closed
3/29/2012	2:25:22 PM	Bypass valve closed
3/29/2012	2:25:22 PM	Bubbler valve closed
3/29/2012	2:25:22 PM	Main Vac valve opened
3/29/2012	2:25:22 PM	Helium MFC set to  0.000000
3/29/2012	2:25:22 PM	H2 MFC set to  0.000000
3/29/2012	2:25:22 PM	BCl3 MFC set to  0.000000
3/29/2012	2:25:22 PM	PH3 MFC set to  0.000000
3/29/2012	2:25:22 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:25:22 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:25:22 PM	Tube furnace set to 200
3/29/2012	2:25:52 PM	H2 valve closed
3/29/2012	2:25:52 PM	BCl3 valve closed
3/29/2012	2:25:52 PM	PH3 valve closed
3/29/2012	2:25:52 PM	SiCl4 pre valve closed
3/29/2012	2:25:52 PM	SiCl4 post valve closed
3/29/2012	2:25:52 PM	Bypass valve closed
3/29/2012	2:25:52 PM	Bubbler valve closed
3/29/2012	2:25:52 PM	Helium valve opened
3/29/2012	2:25:52 PM	Main Vac valve opened
3/29/2012	2:25:52 PM	Helium MFC set to  20.000000
3/29/2012	2:25:52 PM	H2 MFC set to  0.000000
3/29/2012	2:25:52 PM	BCl3 MFC set to  0.000000
3/29/2012	2:25:52 PM	PH3 MFC set to  0.000000
3/29/2012	2:25:52 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:25:52 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:25:52 PM	Tube furnace set to 200
3/29/2012	2:26:22 PM	Helium valve closed
3/29/2012	2:26:22 PM	H2 valve closed
3/29/2012	2:26:22 PM	BCl3 valve closed
3/29/2012	2:26:22 PM	PH3 valve closed
3/29/2012	2:26:22 PM	SiCl4 pre valve closed
3/29/2012	2:26:22 PM	SiCl4 post valve closed
3/29/2012	2:26:22 PM	Bypass valve closed
3/29/2012	2:26:22 PM	Bubbler valve closed
3/29/2012	2:26:22 PM	Main Vac valve opened
3/29/2012	2:26:22 PM	Helium MFC set to  0.000000
3/29/2012	2:26:22 PM	H2 MFC set to  0.000000
3/29/2012	2:26:22 PM	BCl3 MFC set to  0.000000
3/29/2012	2:26:22 PM	PH3 MFC set to  0.000000
3/29/2012	2:26:22 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:26:22 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:26:22 PM	Tube furnace set to 200
3/29/2012	2:26:52 PM	H2 valve closed
3/29/2012	2:26:52 PM	BCl3 valve closed
3/29/2012	2:26:52 PM	PH3 valve closed
3/29/2012	2:26:52 PM	SiCl4 pre valve closed
3/29/2012	2:26:52 PM	SiCl4 post valve closed
3/29/2012	2:26:52 PM	Bypass valve closed
3/29/2012	2:26:52 PM	Bubbler valve closed
3/29/2012	2:26:52 PM	Helium valve opened
3/29/2012	2:26:52 PM	Main Vac valve opened
3/29/2012	2:26:52 PM	Helium MFC set to  20.000000
3/29/2012	2:26:52 PM	H2 MFC set to  0.000000
3/29/2012	2:26:52 PM	BCl3 MFC set to  0.000000
3/29/2012	2:26:52 PM	PH3 MFC set to  0.000000
3/29/2012	2:26:52 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:26:52 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:26:52 PM	Tube furnace set to 200
3/29/2012	2:27:23 PM	Helium valve closed
3/29/2012	2:27:23 PM	H2 valve closed
3/29/2012	2:27:23 PM	BCl3 valve closed
3/29/2012	2:27:23 PM	PH3 valve closed
3/29/2012	2:27:23 PM	SiCl4 pre valve closed
3/29/2012	2:27:23 PM	SiCl4 post valve closed
3/29/2012	2:27:23 PM	Bypass valve closed
3/29/2012	2:27:23 PM	Bubbler valve closed
3/29/2012	2:27:23 PM	Main Vac valve opened
3/29/2012	2:27:23 PM	Helium MFC set to  0.000000
3/29/2012	2:27:23 PM	H2 MFC set to  0.000000
3/29/2012	2:27:23 PM	BCl3 MFC set to  0.000000
3/29/2012	2:27:23 PM	PH3 MFC set to  0.000000
3/29/2012	2:27:23 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:27:23 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:27:23 PM	Tube furnace set to 200
3/29/2012	2:27:53 PM	H2 valve closed
3/29/2012	2:27:53 PM	BCl3 valve closed
3/29/2012	2:27:53 PM	PH3 valve closed
3/29/2012	2:27:53 PM	SiCl4 pre valve closed
3/29/2012	2:27:53 PM	SiCl4 post valve closed
3/29/2012	2:27:53 PM	Bypass valve closed
3/29/2012	2:27:53 PM	Bubbler valve closed
3/29/2012	2:27:53 PM	Helium valve opened
3/29/2012	2:27:53 PM	Main Vac valve opened
3/29/2012	2:27:53 PM	Helium MFC set to  20.000000
3/29/2012	2:27:53 PM	H2 MFC set to  0.000000
3/29/2012	2:27:53 PM	BCl3 MFC set to  0.000000
3/29/2012	2:27:53 PM	PH3 MFC set to  0.000000
3/29/2012	2:27:53 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:27:53 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:27:53 PM	Tube furnace set to 200
3/29/2012	2:28:23 PM	Helium valve closed
3/29/2012	2:28:23 PM	H2 valve closed
3/29/2012	2:28:23 PM	BCl3 valve closed
3/29/2012	2:28:23 PM	PH3 valve closed
3/29/2012	2:28:23 PM	SiCl4 pre valve closed
3/29/2012	2:28:23 PM	SiCl4 post valve closed
3/29/2012	2:28:23 PM	Bypass valve closed
3/29/2012	2:28:23 PM	Bubbler valve closed
3/29/2012	2:28:23 PM	Main Vac valve opened
3/29/2012	2:28:23 PM	Helium MFC set to  0.000000
3/29/2012	2:28:23 PM	H2 MFC set to  0.000000
3/29/2012	2:28:23 PM	BCl3 MFC set to  0.000000
3/29/2012	2:28:23 PM	PH3 MFC set to  0.000000
3/29/2012	2:28:23 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:28:23 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:28:23 PM	Tube furnace set to 200
3/29/2012	2:28:53 PM	H2 valve closed
3/29/2012	2:28:53 PM	BCl3 valve closed
3/29/2012	2:28:53 PM	PH3 valve closed
3/29/2012	2:28:53 PM	SiCl4 pre valve closed
3/29/2012	2:28:53 PM	SiCl4 post valve closed
3/29/2012	2:28:53 PM	Bypass valve closed
3/29/2012	2:28:53 PM	Bubbler valve closed
3/29/2012	2:28:53 PM	Helium valve opened
3/29/2012	2:28:53 PM	Main Vac valve opened
3/29/2012	2:28:53 PM	Helium MFC set to  20.000000
3/29/2012	2:28:53 PM	H2 MFC set to  0.000000
3/29/2012	2:28:53 PM	BCl3 MFC set to  0.000000
3/29/2012	2:28:53 PM	PH3 MFC set to  0.000000
3/29/2012	2:28:53 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:28:53 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:28:53 PM	Tube furnace set to 200
3/29/2012	2:29:23 PM	Helium valve closed
3/29/2012	2:29:23 PM	H2 valve closed
3/29/2012	2:29:23 PM	BCl3 valve closed
3/29/2012	2:29:23 PM	PH3 valve closed
3/29/2012	2:29:23 PM	SiCl4 pre valve closed
3/29/2012	2:29:23 PM	SiCl4 post valve closed
3/29/2012	2:29:23 PM	Bypass valve closed
3/29/2012	2:29:23 PM	Bubbler valve closed
3/29/2012	2:29:23 PM	Main Vac valve opened
3/29/2012	2:29:23 PM	Helium MFC set to  0.000000
3/29/2012	2:29:23 PM	H2 MFC set to  0.000000
3/29/2012	2:29:24 PM	BCl3 MFC set to  0.000000
3/29/2012	2:29:24 PM	PH3 MFC set to  0.000000
3/29/2012	2:29:24 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:29:24 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:29:24 PM	Tube furnace set to 200
3/29/2012	2:29:54 PM	H2 valve closed
3/29/2012	2:29:54 PM	BCl3 valve closed
3/29/2012	2:29:54 PM	PH3 valve closed
3/29/2012	2:29:54 PM	SiCl4 pre valve closed
3/29/2012	2:29:54 PM	SiCl4 post valve closed
3/29/2012	2:29:54 PM	Bypass valve closed
3/29/2012	2:29:54 PM	Bubbler valve closed
3/29/2012	2:29:54 PM	Helium valve opened
3/29/2012	2:29:54 PM	Main Vac valve opened
3/29/2012	2:29:54 PM	Helium MFC set to  20.000000
3/29/2012	2:29:54 PM	H2 MFC set to  0.000000
3/29/2012	2:29:54 PM	BCl3 MFC set to  0.000000
3/29/2012	2:29:54 PM	PH3 MFC set to  0.000000
3/29/2012	2:29:54 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:29:54 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:29:54 PM	Tube furnace set to 200
3/29/2012	2:30:24 PM	Helium valve closed
3/29/2012	2:30:24 PM	H2 valve closed
3/29/2012	2:30:24 PM	BCl3 valve closed
3/29/2012	2:30:24 PM	PH3 valve closed
3/29/2012	2:30:24 PM	SiCl4 pre valve closed
3/29/2012	2:30:24 PM	SiCl4 post valve closed
3/29/2012	2:30:24 PM	Bypass valve closed
3/29/2012	2:30:24 PM	Bubbler valve closed
3/29/2012	2:30:24 PM	Main Vac valve opened
3/29/2012	2:30:24 PM	Helium MFC set to  0.000000
3/29/2012	2:30:24 PM	H2 MFC set to  0.000000
3/29/2012	2:30:24 PM	BCl3 MFC set to  0.000000
3/29/2012	2:30:24 PM	PH3 MFC set to  0.000000
3/29/2012	2:30:24 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:30:24 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:30:24 PM	Tube furnace set to 200
3/29/2012	2:30:54 PM	H2 valve closed
3/29/2012	2:30:54 PM	BCl3 valve closed
3/29/2012	2:30:54 PM	PH3 valve closed
3/29/2012	2:30:54 PM	SiCl4 pre valve closed
3/29/2012	2:30:54 PM	SiCl4 post valve closed
3/29/2012	2:30:54 PM	Bypass valve closed
3/29/2012	2:30:54 PM	Bubbler valve closed
3/29/2012	2:30:54 PM	Helium valve opened
3/29/2012	2:30:54 PM	Main Vac valve opened
3/29/2012	2:30:54 PM	Helium MFC set to  20.000000
3/29/2012	2:30:54 PM	H2 MFC set to  0.000000
3/29/2012	2:30:54 PM	BCl3 MFC set to  0.000000
3/29/2012	2:30:54 PM	PH3 MFC set to  0.000000
3/29/2012	2:30:54 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:30:54 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:30:54 PM	Tube furnace set to 200
3/29/2012	2:31:24 PM	Helium valve closed
3/29/2012	2:31:24 PM	H2 valve closed
3/29/2012	2:31:24 PM	BCl3 valve closed
3/29/2012	2:31:24 PM	PH3 valve closed
3/29/2012	2:31:24 PM	SiCl4 pre valve closed
3/29/2012	2:31:24 PM	SiCl4 post valve closed
3/29/2012	2:31:24 PM	Bypass valve closed
3/29/2012	2:31:24 PM	Bubbler valve closed
3/29/2012	2:31:24 PM	Main Vac valve opened
3/29/2012	2:31:24 PM	Helium MFC set to  0.000000
3/29/2012	2:31:24 PM	H2 MFC set to  0.000000
3/29/2012	2:31:24 PM	BCl3 MFC set to  0.000000
3/29/2012	2:31:24 PM	PH3 MFC set to  0.000000
3/29/2012	2:31:24 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:31:24 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:31:25 PM	Tube furnace set to 200
3/29/2012	2:31:55 PM	H2 valve closed
3/29/2012	2:31:55 PM	BCl3 valve closed
3/29/2012	2:31:55 PM	PH3 valve closed
3/29/2012	2:31:55 PM	SiCl4 pre valve closed
3/29/2012	2:31:55 PM	SiCl4 post valve closed
3/29/2012	2:31:55 PM	Bypass valve closed
3/29/2012	2:31:55 PM	Bubbler valve closed
3/29/2012	2:31:55 PM	Helium valve opened
3/29/2012	2:31:55 PM	Main Vac valve opened
3/29/2012	2:31:55 PM	Helium MFC set to  20.000000
3/29/2012	2:31:55 PM	H2 MFC set to  0.000000
3/29/2012	2:31:55 PM	BCl3 MFC set to  0.000000
3/29/2012	2:31:55 PM	PH3 MFC set to  0.000000
3/29/2012	2:31:55 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:31:55 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:31:55 PM	Tube furnace set to 200
3/29/2012	2:32:25 PM	Helium valve closed
3/29/2012	2:32:25 PM	H2 valve closed
3/29/2012	2:32:25 PM	BCl3 valve closed
3/29/2012	2:32:25 PM	PH3 valve closed
3/29/2012	2:32:25 PM	SiCl4 pre valve closed
3/29/2012	2:32:25 PM	SiCl4 post valve closed
3/29/2012	2:32:25 PM	Bypass valve closed
3/29/2012	2:32:25 PM	Bubbler valve closed
3/29/2012	2:32:25 PM	Main Vac valve opened
3/29/2012	2:32:25 PM	Helium MFC set to  0.000000
3/29/2012	2:32:25 PM	H2 MFC set to  0.000000
3/29/2012	2:32:25 PM	BCl3 MFC set to  0.000000
3/29/2012	2:32:25 PM	PH3 MFC set to  0.000000
3/29/2012	2:32:25 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:32:25 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:32:25 PM	Tube furnace set to 200
3/29/2012	2:32:55 PM	H2 valve closed
3/29/2012	2:32:55 PM	BCl3 valve closed
3/29/2012	2:32:55 PM	PH3 valve closed
3/29/2012	2:32:55 PM	SiCl4 pre valve closed
3/29/2012	2:32:55 PM	SiCl4 post valve closed
3/29/2012	2:32:55 PM	Bypass valve closed
3/29/2012	2:32:55 PM	Bubbler valve closed
3/29/2012	2:32:55 PM	Helium valve opened
3/29/2012	2:32:55 PM	Main Vac valve opened
3/29/2012	2:32:55 PM	Helium MFC set to  20.000000
3/29/2012	2:32:55 PM	H2 MFC set to  0.000000
3/29/2012	2:32:55 PM	BCl3 MFC set to  0.000000
3/29/2012	2:32:55 PM	PH3 MFC set to  0.000000
3/29/2012	2:32:55 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:32:55 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:32:55 PM	Tube furnace set to 200
3/29/2012	2:33:25 PM	Helium valve closed
3/29/2012	2:33:25 PM	H2 valve closed
3/29/2012	2:33:25 PM	BCl3 valve closed
3/29/2012	2:33:25 PM	PH3 valve closed
3/29/2012	2:33:25 PM	SiCl4 pre valve closed
3/29/2012	2:33:25 PM	SiCl4 post valve closed
3/29/2012	2:33:25 PM	Bypass valve closed
3/29/2012	2:33:25 PM	Bubbler valve closed
3/29/2012	2:33:25 PM	Main Vac valve opened
3/29/2012	2:33:25 PM	Helium MFC set to  0.000000
3/29/2012	2:33:25 PM	H2 MFC set to  0.000000
3/29/2012	2:33:25 PM	BCl3 MFC set to  0.000000
3/29/2012	2:33:25 PM	PH3 MFC set to  0.000000
3/29/2012	2:33:25 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:33:25 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:33:26 PM	Tube furnace set to 200
3/29/2012	2:33:27 PM	Run finished at 2:33 PM
3/29/2012	2:40:51 PM	Main Vac valve closed
3/29/2012	2:41:08 PM	Main Vac valve opened
3/29/2012	2:43:00 PM	Recipe started at 2:42 PM
3/29/2012	2:43:00 PM	Helium valve closed
3/29/2012	2:43:00 PM	H2 valve closed
3/29/2012	2:43:00 PM	BCl3 valve closed
3/29/2012	2:43:00 PM	PH3 valve closed
3/29/2012	2:43:00 PM	SiCl4 pre valve closed
3/29/2012	2:43:00 PM	SiCl4 post valve closed
3/29/2012	2:43:00 PM	Main Vac valve closed
3/29/2012	2:43:00 PM	Bypass valve closed
3/29/2012	2:43:00 PM	Bubbler valve closed
3/29/2012	2:43:00 PM	Helium MFC set to  0.000000
3/29/2012	2:43:00 PM	H2 MFC set to  0.000000
3/29/2012	2:43:00 PM	BCl3 MFC set to  0.000000
3/29/2012	2:43:00 PM	PH3 MFC set to  0.000000
3/29/2012	2:43:00 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:43:00 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:43:00 PM	Tube furnace set to 0
3/29/2012	2:43:03 PM	Helium valve closed
3/29/2012	2:43:03 PM	BCl3 valve closed
3/29/2012	2:43:03 PM	PH3 valve closed
3/29/2012	2:43:03 PM	SiCl4 pre valve closed
3/29/2012	2:43:03 PM	SiCl4 post valve closed
3/29/2012	2:43:03 PM	Main Vac valve closed
3/29/2012	2:43:03 PM	Bypass valve closed
3/29/2012	2:43:03 PM	Bubbler valve closed
3/29/2012	2:43:03 PM	H2 valve opened
3/29/2012	2:43:03 PM	Helium MFC set to  0.000000
3/29/2012	2:43:03 PM	H2 MFC set to  500.000000
3/29/2012	2:43:03 PM	BCl3 MFC set to  0.000000
3/29/2012	2:43:03 PM	PH3 MFC set to  0.000000
3/29/2012	2:43:03 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:43:03 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:43:03 PM	Tube furnace set to 0
3/29/2012	2:44:06 PM	Helium valve closed
3/29/2012	2:44:06 PM	BCl3 valve closed
3/29/2012	2:44:06 PM	PH3 valve closed
3/29/2012	2:44:06 PM	SiCl4 pre valve closed
3/29/2012	2:44:06 PM	SiCl4 post valve closed
3/29/2012	2:44:06 PM	Main Vac valve closed
3/29/2012	2:44:06 PM	Bypass valve closed
3/29/2012	2:44:06 PM	H2 valve opened
3/29/2012	2:44:06 PM	Bubbler valve opened
3/29/2012	2:44:06 PM	Helium MFC set to  0.000000
3/29/2012	2:44:06 PM	H2 MFC set to  500.000000
3/29/2012	2:44:06 PM	BCl3 MFC set to  0.000000
3/29/2012	2:44:06 PM	PH3 MFC set to  0.000000
3/29/2012	2:44:06 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:44:06 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:44:06 PM	Tube furnace set to 0
3/29/2012	2:44:07 PM	Helium valve closed
3/29/2012	2:44:07 PM	BCl3 valve closed
3/29/2012	2:44:07 PM	PH3 valve closed
3/29/2012	2:44:07 PM	SiCl4 pre valve closed
3/29/2012	2:44:07 PM	SiCl4 post valve closed
3/29/2012	2:44:07 PM	Main Vac valve closed
3/29/2012	2:44:07 PM	Bypass valve closed
3/29/2012	2:44:07 PM	H2 valve opened
3/29/2012	2:44:07 PM	Bubbler valve opened
3/29/2012	2:44:07 PM	Helium MFC set to  0.000000
3/29/2012	2:44:07 PM	H2 MFC set to  450.000000
3/29/2012	2:44:07 PM	BCl3 MFC set to  0.000000
3/29/2012	2:44:07 PM	PH3 MFC set to  0.000000
3/29/2012	2:44:07 PM	SiCl4 MFC set to  0.000000
3/29/2012	2:44:07 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	2:44:07 PM	Tube furnace set to 1000
3/29/2012	3:09:07 PM	Helium valve closed
3/29/2012	3:09:07 PM	PH3 valve closed
3/29/2012	3:09:07 PM	Main Vac valve closed
3/29/2012	3:09:07 PM	Bypass valve closed
3/29/2012	3:09:07 PM	H2 valve opened
3/29/2012	3:09:07 PM	BCl3 valve opened
3/29/2012	3:09:07 PM	SiCl4 pre valve opened
3/29/2012	3:09:07 PM	SiCl4 post valve opened
3/29/2012	3:09:07 PM	Bubbler valve opened
3/29/2012	3:09:07 PM	Helium MFC set to  0.000000
3/29/2012	3:09:07 PM	H2 MFC set to  450.000000
3/29/2012	3:09:07 PM	BCl3 MFC set to  1.500000
3/29/2012	3:09:07 PM	PH3 MFC set to  0.000000
3/29/2012	3:09:07 PM	SiCl4 MFC set to  50.000000
3/29/2012	3:09:07 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:09:08 PM	Tube furnace set to 1000
3/29/2012	3:14:08 PM	Helium valve closed
3/29/2012	3:14:08 PM	BCl3 valve closed
3/29/2012	3:14:08 PM	PH3 valve closed
3/29/2012	3:14:08 PM	SiCl4 pre valve closed
3/29/2012	3:14:08 PM	SiCl4 post valve closed
3/29/2012	3:14:08 PM	Main Vac valve closed
3/29/2012	3:14:08 PM	Bypass valve closed
3/29/2012	3:14:08 PM	H2 valve opened
3/29/2012	3:14:08 PM	Bubbler valve opened
3/29/2012	3:14:08 PM	Helium MFC set to  0.000000
3/29/2012	3:14:08 PM	H2 MFC set to  500.000000
3/29/2012	3:14:08 PM	BCl3 MFC set to  0.000000
3/29/2012	3:14:08 PM	PH3 MFC set to  0.000000
3/29/2012	3:14:08 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:14:08 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:14:08 PM	Tube furnace set to 750
3/29/2012	3:19:08 PM	H2 valve closed
3/29/2012	3:19:08 PM	BCl3 valve closed
3/29/2012	3:19:08 PM	PH3 valve closed
3/29/2012	3:19:08 PM	SiCl4 pre valve closed
3/29/2012	3:19:08 PM	SiCl4 post valve closed
3/29/2012	3:19:08 PM	Main Vac valve closed
3/29/2012	3:19:08 PM	Bypass valve closed
3/29/2012	3:19:08 PM	Helium valve opened
3/29/2012	3:19:08 PM	Bubbler valve opened
3/29/2012	3:19:08 PM	Helium MFC set to  500.000000
3/29/2012	3:19:08 PM	H2 MFC set to  0.000000
3/29/2012	3:19:08 PM	BCl3 MFC set to  0.000000
3/29/2012	3:19:08 PM	PH3 MFC set to  0.000000
3/29/2012	3:19:08 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:19:08 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:19:08 PM	Tube furnace set to 0
3/29/2012	3:30:44 PM	Helium valve closed
3/29/2012	3:30:44 PM	H2 valve closed
3/29/2012	3:30:44 PM	BCl3 valve closed
3/29/2012	3:30:44 PM	PH3 valve closed
3/29/2012	3:30:44 PM	SiCl4 pre valve closed
3/29/2012	3:30:44 PM	SiCl4 post valve closed
3/29/2012	3:30:44 PM	Main Vac valve closed
3/29/2012	3:30:44 PM	Bypass valve closed
3/29/2012	3:30:44 PM	Bubbler valve closed
3/29/2012	3:30:44 PM	Helium MFC set to  0.000000
3/29/2012	3:30:44 PM	H2 MFC set to  0.000000
3/29/2012	3:30:44 PM	BCl3 MFC set to  0.000000
3/29/2012	3:30:44 PM	PH3 MFC set to  0.000000
3/29/2012	3:30:44 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:30:44 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:30:44 PM	Tube furnace set to 0
3/29/2012	3:30:45 PM	Run finished at 3:30 PM
3/29/2012	3:30:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2012	3:30:53 PM	Recipe started at 3:30 PM
3/29/2012	3:30:53 PM	Helium valve closed
3/29/2012	3:30:53 PM	H2 valve closed
3/29/2012	3:30:53 PM	BCl3 valve closed
3/29/2012	3:30:53 PM	PH3 valve closed
3/29/2012	3:30:53 PM	SiCl4 pre valve closed
3/29/2012	3:30:53 PM	SiCl4 post valve closed
3/29/2012	3:30:53 PM	Main Vac valve closed
3/29/2012	3:30:53 PM	Bypass valve closed
3/29/2012	3:30:53 PM	Bubbler valve closed
3/29/2012	3:30:53 PM	Helium MFC set to  0.000000
3/29/2012	3:30:53 PM	H2 MFC set to  0.000000
3/29/2012	3:30:53 PM	BCl3 MFC set to  0.000000
3/29/2012	3:30:53 PM	PH3 MFC set to  0.000000
3/29/2012	3:30:53 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:30:53 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:30:53 PM	Tube furnace set to 0
3/29/2012	3:30:56 PM	H2 valve closed
3/29/2012	3:30:56 PM	BCl3 valve closed
3/29/2012	3:30:56 PM	PH3 valve closed
3/29/2012	3:30:56 PM	SiCl4 pre valve closed
3/29/2012	3:30:56 PM	SiCl4 post valve closed
3/29/2012	3:30:56 PM	Main Vac valve closed
3/29/2012	3:30:56 PM	Bypass valve closed
3/29/2012	3:30:56 PM	Bubbler valve closed
3/29/2012	3:30:56 PM	Helium valve opened
3/29/2012	3:30:56 PM	Helium MFC set to  500.000000
3/29/2012	3:30:56 PM	H2 MFC set to  0.000000
3/29/2012	3:30:56 PM	BCl3 MFC set to  0.000000
3/29/2012	3:30:56 PM	PH3 MFC set to  0.000000
3/29/2012	3:30:56 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:30:56 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:30:56 PM	Tube furnace set to 0
3/29/2012	3:30:56 PM	Helium valve closed
3/29/2012	3:30:56 PM	H2 valve closed
3/29/2012	3:30:56 PM	BCl3 valve closed
3/29/2012	3:30:56 PM	PH3 valve closed
3/29/2012	3:30:56 PM	SiCl4 pre valve closed
3/29/2012	3:30:56 PM	SiCl4 post valve closed
3/29/2012	3:30:56 PM	Main Vac valve closed
3/29/2012	3:30:56 PM	Bypass valve closed
3/29/2012	3:30:56 PM	Bubbler valve closed
3/29/2012	3:30:56 PM	Helium MFC set to  0.000000
3/29/2012	3:30:56 PM	H2 MFC set to  0.000000
3/29/2012	3:30:56 PM	BCl3 MFC set to  0.000000
3/29/2012	3:30:56 PM	PH3 MFC set to  0.000000
3/29/2012	3:30:56 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:30:56 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:30:57 PM	Tube furnace set to 0
3/29/2012	3:30:58 PM	Run finished at 3:30 PM
3/29/2012	3:30:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2012	3:39:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2012	3:39:20 PM	Recipe started at 3:39 PM
3/29/2012	3:39:20 PM	Helium valve closed
3/29/2012	3:39:20 PM	H2 valve closed
3/29/2012	3:39:20 PM	BCl3 valve closed
3/29/2012	3:39:20 PM	PH3 valve closed
3/29/2012	3:39:20 PM	SiCl4 pre valve closed
3/29/2012	3:39:20 PM	SiCl4 post valve closed
3/29/2012	3:39:20 PM	Main Vac valve closed
3/29/2012	3:39:20 PM	Bubbler valve closed
3/29/2012	3:39:20 PM	Bypass valve opened
3/29/2012	3:39:20 PM	Helium MFC set to  0.000000
3/29/2012	3:39:20 PM	H2 MFC set to  0.000000
3/29/2012	3:39:20 PM	BCl3 MFC set to  0.000000
3/29/2012	3:39:20 PM	PH3 MFC set to  0.000000
3/29/2012	3:39:20 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:39:20 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:39:20 PM	Tube furnace set to 0
3/29/2012	3:40:22 PM	Helium valve closed
3/29/2012	3:40:22 PM	H2 valve closed
3/29/2012	3:40:22 PM	BCl3 valve closed
3/29/2012	3:40:22 PM	PH3 valve closed
3/29/2012	3:40:22 PM	SiCl4 pre valve closed
3/29/2012	3:40:22 PM	SiCl4 post valve closed
3/29/2012	3:40:22 PM	Main Vac valve closed
3/29/2012	3:40:22 PM	Bubbler valve closed
3/29/2012	3:40:22 PM	Bypass valve opened
3/29/2012	3:40:22 PM	Helium MFC set to  0.000000
3/29/2012	3:40:22 PM	H2 MFC set to  0.000000
3/29/2012	3:40:22 PM	BCl3 MFC set to  0.000000
3/29/2012	3:40:22 PM	PH3 MFC set to  0.000000
3/29/2012	3:40:22 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:40:22 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:40:22 PM	Tube furnace set to 0
3/29/2012	3:41:22 PM	Helium valve closed
3/29/2012	3:41:22 PM	H2 valve closed
3/29/2012	3:41:22 PM	BCl3 valve closed
3/29/2012	3:41:22 PM	PH3 valve closed
3/29/2012	3:41:22 PM	SiCl4 pre valve closed
3/29/2012	3:41:22 PM	SiCl4 post valve closed
3/29/2012	3:41:22 PM	Bypass valve closed
3/29/2012	3:41:22 PM	Bubbler valve closed
3/29/2012	3:41:22 PM	Main Vac valve opened
3/29/2012	3:41:22 PM	Helium MFC set to  0.000000
3/29/2012	3:41:22 PM	H2 MFC set to  0.000000
3/29/2012	3:41:22 PM	BCl3 MFC set to  0.000000
3/29/2012	3:41:22 PM	PH3 MFC set to  0.000000
3/29/2012	3:41:22 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:41:22 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:41:22 PM	Tube furnace set to 0
3/29/2012	3:41:23 PM	Run finished at 3:41 PM
3/29/2012	3:41:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2012	3:50:56 PM	Recipe started at 3:50 PM
3/29/2012	3:50:56 PM	Helium valve closed
3/29/2012	3:50:56 PM	H2 valve closed
3/29/2012	3:50:56 PM	BCl3 valve closed
3/29/2012	3:50:56 PM	PH3 valve closed
3/29/2012	3:50:56 PM	SiCl4 pre valve closed
3/29/2012	3:50:56 PM	SiCl4 post valve closed
3/29/2012	3:50:56 PM	Bypass valve closed
3/29/2012	3:50:56 PM	Bubbler valve closed
3/29/2012	3:50:56 PM	Main Vac valve opened
3/29/2012	3:50:56 PM	Helium MFC set to  0.000000
3/29/2012	3:50:56 PM	H2 MFC set to  0.000000
3/29/2012	3:50:56 PM	BCl3 MFC set to  0.000000
3/29/2012	3:50:56 PM	PH3 MFC set to  0.000000
3/29/2012	3:50:56 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:50:56 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:50:56 PM	Tube furnace set to 200
3/29/2012	3:51:26 PM	H2 valve closed
3/29/2012	3:51:26 PM	BCl3 valve closed
3/29/2012	3:51:26 PM	PH3 valve closed
3/29/2012	3:51:26 PM	SiCl4 pre valve closed
3/29/2012	3:51:26 PM	SiCl4 post valve closed
3/29/2012	3:51:26 PM	Bypass valve closed
3/29/2012	3:51:26 PM	Bubbler valve closed
3/29/2012	3:51:26 PM	Helium valve opened
3/29/2012	3:51:26 PM	Main Vac valve opened
3/29/2012	3:51:26 PM	Helium MFC set to  20.000000
3/29/2012	3:51:26 PM	H2 MFC set to  0.000000
3/29/2012	3:51:26 PM	BCl3 MFC set to  0.000000
3/29/2012	3:51:26 PM	PH3 MFC set to  0.000000
3/29/2012	3:51:26 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:51:26 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:51:26 PM	Tube furnace set to 200
3/29/2012	3:51:56 PM	Helium valve closed
3/29/2012	3:51:56 PM	H2 valve closed
3/29/2012	3:51:56 PM	BCl3 valve closed
3/29/2012	3:51:56 PM	PH3 valve closed
3/29/2012	3:51:56 PM	SiCl4 pre valve closed
3/29/2012	3:51:56 PM	SiCl4 post valve closed
3/29/2012	3:51:56 PM	Bypass valve closed
3/29/2012	3:51:56 PM	Bubbler valve closed
3/29/2012	3:51:56 PM	Main Vac valve opened
3/29/2012	3:51:56 PM	Helium MFC set to  0.000000
3/29/2012	3:51:56 PM	H2 MFC set to  0.000000
3/29/2012	3:51:56 PM	BCl3 MFC set to  0.000000
3/29/2012	3:51:56 PM	PH3 MFC set to  0.000000
3/29/2012	3:51:56 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:51:56 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:51:56 PM	Tube furnace set to 200
3/29/2012	3:52:26 PM	H2 valve closed
3/29/2012	3:52:26 PM	BCl3 valve closed
3/29/2012	3:52:26 PM	PH3 valve closed
3/29/2012	3:52:26 PM	SiCl4 pre valve closed
3/29/2012	3:52:26 PM	SiCl4 post valve closed
3/29/2012	3:52:26 PM	Bypass valve closed
3/29/2012	3:52:26 PM	Bubbler valve closed
3/29/2012	3:52:26 PM	Helium valve opened
3/29/2012	3:52:26 PM	Main Vac valve opened
3/29/2012	3:52:26 PM	Helium MFC set to  20.000000
3/29/2012	3:52:26 PM	H2 MFC set to  0.000000
3/29/2012	3:52:26 PM	BCl3 MFC set to  0.000000
3/29/2012	3:52:26 PM	PH3 MFC set to  0.000000
3/29/2012	3:52:26 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:52:26 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:52:26 PM	Tube furnace set to 200
3/29/2012	3:52:57 PM	Helium valve closed
3/29/2012	3:52:57 PM	H2 valve closed
3/29/2012	3:52:57 PM	BCl3 valve closed
3/29/2012	3:52:57 PM	PH3 valve closed
3/29/2012	3:52:57 PM	SiCl4 pre valve closed
3/29/2012	3:52:57 PM	SiCl4 post valve closed
3/29/2012	3:52:57 PM	Bypass valve closed
3/29/2012	3:52:57 PM	Bubbler valve closed
3/29/2012	3:52:57 PM	Main Vac valve opened
3/29/2012	3:52:57 PM	Helium MFC set to  0.000000
3/29/2012	3:52:57 PM	H2 MFC set to  0.000000
3/29/2012	3:52:57 PM	BCl3 MFC set to  0.000000
3/29/2012	3:52:57 PM	PH3 MFC set to  0.000000
3/29/2012	3:52:57 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:52:57 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:52:57 PM	Tube furnace set to 200
3/29/2012	3:53:27 PM	H2 valve closed
3/29/2012	3:53:27 PM	BCl3 valve closed
3/29/2012	3:53:27 PM	PH3 valve closed
3/29/2012	3:53:27 PM	SiCl4 pre valve closed
3/29/2012	3:53:27 PM	SiCl4 post valve closed
3/29/2012	3:53:27 PM	Bypass valve closed
3/29/2012	3:53:27 PM	Bubbler valve closed
3/29/2012	3:53:27 PM	Helium valve opened
3/29/2012	3:53:27 PM	Main Vac valve opened
3/29/2012	3:53:27 PM	Helium MFC set to  20.000000
3/29/2012	3:53:27 PM	H2 MFC set to  0.000000
3/29/2012	3:53:27 PM	BCl3 MFC set to  0.000000
3/29/2012	3:53:27 PM	PH3 MFC set to  0.000000
3/29/2012	3:53:27 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:53:27 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:53:27 PM	Tube furnace set to 200
3/29/2012	3:53:57 PM	Helium valve closed
3/29/2012	3:53:57 PM	H2 valve closed
3/29/2012	3:53:57 PM	BCl3 valve closed
3/29/2012	3:53:57 PM	PH3 valve closed
3/29/2012	3:53:57 PM	SiCl4 pre valve closed
3/29/2012	3:53:57 PM	SiCl4 post valve closed
3/29/2012	3:53:57 PM	Bypass valve closed
3/29/2012	3:53:57 PM	Bubbler valve closed
3/29/2012	3:53:57 PM	Main Vac valve opened
3/29/2012	3:53:57 PM	Helium MFC set to  0.000000
3/29/2012	3:53:57 PM	H2 MFC set to  0.000000
3/29/2012	3:53:57 PM	BCl3 MFC set to  0.000000
3/29/2012	3:53:57 PM	PH3 MFC set to  0.000000
3/29/2012	3:53:57 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:53:57 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:53:57 PM	Tube furnace set to 200
3/29/2012	3:54:27 PM	H2 valve closed
3/29/2012	3:54:27 PM	BCl3 valve closed
3/29/2012	3:54:27 PM	PH3 valve closed
3/29/2012	3:54:27 PM	SiCl4 pre valve closed
3/29/2012	3:54:27 PM	SiCl4 post valve closed
3/29/2012	3:54:27 PM	Bypass valve closed
3/29/2012	3:54:27 PM	Bubbler valve closed
3/29/2012	3:54:27 PM	Helium valve opened
3/29/2012	3:54:27 PM	Main Vac valve opened
3/29/2012	3:54:27 PM	Helium MFC set to  20.000000
3/29/2012	3:54:27 PM	H2 MFC set to  0.000000
3/29/2012	3:54:27 PM	BCl3 MFC set to  0.000000
3/29/2012	3:54:27 PM	PH3 MFC set to  0.000000
3/29/2012	3:54:27 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:54:27 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:54:27 PM	Tube furnace set to 200
3/29/2012	3:54:57 PM	Helium valve closed
3/29/2012	3:54:57 PM	H2 valve closed
3/29/2012	3:54:57 PM	BCl3 valve closed
3/29/2012	3:54:57 PM	PH3 valve closed
3/29/2012	3:54:57 PM	SiCl4 pre valve closed
3/29/2012	3:54:57 PM	SiCl4 post valve closed
3/29/2012	3:54:57 PM	Bypass valve closed
3/29/2012	3:54:57 PM	Bubbler valve closed
3/29/2012	3:54:57 PM	Main Vac valve opened
3/29/2012	3:54:57 PM	Helium MFC set to  0.000000
3/29/2012	3:54:57 PM	H2 MFC set to  0.000000
3/29/2012	3:54:57 PM	BCl3 MFC set to  0.000000
3/29/2012	3:54:58 PM	PH3 MFC set to  0.000000
3/29/2012	3:54:58 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:54:58 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:54:58 PM	Tube furnace set to 200
3/29/2012	3:55:28 PM	H2 valve closed
3/29/2012	3:55:28 PM	BCl3 valve closed
3/29/2012	3:55:28 PM	PH3 valve closed
3/29/2012	3:55:28 PM	SiCl4 pre valve closed
3/29/2012	3:55:28 PM	SiCl4 post valve closed
3/29/2012	3:55:28 PM	Bypass valve closed
3/29/2012	3:55:28 PM	Bubbler valve closed
3/29/2012	3:55:28 PM	Helium valve opened
3/29/2012	3:55:28 PM	Main Vac valve opened
3/29/2012	3:55:28 PM	Helium MFC set to  20.000000
3/29/2012	3:55:28 PM	H2 MFC set to  0.000000
3/29/2012	3:55:28 PM	BCl3 MFC set to  0.000000
3/29/2012	3:55:28 PM	PH3 MFC set to  0.000000
3/29/2012	3:55:28 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:55:28 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:55:28 PM	Tube furnace set to 200
3/29/2012	3:55:58 PM	Helium valve closed
3/29/2012	3:55:58 PM	H2 valve closed
3/29/2012	3:55:58 PM	BCl3 valve closed
3/29/2012	3:55:58 PM	PH3 valve closed
3/29/2012	3:55:58 PM	SiCl4 pre valve closed
3/29/2012	3:55:58 PM	SiCl4 post valve closed
3/29/2012	3:55:58 PM	Bypass valve closed
3/29/2012	3:55:58 PM	Bubbler valve closed
3/29/2012	3:55:58 PM	Main Vac valve opened
3/29/2012	3:55:58 PM	Helium MFC set to  0.000000
3/29/2012	3:55:58 PM	H2 MFC set to  0.000000
3/29/2012	3:55:58 PM	BCl3 MFC set to  0.000000
3/29/2012	3:55:58 PM	PH3 MFC set to  0.000000
3/29/2012	3:55:58 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:55:58 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:55:58 PM	Tube furnace set to 200
3/29/2012	3:56:28 PM	H2 valve closed
3/29/2012	3:56:28 PM	BCl3 valve closed
3/29/2012	3:56:28 PM	PH3 valve closed
3/29/2012	3:56:28 PM	SiCl4 pre valve closed
3/29/2012	3:56:28 PM	SiCl4 post valve closed
3/29/2012	3:56:28 PM	Bypass valve closed
3/29/2012	3:56:28 PM	Bubbler valve closed
3/29/2012	3:56:28 PM	Helium valve opened
3/29/2012	3:56:28 PM	Main Vac valve opened
3/29/2012	3:56:28 PM	Helium MFC set to  20.000000
3/29/2012	3:56:28 PM	H2 MFC set to  0.000000
3/29/2012	3:56:28 PM	BCl3 MFC set to  0.000000
3/29/2012	3:56:28 PM	PH3 MFC set to  0.000000
3/29/2012	3:56:28 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:56:28 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:56:28 PM	Tube furnace set to 200
3/29/2012	3:56:58 PM	Helium valve closed
3/29/2012	3:56:58 PM	H2 valve closed
3/29/2012	3:56:58 PM	BCl3 valve closed
3/29/2012	3:56:58 PM	PH3 valve closed
3/29/2012	3:56:58 PM	SiCl4 pre valve closed
3/29/2012	3:56:58 PM	SiCl4 post valve closed
3/29/2012	3:56:58 PM	Bypass valve closed
3/29/2012	3:56:58 PM	Bubbler valve closed
3/29/2012	3:56:58 PM	Main Vac valve opened
3/29/2012	3:56:58 PM	Helium MFC set to  0.000000
3/29/2012	3:56:58 PM	H2 MFC set to  0.000000
3/29/2012	3:56:58 PM	BCl3 MFC set to  0.000000
3/29/2012	3:56:58 PM	PH3 MFC set to  0.000000
3/29/2012	3:56:58 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:56:58 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:56:59 PM	Tube furnace set to 200
3/29/2012	3:57:29 PM	H2 valve closed
3/29/2012	3:57:29 PM	BCl3 valve closed
3/29/2012	3:57:29 PM	PH3 valve closed
3/29/2012	3:57:29 PM	SiCl4 pre valve closed
3/29/2012	3:57:29 PM	SiCl4 post valve closed
3/29/2012	3:57:29 PM	Bypass valve closed
3/29/2012	3:57:29 PM	Bubbler valve closed
3/29/2012	3:57:29 PM	Helium valve opened
3/29/2012	3:57:29 PM	Main Vac valve opened
3/29/2012	3:57:29 PM	Helium MFC set to  20.000000
3/29/2012	3:57:29 PM	H2 MFC set to  0.000000
3/29/2012	3:57:29 PM	BCl3 MFC set to  0.000000
3/29/2012	3:57:29 PM	PH3 MFC set to  0.000000
3/29/2012	3:57:29 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:57:29 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:57:29 PM	Tube furnace set to 200
3/29/2012	3:57:59 PM	Helium valve closed
3/29/2012	3:57:59 PM	H2 valve closed
3/29/2012	3:57:59 PM	BCl3 valve closed
3/29/2012	3:57:59 PM	PH3 valve closed
3/29/2012	3:57:59 PM	SiCl4 pre valve closed
3/29/2012	3:57:59 PM	SiCl4 post valve closed
3/29/2012	3:57:59 PM	Bypass valve closed
3/29/2012	3:57:59 PM	Bubbler valve closed
3/29/2012	3:57:59 PM	Main Vac valve opened
3/29/2012	3:57:59 PM	Helium MFC set to  0.000000
3/29/2012	3:57:59 PM	H2 MFC set to  0.000000
3/29/2012	3:57:59 PM	BCl3 MFC set to  0.000000
3/29/2012	3:57:59 PM	PH3 MFC set to  0.000000
3/29/2012	3:57:59 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:57:59 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:57:59 PM	Tube furnace set to 200
3/29/2012	3:58:29 PM	H2 valve closed
3/29/2012	3:58:29 PM	BCl3 valve closed
3/29/2012	3:58:29 PM	PH3 valve closed
3/29/2012	3:58:29 PM	SiCl4 pre valve closed
3/29/2012	3:58:29 PM	SiCl4 post valve closed
3/29/2012	3:58:29 PM	Bypass valve closed
3/29/2012	3:58:29 PM	Bubbler valve closed
3/29/2012	3:58:29 PM	Helium valve opened
3/29/2012	3:58:29 PM	Main Vac valve opened
3/29/2012	3:58:29 PM	Helium MFC set to  20.000000
3/29/2012	3:58:29 PM	H2 MFC set to  0.000000
3/29/2012	3:58:29 PM	BCl3 MFC set to  0.000000
3/29/2012	3:58:29 PM	PH3 MFC set to  0.000000
3/29/2012	3:58:29 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:58:29 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:58:29 PM	Tube furnace set to 200
3/29/2012	3:58:59 PM	Helium valve closed
3/29/2012	3:58:59 PM	H2 valve closed
3/29/2012	3:58:59 PM	BCl3 valve closed
3/29/2012	3:58:59 PM	PH3 valve closed
3/29/2012	3:58:59 PM	SiCl4 pre valve closed
3/29/2012	3:58:59 PM	SiCl4 post valve closed
3/29/2012	3:58:59 PM	Bypass valve closed
3/29/2012	3:58:59 PM	Bubbler valve closed
3/29/2012	3:58:59 PM	Main Vac valve opened
3/29/2012	3:58:59 PM	Helium MFC set to  0.000000
3/29/2012	3:58:59 PM	H2 MFC set to  0.000000
3/29/2012	3:58:59 PM	BCl3 MFC set to  0.000000
3/29/2012	3:58:59 PM	PH3 MFC set to  0.000000
3/29/2012	3:58:59 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:58:59 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:59:00 PM	Tube furnace set to 200
3/29/2012	3:59:30 PM	H2 valve closed
3/29/2012	3:59:30 PM	BCl3 valve closed
3/29/2012	3:59:30 PM	PH3 valve closed
3/29/2012	3:59:30 PM	SiCl4 pre valve closed
3/29/2012	3:59:30 PM	SiCl4 post valve closed
3/29/2012	3:59:30 PM	Bypass valve closed
3/29/2012	3:59:30 PM	Bubbler valve closed
3/29/2012	3:59:30 PM	Helium valve opened
3/29/2012	3:59:30 PM	Main Vac valve opened
3/29/2012	3:59:30 PM	Helium MFC set to  20.000000
3/29/2012	3:59:30 PM	H2 MFC set to  0.000000
3/29/2012	3:59:30 PM	BCl3 MFC set to  0.000000
3/29/2012	3:59:30 PM	PH3 MFC set to  0.000000
3/29/2012	3:59:30 PM	SiCl4 MFC set to  0.000000
3/29/2012	3:59:30 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	3:59:30 PM	Tube furnace set to 200
3/29/2012	4:00:00 PM	Helium valve closed
3/29/2012	4:00:00 PM	H2 valve closed
3/29/2012	4:00:00 PM	BCl3 valve closed
3/29/2012	4:00:00 PM	PH3 valve closed
3/29/2012	4:00:00 PM	SiCl4 pre valve closed
3/29/2012	4:00:00 PM	SiCl4 post valve closed
3/29/2012	4:00:00 PM	Bypass valve closed
3/29/2012	4:00:00 PM	Bubbler valve closed
3/29/2012	4:00:00 PM	Main Vac valve opened
3/29/2012	4:00:00 PM	Helium MFC set to  0.000000
3/29/2012	4:00:00 PM	H2 MFC set to  0.000000
3/29/2012	4:00:00 PM	BCl3 MFC set to  0.000000
3/29/2012	4:00:00 PM	PH3 MFC set to  0.000000
3/29/2012	4:00:00 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:00:00 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:00:00 PM	Tube furnace set to 200
3/29/2012	4:00:30 PM	H2 valve closed
3/29/2012	4:00:30 PM	BCl3 valve closed
3/29/2012	4:00:30 PM	PH3 valve closed
3/29/2012	4:00:30 PM	SiCl4 pre valve closed
3/29/2012	4:00:30 PM	SiCl4 post valve closed
3/29/2012	4:00:30 PM	Bypass valve closed
3/29/2012	4:00:30 PM	Bubbler valve closed
3/29/2012	4:00:30 PM	Helium valve opened
3/29/2012	4:00:30 PM	Main Vac valve opened
3/29/2012	4:00:30 PM	Helium MFC set to  20.000000
3/29/2012	4:00:30 PM	H2 MFC set to  0.000000
3/29/2012	4:00:30 PM	BCl3 MFC set to  0.000000
3/29/2012	4:00:30 PM	PH3 MFC set to  0.000000
3/29/2012	4:00:30 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:00:30 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:00:30 PM	Tube furnace set to 200
3/29/2012	4:01:00 PM	Helium valve closed
3/29/2012	4:01:00 PM	H2 valve closed
3/29/2012	4:01:00 PM	BCl3 valve closed
3/29/2012	4:01:00 PM	PH3 valve closed
3/29/2012	4:01:00 PM	SiCl4 pre valve closed
3/29/2012	4:01:00 PM	SiCl4 post valve closed
3/29/2012	4:01:00 PM	Bypass valve closed
3/29/2012	4:01:00 PM	Bubbler valve closed
3/29/2012	4:01:00 PM	Main Vac valve opened
3/29/2012	4:01:00 PM	Helium MFC set to  0.000000
3/29/2012	4:01:00 PM	H2 MFC set to  0.000000
3/29/2012	4:01:00 PM	BCl3 MFC set to  0.000000
3/29/2012	4:01:00 PM	PH3 MFC set to  0.000000
3/29/2012	4:01:00 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:01:00 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:01:00 PM	Tube furnace set to 200
3/29/2012	4:01:01 PM	Run finished at 4:01 PM
3/29/2012	4:02:37 PM	Recipe started at 4:02 PM
3/29/2012	4:02:38 PM	Helium valve closed
3/29/2012	4:02:38 PM	H2 valve closed
3/29/2012	4:02:38 PM	BCl3 valve closed
3/29/2012	4:02:38 PM	PH3 valve closed
3/29/2012	4:02:38 PM	SiCl4 pre valve closed
3/29/2012	4:02:38 PM	SiCl4 post valve closed
3/29/2012	4:02:38 PM	Bypass valve closed
3/29/2012	4:02:38 PM	Bubbler valve closed
3/29/2012	4:02:38 PM	Main Vac valve opened
3/29/2012	4:02:38 PM	Helium MFC set to  0.000000
3/29/2012	4:02:38 PM	H2 MFC set to  0.000000
3/29/2012	4:02:38 PM	BCl3 MFC set to  0.000000
3/29/2012	4:02:38 PM	PH3 MFC set to  0.000000
3/29/2012	4:02:38 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:02:38 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:02:38 PM	Tube furnace set to 200
3/29/2012	4:03:08 PM	H2 valve closed
3/29/2012	4:03:08 PM	BCl3 valve closed
3/29/2012	4:03:08 PM	PH3 valve closed
3/29/2012	4:03:08 PM	SiCl4 pre valve closed
3/29/2012	4:03:08 PM	SiCl4 post valve closed
3/29/2012	4:03:08 PM	Bypass valve closed
3/29/2012	4:03:08 PM	Bubbler valve closed
3/29/2012	4:03:08 PM	Helium valve opened
3/29/2012	4:03:08 PM	Main Vac valve opened
3/29/2012	4:03:08 PM	Helium MFC set to  20.000000
3/29/2012	4:03:08 PM	H2 MFC set to  0.000000
3/29/2012	4:03:08 PM	BCl3 MFC set to  0.000000
3/29/2012	4:03:08 PM	PH3 MFC set to  0.000000
3/29/2012	4:03:08 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:03:08 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:03:08 PM	Tube furnace set to 200
3/29/2012	4:03:38 PM	Helium valve closed
3/29/2012	4:03:38 PM	H2 valve closed
3/29/2012	4:03:38 PM	BCl3 valve closed
3/29/2012	4:03:38 PM	PH3 valve closed
3/29/2012	4:03:38 PM	SiCl4 pre valve closed
3/29/2012	4:03:38 PM	SiCl4 post valve closed
3/29/2012	4:03:38 PM	Bypass valve closed
3/29/2012	4:03:38 PM	Bubbler valve closed
3/29/2012	4:03:38 PM	Main Vac valve opened
3/29/2012	4:03:38 PM	Helium MFC set to  0.000000
3/29/2012	4:03:38 PM	H2 MFC set to  0.000000
3/29/2012	4:03:38 PM	BCl3 MFC set to  0.000000
3/29/2012	4:03:38 PM	PH3 MFC set to  0.000000
3/29/2012	4:03:38 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:03:38 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:03:38 PM	Tube furnace set to 200
3/29/2012	4:04:08 PM	H2 valve closed
3/29/2012	4:04:08 PM	BCl3 valve closed
3/29/2012	4:04:08 PM	PH3 valve closed
3/29/2012	4:04:08 PM	SiCl4 pre valve closed
3/29/2012	4:04:08 PM	SiCl4 post valve closed
3/29/2012	4:04:08 PM	Bypass valve closed
3/29/2012	4:04:08 PM	Bubbler valve closed
3/29/2012	4:04:08 PM	Helium valve opened
3/29/2012	4:04:08 PM	Main Vac valve opened
3/29/2012	4:04:08 PM	Helium MFC set to  20.000000
3/29/2012	4:04:08 PM	H2 MFC set to  0.000000
3/29/2012	4:04:08 PM	BCl3 MFC set to  0.000000
3/29/2012	4:04:08 PM	PH3 MFC set to  0.000000
3/29/2012	4:04:08 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:04:08 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:04:08 PM	Tube furnace set to 200
3/29/2012	4:04:38 PM	Helium valve closed
3/29/2012	4:04:38 PM	H2 valve closed
3/29/2012	4:04:38 PM	BCl3 valve closed
3/29/2012	4:04:38 PM	PH3 valve closed
3/29/2012	4:04:38 PM	SiCl4 pre valve closed
3/29/2012	4:04:38 PM	SiCl4 post valve closed
3/29/2012	4:04:38 PM	Bypass valve closed
3/29/2012	4:04:38 PM	Bubbler valve closed
3/29/2012	4:04:38 PM	Main Vac valve opened
3/29/2012	4:04:38 PM	Helium MFC set to  0.000000
3/29/2012	4:04:38 PM	H2 MFC set to  0.000000
3/29/2012	4:04:38 PM	BCl3 MFC set to  0.000000
3/29/2012	4:04:38 PM	PH3 MFC set to  0.000000
3/29/2012	4:04:39 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:04:39 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:04:39 PM	Tube furnace set to 200
3/29/2012	4:05:09 PM	H2 valve closed
3/29/2012	4:05:09 PM	BCl3 valve closed
3/29/2012	4:05:09 PM	PH3 valve closed
3/29/2012	4:05:09 PM	SiCl4 pre valve closed
3/29/2012	4:05:09 PM	SiCl4 post valve closed
3/29/2012	4:05:09 PM	Bypass valve closed
3/29/2012	4:05:09 PM	Bubbler valve closed
3/29/2012	4:05:09 PM	Helium valve opened
3/29/2012	4:05:09 PM	Main Vac valve opened
3/29/2012	4:05:09 PM	Helium MFC set to  20.000000
3/29/2012	4:05:09 PM	H2 MFC set to  0.000000
3/29/2012	4:05:09 PM	BCl3 MFC set to  0.000000
3/29/2012	4:05:09 PM	PH3 MFC set to  0.000000
3/29/2012	4:05:09 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:05:09 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:05:09 PM	Tube furnace set to 200
3/29/2012	4:05:39 PM	Helium valve closed
3/29/2012	4:05:39 PM	H2 valve closed
3/29/2012	4:05:39 PM	BCl3 valve closed
3/29/2012	4:05:39 PM	PH3 valve closed
3/29/2012	4:05:39 PM	SiCl4 pre valve closed
3/29/2012	4:05:39 PM	SiCl4 post valve closed
3/29/2012	4:05:39 PM	Bypass valve closed
3/29/2012	4:05:39 PM	Bubbler valve closed
3/29/2012	4:05:39 PM	Main Vac valve opened
3/29/2012	4:05:39 PM	Helium MFC set to  0.000000
3/29/2012	4:05:39 PM	H2 MFC set to  0.000000
3/29/2012	4:05:39 PM	BCl3 MFC set to  0.000000
3/29/2012	4:05:39 PM	PH3 MFC set to  0.000000
3/29/2012	4:05:39 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:05:39 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:05:39 PM	Tube furnace set to 200
3/29/2012	4:06:09 PM	H2 valve closed
3/29/2012	4:06:09 PM	BCl3 valve closed
3/29/2012	4:06:09 PM	PH3 valve closed
3/29/2012	4:06:09 PM	SiCl4 pre valve closed
3/29/2012	4:06:09 PM	SiCl4 post valve closed
3/29/2012	4:06:09 PM	Bypass valve closed
3/29/2012	4:06:09 PM	Bubbler valve closed
3/29/2012	4:06:09 PM	Helium valve opened
3/29/2012	4:06:09 PM	Main Vac valve opened
3/29/2012	4:06:09 PM	Helium MFC set to  20.000000
3/29/2012	4:06:09 PM	H2 MFC set to  0.000000
3/29/2012	4:06:09 PM	BCl3 MFC set to  0.000000
3/29/2012	4:06:09 PM	PH3 MFC set to  0.000000
3/29/2012	4:06:09 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:06:09 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:06:09 PM	Tube furnace set to 200
3/29/2012	4:06:39 PM	Helium valve closed
3/29/2012	4:06:39 PM	H2 valve closed
3/29/2012	4:06:39 PM	BCl3 valve closed
3/29/2012	4:06:39 PM	PH3 valve closed
3/29/2012	4:06:39 PM	SiCl4 pre valve closed
3/29/2012	4:06:39 PM	SiCl4 post valve closed
3/29/2012	4:06:39 PM	Bypass valve closed
3/29/2012	4:06:39 PM	Bubbler valve closed
3/29/2012	4:06:39 PM	Main Vac valve opened
3/29/2012	4:06:39 PM	Helium MFC set to  0.000000
3/29/2012	4:06:39 PM	H2 MFC set to  0.000000
3/29/2012	4:06:39 PM	BCl3 MFC set to  0.000000
3/29/2012	4:06:39 PM	PH3 MFC set to  0.000000
3/29/2012	4:06:39 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:06:39 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:06:40 PM	Tube furnace set to 200
3/29/2012	4:07:10 PM	H2 valve closed
3/29/2012	4:07:10 PM	BCl3 valve closed
3/29/2012	4:07:10 PM	PH3 valve closed
3/29/2012	4:07:10 PM	SiCl4 pre valve closed
3/29/2012	4:07:10 PM	SiCl4 post valve closed
3/29/2012	4:07:10 PM	Bypass valve closed
3/29/2012	4:07:10 PM	Bubbler valve closed
3/29/2012	4:07:10 PM	Helium valve opened
3/29/2012	4:07:10 PM	Main Vac valve opened
3/29/2012	4:07:10 PM	Helium MFC set to  20.000000
3/29/2012	4:07:10 PM	H2 MFC set to  0.000000
3/29/2012	4:07:10 PM	BCl3 MFC set to  0.000000
3/29/2012	4:07:10 PM	PH3 MFC set to  0.000000
3/29/2012	4:07:10 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:07:10 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:07:10 PM	Tube furnace set to 200
3/29/2012	4:07:40 PM	Helium valve closed
3/29/2012	4:07:40 PM	H2 valve closed
3/29/2012	4:07:40 PM	BCl3 valve closed
3/29/2012	4:07:40 PM	PH3 valve closed
3/29/2012	4:07:40 PM	SiCl4 pre valve closed
3/29/2012	4:07:40 PM	SiCl4 post valve closed
3/29/2012	4:07:40 PM	Bypass valve closed
3/29/2012	4:07:40 PM	Bubbler valve closed
3/29/2012	4:07:40 PM	Main Vac valve opened
3/29/2012	4:07:40 PM	Helium MFC set to  0.000000
3/29/2012	4:07:40 PM	H2 MFC set to  0.000000
3/29/2012	4:07:40 PM	BCl3 MFC set to  0.000000
3/29/2012	4:07:40 PM	PH3 MFC set to  0.000000
3/29/2012	4:07:40 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:07:40 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:07:40 PM	Tube furnace set to 200
3/29/2012	4:08:10 PM	H2 valve closed
3/29/2012	4:08:10 PM	BCl3 valve closed
3/29/2012	4:08:10 PM	PH3 valve closed
3/29/2012	4:08:10 PM	SiCl4 pre valve closed
3/29/2012	4:08:10 PM	SiCl4 post valve closed
3/29/2012	4:08:10 PM	Bypass valve closed
3/29/2012	4:08:10 PM	Bubbler valve closed
3/29/2012	4:08:10 PM	Helium valve opened
3/29/2012	4:08:10 PM	Main Vac valve opened
3/29/2012	4:08:10 PM	Helium MFC set to  20.000000
3/29/2012	4:08:10 PM	H2 MFC set to  0.000000
3/29/2012	4:08:10 PM	BCl3 MFC set to  0.000000
3/29/2012	4:08:10 PM	PH3 MFC set to  0.000000
3/29/2012	4:08:10 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:08:10 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:08:10 PM	Tube furnace set to 200
3/29/2012	4:08:40 PM	Helium valve closed
3/29/2012	4:08:40 PM	H2 valve closed
3/29/2012	4:08:40 PM	BCl3 valve closed
3/29/2012	4:08:40 PM	PH3 valve closed
3/29/2012	4:08:40 PM	SiCl4 pre valve closed
3/29/2012	4:08:40 PM	SiCl4 post valve closed
3/29/2012	4:08:40 PM	Bypass valve closed
3/29/2012	4:08:40 PM	Bubbler valve closed
3/29/2012	4:08:40 PM	Main Vac valve opened
3/29/2012	4:08:40 PM	Helium MFC set to  0.000000
3/29/2012	4:08:40 PM	H2 MFC set to  0.000000
3/29/2012	4:08:40 PM	BCl3 MFC set to  0.000000
3/29/2012	4:08:40 PM	PH3 MFC set to  0.000000
3/29/2012	4:08:40 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:08:40 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:08:41 PM	Tube furnace set to 200
3/29/2012	4:09:11 PM	H2 valve closed
3/29/2012	4:09:11 PM	BCl3 valve closed
3/29/2012	4:09:11 PM	PH3 valve closed
3/29/2012	4:09:11 PM	SiCl4 pre valve closed
3/29/2012	4:09:11 PM	SiCl4 post valve closed
3/29/2012	4:09:11 PM	Bypass valve closed
3/29/2012	4:09:11 PM	Bubbler valve closed
3/29/2012	4:09:11 PM	Helium valve opened
3/29/2012	4:09:11 PM	Main Vac valve opened
3/29/2012	4:09:11 PM	Helium MFC set to  20.000000
3/29/2012	4:09:11 PM	H2 MFC set to  0.000000
3/29/2012	4:09:11 PM	BCl3 MFC set to  0.000000
3/29/2012	4:09:11 PM	PH3 MFC set to  0.000000
3/29/2012	4:09:11 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:09:11 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:09:11 PM	Tube furnace set to 200
3/29/2012	4:09:41 PM	Helium valve closed
3/29/2012	4:09:41 PM	H2 valve closed
3/29/2012	4:09:41 PM	BCl3 valve closed
3/29/2012	4:09:41 PM	PH3 valve closed
3/29/2012	4:09:41 PM	SiCl4 pre valve closed
3/29/2012	4:09:41 PM	SiCl4 post valve closed
3/29/2012	4:09:41 PM	Bypass valve closed
3/29/2012	4:09:41 PM	Bubbler valve closed
3/29/2012	4:09:41 PM	Main Vac valve opened
3/29/2012	4:09:41 PM	Helium MFC set to  0.000000
3/29/2012	4:09:41 PM	H2 MFC set to  0.000000
3/29/2012	4:09:41 PM	BCl3 MFC set to  0.000000
3/29/2012	4:09:41 PM	PH3 MFC set to  0.000000
3/29/2012	4:09:41 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:09:41 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:09:41 PM	Tube furnace set to 200
3/29/2012	4:10:11 PM	H2 valve closed
3/29/2012	4:10:11 PM	BCl3 valve closed
3/29/2012	4:10:11 PM	PH3 valve closed
3/29/2012	4:10:11 PM	SiCl4 pre valve closed
3/29/2012	4:10:11 PM	SiCl4 post valve closed
3/29/2012	4:10:11 PM	Bypass valve closed
3/29/2012	4:10:11 PM	Bubbler valve closed
3/29/2012	4:10:11 PM	Helium valve opened
3/29/2012	4:10:11 PM	Main Vac valve opened
3/29/2012	4:10:11 PM	Helium MFC set to  20.000000
3/29/2012	4:10:11 PM	H2 MFC set to  0.000000
3/29/2012	4:10:11 PM	BCl3 MFC set to  0.000000
3/29/2012	4:10:11 PM	PH3 MFC set to  0.000000
3/29/2012	4:10:11 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:10:11 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:10:11 PM	Tube furnace set to 200
3/29/2012	4:10:41 PM	Helium valve closed
3/29/2012	4:10:41 PM	H2 valve closed
3/29/2012	4:10:41 PM	BCl3 valve closed
3/29/2012	4:10:41 PM	PH3 valve closed
3/29/2012	4:10:41 PM	SiCl4 pre valve closed
3/29/2012	4:10:41 PM	SiCl4 post valve closed
3/29/2012	4:10:41 PM	Bypass valve closed
3/29/2012	4:10:41 PM	Bubbler valve closed
3/29/2012	4:10:41 PM	Main Vac valve opened
3/29/2012	4:10:41 PM	Helium MFC set to  0.000000
3/29/2012	4:10:41 PM	H2 MFC set to  0.000000
3/29/2012	4:10:41 PM	BCl3 MFC set to  0.000000
3/29/2012	4:10:41 PM	PH3 MFC set to  0.000000
3/29/2012	4:10:41 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:10:41 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:10:41 PM	Tube furnace set to 200
3/29/2012	4:11:11 PM	H2 valve closed
3/29/2012	4:11:11 PM	BCl3 valve closed
3/29/2012	4:11:12 PM	PH3 valve closed
3/29/2012	4:11:12 PM	SiCl4 pre valve closed
3/29/2012	4:11:12 PM	SiCl4 post valve closed
3/29/2012	4:11:12 PM	Bypass valve closed
3/29/2012	4:11:12 PM	Bubbler valve closed
3/29/2012	4:11:12 PM	Helium valve opened
3/29/2012	4:11:12 PM	Main Vac valve opened
3/29/2012	4:11:12 PM	Helium MFC set to  20.000000
3/29/2012	4:11:12 PM	H2 MFC set to  0.000000
3/29/2012	4:11:12 PM	BCl3 MFC set to  0.000000
3/29/2012	4:11:12 PM	PH3 MFC set to  0.000000
3/29/2012	4:11:12 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:11:12 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:11:12 PM	Tube furnace set to 200
3/29/2012	4:11:42 PM	Helium valve closed
3/29/2012	4:11:42 PM	H2 valve closed
3/29/2012	4:11:42 PM	BCl3 valve closed
3/29/2012	4:11:42 PM	PH3 valve closed
3/29/2012	4:11:42 PM	SiCl4 pre valve closed
3/29/2012	4:11:42 PM	SiCl4 post valve closed
3/29/2012	4:11:42 PM	Bypass valve closed
3/29/2012	4:11:42 PM	Bubbler valve closed
3/29/2012	4:11:42 PM	Main Vac valve opened
3/29/2012	4:11:42 PM	Helium MFC set to  0.000000
3/29/2012	4:11:42 PM	H2 MFC set to  0.000000
3/29/2012	4:11:42 PM	BCl3 MFC set to  0.000000
3/29/2012	4:11:42 PM	PH3 MFC set to  0.000000
3/29/2012	4:11:42 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:11:42 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:11:42 PM	Tube furnace set to 200
3/29/2012	4:12:12 PM	H2 valve closed
3/29/2012	4:12:12 PM	BCl3 valve closed
3/29/2012	4:12:12 PM	PH3 valve closed
3/29/2012	4:12:12 PM	SiCl4 pre valve closed
3/29/2012	4:12:12 PM	SiCl4 post valve closed
3/29/2012	4:12:12 PM	Bypass valve closed
3/29/2012	4:12:12 PM	Bubbler valve closed
3/29/2012	4:12:12 PM	Helium valve opened
3/29/2012	4:12:12 PM	Main Vac valve opened
3/29/2012	4:12:12 PM	Helium MFC set to  20.000000
3/29/2012	4:12:12 PM	H2 MFC set to  0.000000
3/29/2012	4:12:12 PM	BCl3 MFC set to  0.000000
3/29/2012	4:12:12 PM	PH3 MFC set to  0.000000
3/29/2012	4:12:12 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:12:12 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:12:12 PM	Tube furnace set to 200
3/29/2012	4:12:42 PM	Helium valve closed
3/29/2012	4:12:42 PM	H2 valve closed
3/29/2012	4:12:42 PM	BCl3 valve closed
3/29/2012	4:12:42 PM	PH3 valve closed
3/29/2012	4:12:42 PM	SiCl4 pre valve closed
3/29/2012	4:12:42 PM	SiCl4 post valve closed
3/29/2012	4:12:42 PM	Bypass valve closed
3/29/2012	4:12:42 PM	Bubbler valve closed
3/29/2012	4:12:42 PM	Main Vac valve opened
3/29/2012	4:12:42 PM	Helium MFC set to  0.000000
3/29/2012	4:12:42 PM	H2 MFC set to  0.000000
3/29/2012	4:12:42 PM	BCl3 MFC set to  0.000000
3/29/2012	4:12:42 PM	PH3 MFC set to  0.000000
3/29/2012	4:12:42 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:12:42 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:12:42 PM	Tube furnace set to 200
3/29/2012	4:12:43 PM	Run finished at 4:12 PM
3/29/2012	4:13:53 PM	Main Vac valve closed
3/29/2012	4:14:11 PM	Main Vac valve opened
3/29/2012	4:14:20 PM	Recipe started at 4:14 PM
3/29/2012	4:14:20 PM	Helium valve closed
3/29/2012	4:14:20 PM	H2 valve closed
3/29/2012	4:14:20 PM	BCl3 valve closed
3/29/2012	4:14:20 PM	PH3 valve closed
3/29/2012	4:14:20 PM	SiCl4 pre valve closed
3/29/2012	4:14:20 PM	SiCl4 post valve closed
3/29/2012	4:14:20 PM	Bypass valve closed
3/29/2012	4:14:20 PM	Bubbler valve closed
3/29/2012	4:14:20 PM	Main Vac valve opened
3/29/2012	4:14:20 PM	Helium MFC set to  0.000000
3/29/2012	4:14:20 PM	H2 MFC set to  0.000000
3/29/2012	4:14:20 PM	BCl3 MFC set to  0.000000
3/29/2012	4:14:20 PM	PH3 MFC set to  0.000000
3/29/2012	4:14:20 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:14:20 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:14:21 PM	Tube furnace set to 200
3/29/2012	4:14:21 PM	H2 valve closed
3/29/2012	4:14:21 PM	BCl3 valve closed
3/29/2012	4:14:21 PM	PH3 valve closed
3/29/2012	4:14:21 PM	SiCl4 pre valve closed
3/29/2012	4:14:21 PM	SiCl4 post valve closed
3/29/2012	4:14:21 PM	Bypass valve closed
3/29/2012	4:14:21 PM	Bubbler valve closed
3/29/2012	4:14:21 PM	Helium valve opened
3/29/2012	4:14:21 PM	Main Vac valve opened
3/29/2012	4:14:21 PM	Helium MFC set to  20.000000
3/29/2012	4:14:21 PM	H2 MFC set to  0.000000
3/29/2012	4:14:21 PM	BCl3 MFC set to  0.000000
3/29/2012	4:14:21 PM	PH3 MFC set to  0.000000
3/29/2012	4:14:21 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:14:21 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:14:21 PM	Tube furnace set to 200
3/29/2012	4:14:51 PM	Helium valve closed
3/29/2012	4:14:51 PM	H2 valve closed
3/29/2012	4:14:51 PM	BCl3 valve closed
3/29/2012	4:14:51 PM	PH3 valve closed
3/29/2012	4:14:51 PM	SiCl4 pre valve closed
3/29/2012	4:14:51 PM	SiCl4 post valve closed
3/29/2012	4:14:51 PM	Bypass valve closed
3/29/2012	4:14:51 PM	Bubbler valve closed
3/29/2012	4:14:51 PM	Main Vac valve opened
3/29/2012	4:14:51 PM	Helium MFC set to  0.000000
3/29/2012	4:14:51 PM	H2 MFC set to  0.000000
3/29/2012	4:14:51 PM	BCl3 MFC set to  0.000000
3/29/2012	4:14:51 PM	PH3 MFC set to  0.000000
3/29/2012	4:14:51 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:14:51 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:14:51 PM	Tube furnace set to 200
3/29/2012	4:15:21 PM	H2 valve closed
3/29/2012	4:15:21 PM	BCl3 valve closed
3/29/2012	4:15:21 PM	PH3 valve closed
3/29/2012	4:15:21 PM	SiCl4 pre valve closed
3/29/2012	4:15:21 PM	SiCl4 post valve closed
3/29/2012	4:15:21 PM	Bypass valve closed
3/29/2012	4:15:21 PM	Bubbler valve closed
3/29/2012	4:15:21 PM	Helium valve opened
3/29/2012	4:15:21 PM	Main Vac valve opened
3/29/2012	4:15:21 PM	Helium MFC set to  20.000000
3/29/2012	4:15:21 PM	H2 MFC set to  0.000000
3/29/2012	4:15:21 PM	BCl3 MFC set to  0.000000
3/29/2012	4:15:21 PM	PH3 MFC set to  0.000000
3/29/2012	4:15:21 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:15:21 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:15:22 PM	Tube furnace set to 200
3/29/2012	4:15:52 PM	Helium valve closed
3/29/2012	4:15:52 PM	H2 valve closed
3/29/2012	4:15:52 PM	BCl3 valve closed
3/29/2012	4:15:52 PM	PH3 valve closed
3/29/2012	4:15:52 PM	SiCl4 pre valve closed
3/29/2012	4:15:52 PM	SiCl4 post valve closed
3/29/2012	4:15:52 PM	Bypass valve closed
3/29/2012	4:15:52 PM	Bubbler valve closed
3/29/2012	4:15:52 PM	Main Vac valve opened
3/29/2012	4:15:52 PM	Helium MFC set to  0.000000
3/29/2012	4:15:52 PM	H2 MFC set to  0.000000
3/29/2012	4:15:52 PM	BCl3 MFC set to  0.000000
3/29/2012	4:15:52 PM	PH3 MFC set to  0.000000
3/29/2012	4:15:52 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:15:52 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:15:52 PM	Tube furnace set to 200
3/29/2012	4:16:22 PM	H2 valve closed
3/29/2012	4:16:22 PM	BCl3 valve closed
3/29/2012	4:16:22 PM	PH3 valve closed
3/29/2012	4:16:22 PM	SiCl4 pre valve closed
3/29/2012	4:16:22 PM	SiCl4 post valve closed
3/29/2012	4:16:22 PM	Bypass valve closed
3/29/2012	4:16:22 PM	Bubbler valve closed
3/29/2012	4:16:22 PM	Helium valve opened
3/29/2012	4:16:22 PM	Main Vac valve opened
3/29/2012	4:16:22 PM	Helium MFC set to  20.000000
3/29/2012	4:16:22 PM	H2 MFC set to  0.000000
3/29/2012	4:16:22 PM	BCl3 MFC set to  0.000000
3/29/2012	4:16:22 PM	PH3 MFC set to  0.000000
3/29/2012	4:16:22 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:16:22 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:16:22 PM	Tube furnace set to 200
3/29/2012	4:16:52 PM	Helium valve closed
3/29/2012	4:16:52 PM	H2 valve closed
3/29/2012	4:16:52 PM	BCl3 valve closed
3/29/2012	4:16:52 PM	PH3 valve closed
3/29/2012	4:16:52 PM	SiCl4 pre valve closed
3/29/2012	4:16:52 PM	SiCl4 post valve closed
3/29/2012	4:16:52 PM	Bypass valve closed
3/29/2012	4:16:52 PM	Bubbler valve closed
3/29/2012	4:16:52 PM	Main Vac valve opened
3/29/2012	4:16:52 PM	Helium MFC set to  0.000000
3/29/2012	4:16:52 PM	H2 MFC set to  0.000000
3/29/2012	4:16:52 PM	BCl3 MFC set to  0.000000
3/29/2012	4:16:52 PM	PH3 MFC set to  0.000000
3/29/2012	4:16:52 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:16:52 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:16:52 PM	Tube furnace set to 200
3/29/2012	4:17:22 PM	H2 valve closed
3/29/2012	4:17:22 PM	BCl3 valve closed
3/29/2012	4:17:22 PM	PH3 valve closed
3/29/2012	4:17:22 PM	SiCl4 pre valve closed
3/29/2012	4:17:22 PM	SiCl4 post valve closed
3/29/2012	4:17:22 PM	Bypass valve closed
3/29/2012	4:17:22 PM	Bubbler valve closed
3/29/2012	4:17:22 PM	Helium valve opened
3/29/2012	4:17:22 PM	Main Vac valve opened
3/29/2012	4:17:22 PM	Helium MFC set to  20.000000
3/29/2012	4:17:22 PM	H2 MFC set to  0.000000
3/29/2012	4:17:22 PM	BCl3 MFC set to  0.000000
3/29/2012	4:17:22 PM	PH3 MFC set to  0.000000
3/29/2012	4:17:22 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:17:22 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:17:23 PM	Tube furnace set to 200
3/29/2012	4:17:53 PM	Helium valve closed
3/29/2012	4:17:53 PM	H2 valve closed
3/29/2012	4:17:53 PM	BCl3 valve closed
3/29/2012	4:17:53 PM	PH3 valve closed
3/29/2012	4:17:53 PM	SiCl4 pre valve closed
3/29/2012	4:17:53 PM	SiCl4 post valve closed
3/29/2012	4:17:53 PM	Bypass valve closed
3/29/2012	4:17:53 PM	Bubbler valve closed
3/29/2012	4:17:53 PM	Main Vac valve opened
3/29/2012	4:17:53 PM	Helium MFC set to  0.000000
3/29/2012	4:17:53 PM	H2 MFC set to  0.000000
3/29/2012	4:17:53 PM	BCl3 MFC set to  0.000000
3/29/2012	4:17:53 PM	PH3 MFC set to  0.000000
3/29/2012	4:17:53 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:17:53 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:17:53 PM	Tube furnace set to 200
3/29/2012	4:18:23 PM	H2 valve closed
3/29/2012	4:18:23 PM	BCl3 valve closed
3/29/2012	4:18:23 PM	PH3 valve closed
3/29/2012	4:18:23 PM	SiCl4 pre valve closed
3/29/2012	4:18:23 PM	SiCl4 post valve closed
3/29/2012	4:18:23 PM	Bypass valve closed
3/29/2012	4:18:23 PM	Bubbler valve closed
3/29/2012	4:18:23 PM	Helium valve opened
3/29/2012	4:18:23 PM	Main Vac valve opened
3/29/2012	4:18:23 PM	Helium MFC set to  20.000000
3/29/2012	4:18:23 PM	H2 MFC set to  0.000000
3/29/2012	4:18:23 PM	BCl3 MFC set to  0.000000
3/29/2012	4:18:23 PM	PH3 MFC set to  0.000000
3/29/2012	4:18:23 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:18:23 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:18:23 PM	Tube furnace set to 200
3/29/2012	4:18:53 PM	Helium valve closed
3/29/2012	4:18:53 PM	H2 valve closed
3/29/2012	4:18:53 PM	BCl3 valve closed
3/29/2012	4:18:53 PM	PH3 valve closed
3/29/2012	4:18:53 PM	SiCl4 pre valve closed
3/29/2012	4:18:53 PM	SiCl4 post valve closed
3/29/2012	4:18:53 PM	Bypass valve closed
3/29/2012	4:18:53 PM	Bubbler valve closed
3/29/2012	4:18:53 PM	Main Vac valve opened
3/29/2012	4:18:53 PM	Helium MFC set to  0.000000
3/29/2012	4:18:53 PM	H2 MFC set to  0.000000
3/29/2012	4:18:53 PM	BCl3 MFC set to  0.000000
3/29/2012	4:18:53 PM	PH3 MFC set to  0.000000
3/29/2012	4:18:53 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:18:53 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:18:53 PM	Tube furnace set to 200
3/29/2012	4:19:23 PM	H2 valve closed
3/29/2012	4:19:23 PM	BCl3 valve closed
3/29/2012	4:19:23 PM	PH3 valve closed
3/29/2012	4:19:23 PM	SiCl4 pre valve closed
3/29/2012	4:19:23 PM	SiCl4 post valve closed
3/29/2012	4:19:23 PM	Bypass valve closed
3/29/2012	4:19:23 PM	Bubbler valve closed
3/29/2012	4:19:23 PM	Helium valve opened
3/29/2012	4:19:23 PM	Main Vac valve opened
3/29/2012	4:19:23 PM	Helium MFC set to  20.000000
3/29/2012	4:19:23 PM	H2 MFC set to  0.000000
3/29/2012	4:19:23 PM	BCl3 MFC set to  0.000000
3/29/2012	4:19:23 PM	PH3 MFC set to  0.000000
3/29/2012	4:19:23 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:19:23 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:19:23 PM	Tube furnace set to 200
3/29/2012	4:19:53 PM	Helium valve closed
3/29/2012	4:19:53 PM	H2 valve closed
3/29/2012	4:19:53 PM	BCl3 valve closed
3/29/2012	4:19:54 PM	PH3 valve closed
3/29/2012	4:19:54 PM	SiCl4 pre valve closed
3/29/2012	4:19:54 PM	SiCl4 post valve closed
3/29/2012	4:19:54 PM	Bypass valve closed
3/29/2012	4:19:54 PM	Bubbler valve closed
3/29/2012	4:19:54 PM	Main Vac valve opened
3/29/2012	4:19:54 PM	Helium MFC set to  0.000000
3/29/2012	4:19:54 PM	H2 MFC set to  0.000000
3/29/2012	4:19:54 PM	BCl3 MFC set to  0.000000
3/29/2012	4:19:54 PM	PH3 MFC set to  0.000000
3/29/2012	4:19:54 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:19:54 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:19:54 PM	Tube furnace set to 200
3/29/2012	4:20:24 PM	H2 valve closed
3/29/2012	4:20:24 PM	BCl3 valve closed
3/29/2012	4:20:24 PM	PH3 valve closed
3/29/2012	4:20:24 PM	SiCl4 pre valve closed
3/29/2012	4:20:24 PM	SiCl4 post valve closed
3/29/2012	4:20:24 PM	Bypass valve closed
3/29/2012	4:20:24 PM	Bubbler valve closed
3/29/2012	4:20:24 PM	Helium valve opened
3/29/2012	4:20:24 PM	Main Vac valve opened
3/29/2012	4:20:24 PM	Helium MFC set to  20.000000
3/29/2012	4:20:24 PM	H2 MFC set to  0.000000
3/29/2012	4:20:24 PM	BCl3 MFC set to  0.000000
3/29/2012	4:20:24 PM	PH3 MFC set to  0.000000
3/29/2012	4:20:24 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:20:24 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:20:24 PM	Tube furnace set to 200
3/29/2012	4:20:54 PM	Helium valve closed
3/29/2012	4:20:54 PM	H2 valve closed
3/29/2012	4:20:54 PM	BCl3 valve closed
3/29/2012	4:20:54 PM	PH3 valve closed
3/29/2012	4:20:54 PM	SiCl4 pre valve closed
3/29/2012	4:20:54 PM	SiCl4 post valve closed
3/29/2012	4:20:54 PM	Bypass valve closed
3/29/2012	4:20:54 PM	Bubbler valve closed
3/29/2012	4:20:54 PM	Main Vac valve opened
3/29/2012	4:20:54 PM	Helium MFC set to  0.000000
3/29/2012	4:20:54 PM	H2 MFC set to  0.000000
3/29/2012	4:20:54 PM	BCl3 MFC set to  0.000000
3/29/2012	4:20:54 PM	PH3 MFC set to  0.000000
3/29/2012	4:20:54 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:20:54 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:20:54 PM	Tube furnace set to 200
3/29/2012	4:21:24 PM	H2 valve closed
3/29/2012	4:21:24 PM	BCl3 valve closed
3/29/2012	4:21:24 PM	PH3 valve closed
3/29/2012	4:21:24 PM	SiCl4 pre valve closed
3/29/2012	4:21:24 PM	SiCl4 post valve closed
3/29/2012	4:21:24 PM	Bypass valve closed
3/29/2012	4:21:24 PM	Bubbler valve closed
3/29/2012	4:21:24 PM	Helium valve opened
3/29/2012	4:21:24 PM	Main Vac valve opened
3/29/2012	4:21:24 PM	Helium MFC set to  20.000000
3/29/2012	4:21:24 PM	H2 MFC set to  0.000000
3/29/2012	4:21:24 PM	BCl3 MFC set to  0.000000
3/29/2012	4:21:24 PM	PH3 MFC set to  0.000000
3/29/2012	4:21:24 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:21:24 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:21:24 PM	Tube furnace set to 200
3/29/2012	4:21:54 PM	Helium valve closed
3/29/2012	4:21:54 PM	H2 valve closed
3/29/2012	4:21:54 PM	BCl3 valve closed
3/29/2012	4:21:54 PM	PH3 valve closed
3/29/2012	4:21:54 PM	SiCl4 pre valve closed
3/29/2012	4:21:54 PM	SiCl4 post valve closed
3/29/2012	4:21:54 PM	Bypass valve closed
3/29/2012	4:21:54 PM	Bubbler valve closed
3/29/2012	4:21:54 PM	Main Vac valve opened
3/29/2012	4:21:54 PM	Helium MFC set to  0.000000
3/29/2012	4:21:54 PM	H2 MFC set to  0.000000
3/29/2012	4:21:54 PM	BCl3 MFC set to  0.000000
3/29/2012	4:21:54 PM	PH3 MFC set to  0.000000
3/29/2012	4:21:54 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:21:54 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:21:55 PM	Tube furnace set to 200
3/29/2012	4:22:25 PM	H2 valve closed
3/29/2012	4:22:25 PM	BCl3 valve closed
3/29/2012	4:22:25 PM	PH3 valve closed
3/29/2012	4:22:25 PM	SiCl4 pre valve closed
3/29/2012	4:22:25 PM	SiCl4 post valve closed
3/29/2012	4:22:25 PM	Bypass valve closed
3/29/2012	4:22:25 PM	Bubbler valve closed
3/29/2012	4:22:25 PM	Helium valve opened
3/29/2012	4:22:25 PM	Main Vac valve opened
3/29/2012	4:22:25 PM	Helium MFC set to  20.000000
3/29/2012	4:22:25 PM	H2 MFC set to  0.000000
3/29/2012	4:22:25 PM	BCl3 MFC set to  0.000000
3/29/2012	4:22:25 PM	PH3 MFC set to  0.000000
3/29/2012	4:22:25 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:22:25 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:22:25 PM	Tube furnace set to 200
3/29/2012	4:22:55 PM	Helium valve closed
3/29/2012	4:22:55 PM	H2 valve closed
3/29/2012	4:22:55 PM	BCl3 valve closed
3/29/2012	4:22:55 PM	PH3 valve closed
3/29/2012	4:22:55 PM	SiCl4 pre valve closed
3/29/2012	4:22:55 PM	SiCl4 post valve closed
3/29/2012	4:22:55 PM	Bypass valve closed
3/29/2012	4:22:55 PM	Bubbler valve closed
3/29/2012	4:22:55 PM	Main Vac valve opened
3/29/2012	4:22:55 PM	Helium MFC set to  0.000000
3/29/2012	4:22:55 PM	H2 MFC set to  0.000000
3/29/2012	4:22:55 PM	BCl3 MFC set to  0.000000
3/29/2012	4:22:55 PM	PH3 MFC set to  0.000000
3/29/2012	4:22:55 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:22:55 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:22:55 PM	Tube furnace set to 200
3/29/2012	4:23:25 PM	H2 valve closed
3/29/2012	4:23:25 PM	BCl3 valve closed
3/29/2012	4:23:25 PM	PH3 valve closed
3/29/2012	4:23:25 PM	SiCl4 pre valve closed
3/29/2012	4:23:25 PM	SiCl4 post valve closed
3/29/2012	4:23:25 PM	Bypass valve closed
3/29/2012	4:23:25 PM	Bubbler valve closed
3/29/2012	4:23:25 PM	Helium valve opened
3/29/2012	4:23:25 PM	Main Vac valve opened
3/29/2012	4:23:25 PM	Helium MFC set to  20.000000
3/29/2012	4:23:25 PM	H2 MFC set to  0.000000
3/29/2012	4:23:25 PM	BCl3 MFC set to  0.000000
3/29/2012	4:23:25 PM	PH3 MFC set to  0.000000
3/29/2012	4:23:25 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:23:25 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:23:25 PM	Tube furnace set to 200
3/29/2012	4:23:55 PM	Helium valve closed
3/29/2012	4:23:55 PM	H2 valve closed
3/29/2012	4:23:55 PM	BCl3 valve closed
3/29/2012	4:23:55 PM	PH3 valve closed
3/29/2012	4:23:55 PM	SiCl4 pre valve closed
3/29/2012	4:23:55 PM	SiCl4 post valve closed
3/29/2012	4:23:55 PM	Bypass valve closed
3/29/2012	4:23:55 PM	Bubbler valve closed
3/29/2012	4:23:55 PM	Main Vac valve opened
3/29/2012	4:23:55 PM	Helium MFC set to  0.000000
3/29/2012	4:23:55 PM	H2 MFC set to  0.000000
3/29/2012	4:23:55 PM	BCl3 MFC set to  0.000000
3/29/2012	4:23:55 PM	PH3 MFC set to  0.000000
3/29/2012	4:23:55 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:23:55 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:23:56 PM	Tube furnace set to 200
3/29/2012	4:23:57 PM	Run finished at 4:23 PM
3/29/2012	4:24:36 PM	Main Vac valve closed
3/29/2012	4:24:56 PM	Main Vac valve opened
3/29/2012	4:25:59 PM	Recipe started at 4:25 PM
3/29/2012	4:25:59 PM	Helium valve closed
3/29/2012	4:25:59 PM	H2 valve closed
3/29/2012	4:25:59 PM	BCl3 valve closed
3/29/2012	4:25:59 PM	PH3 valve closed
3/29/2012	4:25:59 PM	SiCl4 pre valve closed
3/29/2012	4:25:59 PM	SiCl4 post valve closed
3/29/2012	4:25:59 PM	Main Vac valve closed
3/29/2012	4:25:59 PM	Bypass valve closed
3/29/2012	4:25:59 PM	Bubbler valve closed
3/29/2012	4:25:59 PM	Helium MFC set to  0.000000
3/29/2012	4:25:59 PM	H2 MFC set to  0.000000
3/29/2012	4:25:59 PM	BCl3 MFC set to  0.000000
3/29/2012	4:25:59 PM	PH3 MFC set to  0.000000
3/29/2012	4:25:59 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:25:59 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:25:59 PM	Tube furnace set to 0
3/29/2012	4:26:02 PM	Helium valve closed
3/29/2012	4:26:02 PM	BCl3 valve closed
3/29/2012	4:26:02 PM	PH3 valve closed
3/29/2012	4:26:02 PM	SiCl4 pre valve closed
3/29/2012	4:26:02 PM	SiCl4 post valve closed
3/29/2012	4:26:02 PM	Main Vac valve closed
3/29/2012	4:26:02 PM	Bypass valve closed
3/29/2012	4:26:02 PM	Bubbler valve closed
3/29/2012	4:26:02 PM	H2 valve opened
3/29/2012	4:26:02 PM	Helium MFC set to  0.000000
3/29/2012	4:26:02 PM	H2 MFC set to  500.000000
3/29/2012	4:26:02 PM	BCl3 MFC set to  0.000000
3/29/2012	4:26:02 PM	PH3 MFC set to  0.000000
3/29/2012	4:26:02 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:26:02 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:26:02 PM	Tube furnace set to 0
3/29/2012	4:27:05 PM	Helium valve closed
3/29/2012	4:27:05 PM	BCl3 valve closed
3/29/2012	4:27:05 PM	PH3 valve closed
3/29/2012	4:27:05 PM	SiCl4 pre valve closed
3/29/2012	4:27:05 PM	SiCl4 post valve closed
3/29/2012	4:27:05 PM	Main Vac valve closed
3/29/2012	4:27:05 PM	Bypass valve closed
3/29/2012	4:27:05 PM	H2 valve opened
3/29/2012	4:27:05 PM	Bubbler valve opened
3/29/2012	4:27:05 PM	Helium MFC set to  0.000000
3/29/2012	4:27:05 PM	H2 MFC set to  500.000000
3/29/2012	4:27:05 PM	BCl3 MFC set to  0.000000
3/29/2012	4:27:05 PM	PH3 MFC set to  0.000000
3/29/2012	4:27:05 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:27:05 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:27:05 PM	Tube furnace set to 0
3/29/2012	4:27:06 PM	Helium valve closed
3/29/2012	4:27:06 PM	BCl3 valve closed
3/29/2012	4:27:06 PM	PH3 valve closed
3/29/2012	4:27:06 PM	SiCl4 pre valve closed
3/29/2012	4:27:06 PM	SiCl4 post valve closed
3/29/2012	4:27:06 PM	Main Vac valve closed
3/29/2012	4:27:06 PM	Bypass valve closed
3/29/2012	4:27:06 PM	H2 valve opened
3/29/2012	4:27:06 PM	Bubbler valve opened
3/29/2012	4:27:06 PM	Helium MFC set to  0.000000
3/29/2012	4:27:06 PM	H2 MFC set to  450.000000
3/29/2012	4:27:06 PM	BCl3 MFC set to  0.000000
3/29/2012	4:27:06 PM	PH3 MFC set to  0.000000
3/29/2012	4:27:06 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:27:06 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:27:06 PM	Tube furnace set to 1000
3/29/2012	4:52:06 PM	Helium valve closed
3/29/2012	4:52:06 PM	PH3 valve closed
3/29/2012	4:52:06 PM	Main Vac valve closed
3/29/2012	4:52:06 PM	Bypass valve closed
3/29/2012	4:52:06 PM	H2 valve opened
3/29/2012	4:52:06 PM	BCl3 valve opened
3/29/2012	4:52:06 PM	SiCl4 pre valve opened
3/29/2012	4:52:06 PM	SiCl4 post valve opened
3/29/2012	4:52:06 PM	Bubbler valve opened
3/29/2012	4:52:06 PM	Helium MFC set to  0.000000
3/29/2012	4:52:06 PM	H2 MFC set to  450.000000
3/29/2012	4:52:06 PM	BCl3 MFC set to  1.500000
3/29/2012	4:52:06 PM	PH3 MFC set to  0.000000
3/29/2012	4:52:06 PM	SiCl4 MFC set to  50.000000
3/29/2012	4:52:06 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:52:06 PM	Tube furnace set to 1000
3/29/2012	4:57:06 PM	Helium valve closed
3/29/2012	4:57:06 PM	BCl3 valve closed
3/29/2012	4:57:06 PM	PH3 valve closed
3/29/2012	4:57:06 PM	SiCl4 pre valve closed
3/29/2012	4:57:06 PM	SiCl4 post valve closed
3/29/2012	4:57:06 PM	Main Vac valve closed
3/29/2012	4:57:06 PM	Bypass valve closed
3/29/2012	4:57:06 PM	H2 valve opened
3/29/2012	4:57:06 PM	Bubbler valve opened
3/29/2012	4:57:06 PM	Helium MFC set to  0.000000
3/29/2012	4:57:06 PM	H2 MFC set to  500.000000
3/29/2012	4:57:06 PM	BCl3 MFC set to  0.000000
3/29/2012	4:57:06 PM	PH3 MFC set to  0.000000
3/29/2012	4:57:06 PM	SiCl4 MFC set to  0.000000
3/29/2012	4:57:06 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	4:57:07 PM	Tube furnace set to 750
3/29/2012	5:02:07 PM	H2 valve closed
3/29/2012	5:02:07 PM	BCl3 valve closed
3/29/2012	5:02:07 PM	PH3 valve closed
3/29/2012	5:02:07 PM	SiCl4 pre valve closed
3/29/2012	5:02:07 PM	SiCl4 post valve closed
3/29/2012	5:02:07 PM	Main Vac valve closed
3/29/2012	5:02:07 PM	Bypass valve closed
3/29/2012	5:02:07 PM	Helium valve opened
3/29/2012	5:02:07 PM	Bubbler valve opened
3/29/2012	5:02:07 PM	Helium MFC set to  500.000000
3/29/2012	5:02:07 PM	H2 MFC set to  0.000000
3/29/2012	5:02:07 PM	BCl3 MFC set to  0.000000
3/29/2012	5:02:07 PM	PH3 MFC set to  0.000000
3/29/2012	5:02:07 PM	SiCl4 MFC set to  0.000000
3/29/2012	5:02:07 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	5:02:07 PM	Tube furnace set to 0
3/29/2012	5:22:07 PM	Helium valve closed
3/29/2012	5:22:07 PM	H2 valve closed
3/29/2012	5:22:07 PM	BCl3 valve closed
3/29/2012	5:22:07 PM	PH3 valve closed
3/29/2012	5:22:07 PM	SiCl4 pre valve closed
3/29/2012	5:22:07 PM	SiCl4 post valve closed
3/29/2012	5:22:07 PM	Main Vac valve closed
3/29/2012	5:22:07 PM	Bypass valve closed
3/29/2012	5:22:07 PM	Bubbler valve closed
3/29/2012	5:22:07 PM	Helium MFC set to  0.000000
3/29/2012	5:22:07 PM	H2 MFC set to  0.000000
3/29/2012	5:22:07 PM	BCl3 MFC set to  0.000000
3/29/2012	5:22:07 PM	PH3 MFC set to  0.000000
3/29/2012	5:22:07 PM	SiCl4 MFC set to  0.000000
3/29/2012	5:22:07 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	5:22:07 PM	Tube furnace set to 0
3/29/2012	5:22:08 PM	Run finished at 5:22 PM
3/29/2012	6:16:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2012	6:16:30 PM	Recipe started at 6:16 PM
3/29/2012	6:16:30 PM	Helium valve closed
3/29/2012	6:16:30 PM	H2 valve closed
3/29/2012	6:16:30 PM	BCl3 valve closed
3/29/2012	6:16:30 PM	PH3 valve closed
3/29/2012	6:16:30 PM	SiCl4 pre valve closed
3/29/2012	6:16:30 PM	SiCl4 post valve closed
3/29/2012	6:16:30 PM	Main Vac valve closed
3/29/2012	6:16:30 PM	Bypass valve closed
3/29/2012	6:16:30 PM	Bubbler valve closed
3/29/2012	6:16:30 PM	Helium MFC set to  0.000000
3/29/2012	6:16:30 PM	H2 MFC set to  0.000000
3/29/2012	6:16:30 PM	BCl3 MFC set to  0.000000
3/29/2012	6:16:30 PM	PH3 MFC set to  0.000000
3/29/2012	6:16:30 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:16:30 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:16:30 PM	Tube furnace set to 0
3/29/2012	6:16:33 PM	H2 valve closed
3/29/2012	6:16:33 PM	BCl3 valve closed
3/29/2012	6:16:33 PM	PH3 valve closed
3/29/2012	6:16:33 PM	SiCl4 pre valve closed
3/29/2012	6:16:33 PM	SiCl4 post valve closed
3/29/2012	6:16:33 PM	Main Vac valve closed
3/29/2012	6:16:33 PM	Bypass valve closed
3/29/2012	6:16:33 PM	Bubbler valve closed
3/29/2012	6:16:33 PM	Helium valve opened
3/29/2012	6:16:33 PM	Helium MFC set to  500.000000
3/29/2012	6:16:33 PM	H2 MFC set to  0.000000
3/29/2012	6:16:33 PM	BCl3 MFC set to  0.000000
3/29/2012	6:16:33 PM	PH3 MFC set to  0.000000
3/29/2012	6:16:33 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:16:33 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:16:33 PM	Tube furnace set to 0
3/29/2012	6:16:35 PM	Helium valve closed
3/29/2012	6:16:35 PM	H2 valve closed
3/29/2012	6:16:35 PM	BCl3 valve closed
3/29/2012	6:16:35 PM	PH3 valve closed
3/29/2012	6:16:35 PM	SiCl4 pre valve closed
3/29/2012	6:16:35 PM	SiCl4 post valve closed
3/29/2012	6:16:35 PM	Main Vac valve closed
3/29/2012	6:16:35 PM	Bypass valve closed
3/29/2012	6:16:35 PM	Bubbler valve closed
3/29/2012	6:16:35 PM	Helium MFC set to  0.000000
3/29/2012	6:16:35 PM	H2 MFC set to  0.000000
3/29/2012	6:16:35 PM	BCl3 MFC set to  0.000000
3/29/2012	6:16:35 PM	PH3 MFC set to  0.000000
3/29/2012	6:16:35 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:16:35 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:16:36 PM	Tube furnace set to 0
3/29/2012	6:16:37 PM	Run finished at 6:16 PM
3/29/2012	6:16:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2012	6:17:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2012	6:17:00 PM	Recipe started at 6:17 PM
3/29/2012	6:17:00 PM	Helium valve closed
3/29/2012	6:17:00 PM	H2 valve closed
3/29/2012	6:17:00 PM	BCl3 valve closed
3/29/2012	6:17:00 PM	PH3 valve closed
3/29/2012	6:17:00 PM	SiCl4 pre valve closed
3/29/2012	6:17:00 PM	SiCl4 post valve closed
3/29/2012	6:17:00 PM	Main Vac valve closed
3/29/2012	6:17:00 PM	Bypass valve closed
3/29/2012	6:17:00 PM	Bubbler valve closed
3/29/2012	6:17:00 PM	Helium MFC set to  0.000000
3/29/2012	6:17:00 PM	H2 MFC set to  0.000000
3/29/2012	6:17:00 PM	BCl3 MFC set to  0.000000
3/29/2012	6:17:00 PM	PH3 MFC set to  0.000000
3/29/2012	6:17:00 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:17:00 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:17:01 PM	Tube furnace set to 0
3/29/2012	6:17:04 PM	H2 valve closed
3/29/2012	6:17:04 PM	BCl3 valve closed
3/29/2012	6:17:04 PM	PH3 valve closed
3/29/2012	6:17:04 PM	SiCl4 pre valve closed
3/29/2012	6:17:04 PM	SiCl4 post valve closed
3/29/2012	6:17:04 PM	Main Vac valve closed
3/29/2012	6:17:04 PM	Bypass valve closed
3/29/2012	6:17:04 PM	Bubbler valve closed
3/29/2012	6:17:04 PM	Helium valve opened
3/29/2012	6:17:04 PM	Helium MFC set to  500.000000
3/29/2012	6:17:04 PM	H2 MFC set to  0.000000
3/29/2012	6:17:04 PM	BCl3 MFC set to  0.000000
3/29/2012	6:17:04 PM	PH3 MFC set to  0.000000
3/29/2012	6:17:04 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:17:04 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:17:04 PM	Tube furnace set to 0
3/29/2012	6:17:04 PM	Helium valve closed
3/29/2012	6:17:04 PM	H2 valve closed
3/29/2012	6:17:04 PM	BCl3 valve closed
3/29/2012	6:17:04 PM	PH3 valve closed
3/29/2012	6:17:04 PM	SiCl4 pre valve closed
3/29/2012	6:17:04 PM	SiCl4 post valve closed
3/29/2012	6:17:04 PM	Main Vac valve closed
3/29/2012	6:17:04 PM	Bypass valve closed
3/29/2012	6:17:04 PM	Bubbler valve closed
3/29/2012	6:17:04 PM	Helium MFC set to  0.000000
3/29/2012	6:17:04 PM	H2 MFC set to  0.000000
3/29/2012	6:17:04 PM	BCl3 MFC set to  0.000000
3/29/2012	6:17:04 PM	PH3 MFC set to  0.000000
3/29/2012	6:17:04 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:17:04 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:17:05 PM	Tube furnace set to 0
3/29/2012	6:17:06 PM	Run finished at 6:17 PM
3/29/2012	6:17:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2012	6:22:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2012	6:22:25 PM	Recipe started at 6:22 PM
3/29/2012	6:22:25 PM	Helium valve closed
3/29/2012	6:22:25 PM	H2 valve closed
3/29/2012	6:22:25 PM	BCl3 valve closed
3/29/2012	6:22:25 PM	PH3 valve closed
3/29/2012	6:22:25 PM	SiCl4 pre valve closed
3/29/2012	6:22:25 PM	SiCl4 post valve closed
3/29/2012	6:22:25 PM	Main Vac valve closed
3/29/2012	6:22:25 PM	Bubbler valve closed
3/29/2012	6:22:25 PM	Bypass valve opened
3/29/2012	6:22:25 PM	Helium MFC set to  0.000000
3/29/2012	6:22:25 PM	H2 MFC set to  0.000000
3/29/2012	6:22:25 PM	BCl3 MFC set to  0.000000
3/29/2012	6:22:25 PM	PH3 MFC set to  0.000000
3/29/2012	6:22:25 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:22:25 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:22:26 PM	Tube furnace set to 0
3/29/2012	6:23:27 PM	Helium valve closed
3/29/2012	6:23:27 PM	H2 valve closed
3/29/2012	6:23:27 PM	BCl3 valve closed
3/29/2012	6:23:27 PM	PH3 valve closed
3/29/2012	6:23:27 PM	SiCl4 pre valve closed
3/29/2012	6:23:27 PM	SiCl4 post valve closed
3/29/2012	6:23:27 PM	Main Vac valve closed
3/29/2012	6:23:27 PM	Bubbler valve closed
3/29/2012	6:23:27 PM	Bypass valve opened
3/29/2012	6:23:27 PM	Helium MFC set to  0.000000
3/29/2012	6:23:27 PM	H2 MFC set to  0.000000
3/29/2012	6:23:27 PM	BCl3 MFC set to  0.000000
3/29/2012	6:23:27 PM	PH3 MFC set to  0.000000
3/29/2012	6:23:27 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:23:27 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:23:27 PM	Tube furnace set to 0
3/29/2012	6:24:27 PM	Helium valve closed
3/29/2012	6:24:27 PM	H2 valve closed
3/29/2012	6:24:27 PM	BCl3 valve closed
3/29/2012	6:24:27 PM	PH3 valve closed
3/29/2012	6:24:27 PM	SiCl4 pre valve closed
3/29/2012	6:24:27 PM	SiCl4 post valve closed
3/29/2012	6:24:27 PM	Bypass valve closed
3/29/2012	6:24:27 PM	Bubbler valve closed
3/29/2012	6:24:27 PM	Main Vac valve opened
3/29/2012	6:24:27 PM	Helium MFC set to  0.000000
3/29/2012	6:24:27 PM	H2 MFC set to  0.000000
3/29/2012	6:24:27 PM	BCl3 MFC set to  0.000000
3/29/2012	6:24:27 PM	PH3 MFC set to  0.000000
3/29/2012	6:24:27 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:24:27 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:24:27 PM	Tube furnace set to 0
3/29/2012	6:24:28 PM	Run finished at 6:24 PM
3/29/2012	6:24:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2012	6:31:56 PM	Recipe started at 6:31 PM
3/29/2012	6:31:57 PM	Helium valve closed
3/29/2012	6:31:57 PM	H2 valve closed
3/29/2012	6:31:57 PM	BCl3 valve closed
3/29/2012	6:31:57 PM	PH3 valve closed
3/29/2012	6:31:57 PM	SiCl4 pre valve closed
3/29/2012	6:31:57 PM	SiCl4 post valve closed
3/29/2012	6:31:57 PM	Bypass valve closed
3/29/2012	6:31:57 PM	Bubbler valve closed
3/29/2012	6:31:57 PM	Main Vac valve opened
3/29/2012	6:31:57 PM	Helium MFC set to  0.000000
3/29/2012	6:31:57 PM	H2 MFC set to  0.000000
3/29/2012	6:31:57 PM	BCl3 MFC set to  0.000000
3/29/2012	6:31:57 PM	PH3 MFC set to  0.000000
3/29/2012	6:31:57 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:31:57 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:31:57 PM	Tube furnace set to 150
3/29/2012	6:32:11 PM	H2 valve closed
3/29/2012	6:32:11 PM	BCl3 valve closed
3/29/2012	6:32:11 PM	PH3 valve closed
3/29/2012	6:32:11 PM	SiCl4 pre valve closed
3/29/2012	6:32:11 PM	SiCl4 post valve closed
3/29/2012	6:32:11 PM	Bypass valve closed
3/29/2012	6:32:11 PM	Bubbler valve closed
3/29/2012	6:32:11 PM	Helium valve opened
3/29/2012	6:32:11 PM	Main Vac valve opened
3/29/2012	6:32:11 PM	Helium MFC set to  20.000000
3/29/2012	6:32:11 PM	H2 MFC set to  0.000000
3/29/2012	6:32:11 PM	BCl3 MFC set to  0.000000
3/29/2012	6:32:11 PM	PH3 MFC set to  0.000000
3/29/2012	6:32:11 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:32:11 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:32:11 PM	Tube furnace set to 150
3/29/2012	6:32:41 PM	Helium valve closed
3/29/2012	6:32:41 PM	H2 valve closed
3/29/2012	6:32:41 PM	BCl3 valve closed
3/29/2012	6:32:41 PM	PH3 valve closed
3/29/2012	6:32:41 PM	SiCl4 pre valve closed
3/29/2012	6:32:41 PM	SiCl4 post valve closed
3/29/2012	6:32:41 PM	Bypass valve closed
3/29/2012	6:32:41 PM	Bubbler valve closed
3/29/2012	6:32:41 PM	Main Vac valve opened
3/29/2012	6:32:41 PM	Helium MFC set to  0.000000
3/29/2012	6:32:41 PM	H2 MFC set to  0.000000
3/29/2012	6:32:41 PM	BCl3 MFC set to  0.000000
3/29/2012	6:32:41 PM	PH3 MFC set to  0.000000
3/29/2012	6:32:41 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:32:41 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:32:41 PM	Tube furnace set to 150
3/29/2012	6:33:11 PM	H2 valve closed
3/29/2012	6:33:11 PM	BCl3 valve closed
3/29/2012	6:33:11 PM	PH3 valve closed
3/29/2012	6:33:11 PM	SiCl4 pre valve closed
3/29/2012	6:33:11 PM	SiCl4 post valve closed
3/29/2012	6:33:11 PM	Bypass valve closed
3/29/2012	6:33:11 PM	Bubbler valve closed
3/29/2012	6:33:11 PM	Helium valve opened
3/29/2012	6:33:11 PM	Main Vac valve opened
3/29/2012	6:33:11 PM	Helium MFC set to  20.000000
3/29/2012	6:33:11 PM	H2 MFC set to  0.000000
3/29/2012	6:33:11 PM	BCl3 MFC set to  0.000000
3/29/2012	6:33:11 PM	PH3 MFC set to  0.000000
3/29/2012	6:33:11 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:33:11 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:33:11 PM	Tube furnace set to 150
3/29/2012	6:33:41 PM	Helium valve closed
3/29/2012	6:33:41 PM	H2 valve closed
3/29/2012	6:33:41 PM	BCl3 valve closed
3/29/2012	6:33:41 PM	PH3 valve closed
3/29/2012	6:33:41 PM	SiCl4 pre valve closed
3/29/2012	6:33:41 PM	SiCl4 post valve closed
3/29/2012	6:33:41 PM	Bypass valve closed
3/29/2012	6:33:41 PM	Bubbler valve closed
3/29/2012	6:33:41 PM	Main Vac valve opened
3/29/2012	6:33:41 PM	Helium MFC set to  0.000000
3/29/2012	6:33:41 PM	H2 MFC set to  0.000000
3/29/2012	6:33:41 PM	BCl3 MFC set to  0.000000
3/29/2012	6:33:41 PM	PH3 MFC set to  0.000000
3/29/2012	6:33:41 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:33:41 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:33:41 PM	Tube furnace set to 150
3/29/2012	6:34:11 PM	H2 valve closed
3/29/2012	6:34:11 PM	BCl3 valve closed
3/29/2012	6:34:11 PM	PH3 valve closed
3/29/2012	6:34:11 PM	SiCl4 pre valve closed
3/29/2012	6:34:11 PM	SiCl4 post valve closed
3/29/2012	6:34:11 PM	Bypass valve closed
3/29/2012	6:34:11 PM	Bubbler valve closed
3/29/2012	6:34:11 PM	Helium valve opened
3/29/2012	6:34:11 PM	Main Vac valve opened
3/29/2012	6:34:11 PM	Helium MFC set to  20.000000
3/29/2012	6:34:11 PM	H2 MFC set to  0.000000
3/29/2012	6:34:11 PM	BCl3 MFC set to  0.000000
3/29/2012	6:34:12 PM	PH3 MFC set to  0.000000
3/29/2012	6:34:12 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:34:12 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:34:12 PM	Tube furnace set to 150
3/29/2012	6:34:42 PM	Helium valve closed
3/29/2012	6:34:42 PM	H2 valve closed
3/29/2012	6:34:42 PM	BCl3 valve closed
3/29/2012	6:34:42 PM	PH3 valve closed
3/29/2012	6:34:42 PM	SiCl4 pre valve closed
3/29/2012	6:34:42 PM	SiCl4 post valve closed
3/29/2012	6:34:42 PM	Bypass valve closed
3/29/2012	6:34:42 PM	Bubbler valve closed
3/29/2012	6:34:42 PM	Main Vac valve opened
3/29/2012	6:34:42 PM	Helium MFC set to  0.000000
3/29/2012	6:34:42 PM	H2 MFC set to  0.000000
3/29/2012	6:34:42 PM	BCl3 MFC set to  0.000000
3/29/2012	6:34:42 PM	PH3 MFC set to  0.000000
3/29/2012	6:34:42 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:34:42 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:34:42 PM	Tube furnace set to 150
3/29/2012	6:35:12 PM	H2 valve closed
3/29/2012	6:35:12 PM	BCl3 valve closed
3/29/2012	6:35:12 PM	PH3 valve closed
3/29/2012	6:35:12 PM	SiCl4 pre valve closed
3/29/2012	6:35:12 PM	SiCl4 post valve closed
3/29/2012	6:35:12 PM	Bypass valve closed
3/29/2012	6:35:12 PM	Bubbler valve closed
3/29/2012	6:35:12 PM	Helium valve opened
3/29/2012	6:35:12 PM	Main Vac valve opened
3/29/2012	6:35:12 PM	Helium MFC set to  20.000000
3/29/2012	6:35:12 PM	H2 MFC set to  0.000000
3/29/2012	6:35:12 PM	BCl3 MFC set to  0.000000
3/29/2012	6:35:12 PM	PH3 MFC set to  0.000000
3/29/2012	6:35:12 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:35:12 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:35:12 PM	Tube furnace set to 150
3/29/2012	6:35:42 PM	Helium valve closed
3/29/2012	6:35:42 PM	H2 valve closed
3/29/2012	6:35:42 PM	BCl3 valve closed
3/29/2012	6:35:42 PM	PH3 valve closed
3/29/2012	6:35:42 PM	SiCl4 pre valve closed
3/29/2012	6:35:42 PM	SiCl4 post valve closed
3/29/2012	6:35:42 PM	Bypass valve closed
3/29/2012	6:35:42 PM	Bubbler valve closed
3/29/2012	6:35:42 PM	Main Vac valve opened
3/29/2012	6:35:42 PM	Helium MFC set to  0.000000
3/29/2012	6:35:42 PM	H2 MFC set to  0.000000
3/29/2012	6:35:42 PM	BCl3 MFC set to  0.000000
3/29/2012	6:35:42 PM	PH3 MFC set to  0.000000
3/29/2012	6:35:42 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:35:42 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:35:42 PM	Tube furnace set to 150
3/29/2012	6:36:12 PM	H2 valve closed
3/29/2012	6:36:12 PM	BCl3 valve closed
3/29/2012	6:36:12 PM	PH3 valve closed
3/29/2012	6:36:12 PM	SiCl4 pre valve closed
3/29/2012	6:36:12 PM	SiCl4 post valve closed
3/29/2012	6:36:12 PM	Bypass valve closed
3/29/2012	6:36:12 PM	Bubbler valve closed
3/29/2012	6:36:12 PM	Helium valve opened
3/29/2012	6:36:12 PM	Main Vac valve opened
3/29/2012	6:36:12 PM	Helium MFC set to  20.000000
3/29/2012	6:36:12 PM	H2 MFC set to  0.000000
3/29/2012	6:36:12 PM	BCl3 MFC set to  0.000000
3/29/2012	6:36:12 PM	PH3 MFC set to  0.000000
3/29/2012	6:36:12 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:36:12 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:36:13 PM	Tube furnace set to 150
3/29/2012	6:36:43 PM	Helium valve closed
3/29/2012	6:36:43 PM	H2 valve closed
3/29/2012	6:36:43 PM	BCl3 valve closed
3/29/2012	6:36:43 PM	PH3 valve closed
3/29/2012	6:36:43 PM	SiCl4 pre valve closed
3/29/2012	6:36:43 PM	SiCl4 post valve closed
3/29/2012	6:36:43 PM	Bypass valve closed
3/29/2012	6:36:43 PM	Bubbler valve closed
3/29/2012	6:36:43 PM	Main Vac valve opened
3/29/2012	6:36:43 PM	Helium MFC set to  0.000000
3/29/2012	6:36:43 PM	H2 MFC set to  0.000000
3/29/2012	6:36:43 PM	BCl3 MFC set to  0.000000
3/29/2012	6:36:43 PM	PH3 MFC set to  0.000000
3/29/2012	6:36:43 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:36:43 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:36:43 PM	Tube furnace set to 150
3/29/2012	6:37:13 PM	H2 valve closed
3/29/2012	6:37:13 PM	BCl3 valve closed
3/29/2012	6:37:13 PM	PH3 valve closed
3/29/2012	6:37:13 PM	SiCl4 pre valve closed
3/29/2012	6:37:13 PM	SiCl4 post valve closed
3/29/2012	6:37:13 PM	Bypass valve closed
3/29/2012	6:37:13 PM	Bubbler valve closed
3/29/2012	6:37:13 PM	Helium valve opened
3/29/2012	6:37:13 PM	Main Vac valve opened
3/29/2012	6:37:13 PM	Helium MFC set to  20.000000
3/29/2012	6:37:13 PM	H2 MFC set to  0.000000
3/29/2012	6:37:13 PM	BCl3 MFC set to  0.000000
3/29/2012	6:37:13 PM	PH3 MFC set to  0.000000
3/29/2012	6:37:13 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:37:13 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:37:13 PM	Tube furnace set to 150
3/29/2012	6:37:43 PM	Helium valve closed
3/29/2012	6:37:43 PM	H2 valve closed
3/29/2012	6:37:43 PM	BCl3 valve closed
3/29/2012	6:37:43 PM	PH3 valve closed
3/29/2012	6:37:43 PM	SiCl4 pre valve closed
3/29/2012	6:37:43 PM	SiCl4 post valve closed
3/29/2012	6:37:43 PM	Bypass valve closed
3/29/2012	6:37:43 PM	Bubbler valve closed
3/29/2012	6:37:43 PM	Main Vac valve opened
3/29/2012	6:37:43 PM	Helium MFC set to  0.000000
3/29/2012	6:37:43 PM	H2 MFC set to  0.000000
3/29/2012	6:37:43 PM	BCl3 MFC set to  0.000000
3/29/2012	6:37:43 PM	PH3 MFC set to  0.000000
3/29/2012	6:37:43 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:37:43 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:37:43 PM	Tube furnace set to 150
3/29/2012	6:38:13 PM	H2 valve closed
3/29/2012	6:38:13 PM	BCl3 valve closed
3/29/2012	6:38:13 PM	PH3 valve closed
3/29/2012	6:38:13 PM	SiCl4 pre valve closed
3/29/2012	6:38:13 PM	SiCl4 post valve closed
3/29/2012	6:38:13 PM	Bypass valve closed
3/29/2012	6:38:13 PM	Bubbler valve closed
3/29/2012	6:38:13 PM	Helium valve opened
3/29/2012	6:38:13 PM	Main Vac valve opened
3/29/2012	6:38:13 PM	Helium MFC set to  20.000000
3/29/2012	6:38:13 PM	H2 MFC set to  0.000000
3/29/2012	6:38:13 PM	BCl3 MFC set to  0.000000
3/29/2012	6:38:13 PM	PH3 MFC set to  0.000000
3/29/2012	6:38:13 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:38:13 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:38:14 PM	Tube furnace set to 150
3/29/2012	6:38:44 PM	Helium valve closed
3/29/2012	6:38:44 PM	H2 valve closed
3/29/2012	6:38:44 PM	BCl3 valve closed
3/29/2012	6:38:44 PM	PH3 valve closed
3/29/2012	6:38:44 PM	SiCl4 pre valve closed
3/29/2012	6:38:44 PM	SiCl4 post valve closed
3/29/2012	6:38:44 PM	Bypass valve closed
3/29/2012	6:38:44 PM	Bubbler valve closed
3/29/2012	6:38:44 PM	Main Vac valve opened
3/29/2012	6:38:44 PM	Helium MFC set to  0.000000
3/29/2012	6:38:44 PM	H2 MFC set to  0.000000
3/29/2012	6:38:44 PM	BCl3 MFC set to  0.000000
3/29/2012	6:38:44 PM	PH3 MFC set to  0.000000
3/29/2012	6:38:44 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:38:44 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:38:44 PM	Tube furnace set to 150
3/29/2012	6:39:14 PM	H2 valve closed
3/29/2012	6:39:14 PM	BCl3 valve closed
3/29/2012	6:39:14 PM	PH3 valve closed
3/29/2012	6:39:14 PM	SiCl4 pre valve closed
3/29/2012	6:39:14 PM	SiCl4 post valve closed
3/29/2012	6:39:14 PM	Bypass valve closed
3/29/2012	6:39:14 PM	Bubbler valve closed
3/29/2012	6:39:14 PM	Helium valve opened
3/29/2012	6:39:14 PM	Main Vac valve opened
3/29/2012	6:39:14 PM	Helium MFC set to  20.000000
3/29/2012	6:39:14 PM	H2 MFC set to  0.000000
3/29/2012	6:39:14 PM	BCl3 MFC set to  0.000000
3/29/2012	6:39:14 PM	PH3 MFC set to  0.000000
3/29/2012	6:39:14 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:39:14 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:39:14 PM	Tube furnace set to 150
3/29/2012	6:39:44 PM	Helium valve closed
3/29/2012	6:39:44 PM	H2 valve closed
3/29/2012	6:39:44 PM	BCl3 valve closed
3/29/2012	6:39:44 PM	PH3 valve closed
3/29/2012	6:39:44 PM	SiCl4 pre valve closed
3/29/2012	6:39:44 PM	SiCl4 post valve closed
3/29/2012	6:39:44 PM	Bypass valve closed
3/29/2012	6:39:44 PM	Bubbler valve closed
3/29/2012	6:39:44 PM	Main Vac valve opened
3/29/2012	6:39:44 PM	Helium MFC set to  0.000000
3/29/2012	6:39:44 PM	H2 MFC set to  0.000000
3/29/2012	6:39:44 PM	BCl3 MFC set to  0.000000
3/29/2012	6:39:44 PM	PH3 MFC set to  0.000000
3/29/2012	6:39:44 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:39:44 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:39:44 PM	Tube furnace set to 150
3/29/2012	6:40:14 PM	H2 valve closed
3/29/2012	6:40:14 PM	BCl3 valve closed
3/29/2012	6:40:14 PM	PH3 valve closed
3/29/2012	6:40:14 PM	SiCl4 pre valve closed
3/29/2012	6:40:14 PM	SiCl4 post valve closed
3/29/2012	6:40:14 PM	Bypass valve closed
3/29/2012	6:40:14 PM	Bubbler valve closed
3/29/2012	6:40:14 PM	Helium valve opened
3/29/2012	6:40:14 PM	Main Vac valve opened
3/29/2012	6:40:14 PM	Helium MFC set to  20.000000
3/29/2012	6:40:14 PM	H2 MFC set to  0.000000
3/29/2012	6:40:14 PM	BCl3 MFC set to  0.000000
3/29/2012	6:40:14 PM	PH3 MFC set to  0.000000
3/29/2012	6:40:14 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:40:14 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:40:14 PM	Tube furnace set to 150
3/29/2012	6:40:45 PM	Helium valve closed
3/29/2012	6:40:45 PM	H2 valve closed
3/29/2012	6:40:45 PM	BCl3 valve closed
3/29/2012	6:40:45 PM	PH3 valve closed
3/29/2012	6:40:45 PM	SiCl4 pre valve closed
3/29/2012	6:40:45 PM	SiCl4 post valve closed
3/29/2012	6:40:45 PM	Bypass valve closed
3/29/2012	6:40:45 PM	Bubbler valve closed
3/29/2012	6:40:45 PM	Main Vac valve opened
3/29/2012	6:40:45 PM	Helium MFC set to  0.000000
3/29/2012	6:40:45 PM	H2 MFC set to  0.000000
3/29/2012	6:40:45 PM	BCl3 MFC set to  0.000000
3/29/2012	6:40:45 PM	PH3 MFC set to  0.000000
3/29/2012	6:40:45 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:40:45 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:40:45 PM	Tube furnace set to 150
3/29/2012	6:41:15 PM	H2 valve closed
3/29/2012	6:41:15 PM	BCl3 valve closed
3/29/2012	6:41:15 PM	PH3 valve closed
3/29/2012	6:41:15 PM	SiCl4 pre valve closed
3/29/2012	6:41:15 PM	SiCl4 post valve closed
3/29/2012	6:41:15 PM	Bypass valve closed
3/29/2012	6:41:15 PM	Bubbler valve closed
3/29/2012	6:41:15 PM	Helium valve opened
3/29/2012	6:41:15 PM	Main Vac valve opened
3/29/2012	6:41:15 PM	Helium MFC set to  20.000000
3/29/2012	6:41:15 PM	H2 MFC set to  0.000000
3/29/2012	6:41:15 PM	BCl3 MFC set to  0.000000
3/29/2012	6:41:15 PM	PH3 MFC set to  0.000000
3/29/2012	6:41:15 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:41:15 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:41:15 PM	Tube furnace set to 150
3/29/2012	6:41:45 PM	Helium valve closed
3/29/2012	6:41:45 PM	H2 valve closed
3/29/2012	6:41:45 PM	BCl3 valve closed
3/29/2012	6:41:45 PM	PH3 valve closed
3/29/2012	6:41:45 PM	SiCl4 pre valve closed
3/29/2012	6:41:45 PM	SiCl4 post valve closed
3/29/2012	6:41:45 PM	Bypass valve closed
3/29/2012	6:41:45 PM	Bubbler valve closed
3/29/2012	6:41:45 PM	Main Vac valve opened
3/29/2012	6:41:45 PM	Helium MFC set to  0.000000
3/29/2012	6:41:45 PM	H2 MFC set to  0.000000
3/29/2012	6:41:45 PM	BCl3 MFC set to  0.000000
3/29/2012	6:41:45 PM	PH3 MFC set to  0.000000
3/29/2012	6:41:45 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:41:45 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:41:45 PM	Tube furnace set to 150
3/29/2012	6:41:46 PM	Run finished at 6:41 PM
3/29/2012	6:42:02 PM	Recipe started at 6:41 PM
3/29/2012	6:42:02 PM	Helium valve closed
3/29/2012	6:42:02 PM	H2 valve closed
3/29/2012	6:42:02 PM	BCl3 valve closed
3/29/2012	6:42:02 PM	PH3 valve closed
3/29/2012	6:42:02 PM	SiCl4 pre valve closed
3/29/2012	6:42:02 PM	SiCl4 post valve closed
3/29/2012	6:42:02 PM	Bypass valve closed
3/29/2012	6:42:02 PM	Bubbler valve closed
3/29/2012	6:42:02 PM	Main Vac valve opened
3/29/2012	6:42:02 PM	Helium MFC set to  0.000000
3/29/2012	6:42:02 PM	H2 MFC set to  0.000000
3/29/2012	6:42:02 PM	BCl3 MFC set to  0.000000
3/29/2012	6:42:02 PM	PH3 MFC set to  0.000000
3/29/2012	6:42:02 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:42:02 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:42:02 PM	Tube furnace set to 150
3/29/2012	6:42:32 PM	H2 valve closed
3/29/2012	6:42:32 PM	BCl3 valve closed
3/29/2012	6:42:32 PM	PH3 valve closed
3/29/2012	6:42:32 PM	SiCl4 pre valve closed
3/29/2012	6:42:32 PM	SiCl4 post valve closed
3/29/2012	6:42:32 PM	Bypass valve closed
3/29/2012	6:42:32 PM	Bubbler valve closed
3/29/2012	6:42:32 PM	Helium valve opened
3/29/2012	6:42:32 PM	Main Vac valve opened
3/29/2012	6:42:32 PM	Helium MFC set to  20.000000
3/29/2012	6:42:32 PM	H2 MFC set to  0.000000
3/29/2012	6:42:32 PM	BCl3 MFC set to  0.000000
3/29/2012	6:42:32 PM	PH3 MFC set to  0.000000
3/29/2012	6:42:32 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:42:33 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:42:33 PM	Tube furnace set to 150
3/29/2012	6:43:03 PM	Helium valve closed
3/29/2012	6:43:03 PM	H2 valve closed
3/29/2012	6:43:03 PM	BCl3 valve closed
3/29/2012	6:43:03 PM	PH3 valve closed
3/29/2012	6:43:03 PM	SiCl4 pre valve closed
3/29/2012	6:43:03 PM	SiCl4 post valve closed
3/29/2012	6:43:03 PM	Bypass valve closed
3/29/2012	6:43:03 PM	Bubbler valve closed
3/29/2012	6:43:03 PM	Main Vac valve opened
3/29/2012	6:43:03 PM	Helium MFC set to  0.000000
3/29/2012	6:43:03 PM	H2 MFC set to  0.000000
3/29/2012	6:43:03 PM	BCl3 MFC set to  0.000000
3/29/2012	6:43:03 PM	PH3 MFC set to  0.000000
3/29/2012	6:43:03 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:43:03 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:43:03 PM	Tube furnace set to 150
3/29/2012	6:43:33 PM	H2 valve closed
3/29/2012	6:43:33 PM	BCl3 valve closed
3/29/2012	6:43:33 PM	PH3 valve closed
3/29/2012	6:43:33 PM	SiCl4 pre valve closed
3/29/2012	6:43:33 PM	SiCl4 post valve closed
3/29/2012	6:43:33 PM	Bypass valve closed
3/29/2012	6:43:33 PM	Bubbler valve closed
3/29/2012	6:43:33 PM	Helium valve opened
3/29/2012	6:43:33 PM	Main Vac valve opened
3/29/2012	6:43:33 PM	Helium MFC set to  20.000000
3/29/2012	6:43:33 PM	H2 MFC set to  0.000000
3/29/2012	6:43:33 PM	BCl3 MFC set to  0.000000
3/29/2012	6:43:33 PM	PH3 MFC set to  0.000000
3/29/2012	6:43:33 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:43:33 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:43:33 PM	Tube furnace set to 150
3/29/2012	6:44:03 PM	Helium valve closed
3/29/2012	6:44:03 PM	H2 valve closed
3/29/2012	6:44:03 PM	BCl3 valve closed
3/29/2012	6:44:03 PM	PH3 valve closed
3/29/2012	6:44:03 PM	SiCl4 pre valve closed
3/29/2012	6:44:03 PM	SiCl4 post valve closed
3/29/2012	6:44:03 PM	Bypass valve closed
3/29/2012	6:44:03 PM	Bubbler valve closed
3/29/2012	6:44:03 PM	Main Vac valve opened
3/29/2012	6:44:03 PM	Helium MFC set to  0.000000
3/29/2012	6:44:03 PM	H2 MFC set to  0.000000
3/29/2012	6:44:03 PM	BCl3 MFC set to  0.000000
3/29/2012	6:44:03 PM	PH3 MFC set to  0.000000
3/29/2012	6:44:03 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:44:03 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:44:03 PM	Tube furnace set to 150
3/29/2012	6:44:33 PM	H2 valve closed
3/29/2012	6:44:33 PM	BCl3 valve closed
3/29/2012	6:44:33 PM	PH3 valve closed
3/29/2012	6:44:33 PM	SiCl4 pre valve closed
3/29/2012	6:44:33 PM	SiCl4 post valve closed
3/29/2012	6:44:33 PM	Bypass valve closed
3/29/2012	6:44:33 PM	Bubbler valve closed
3/29/2012	6:44:33 PM	Helium valve opened
3/29/2012	6:44:33 PM	Main Vac valve opened
3/29/2012	6:44:33 PM	Helium MFC set to  20.000000
3/29/2012	6:44:33 PM	H2 MFC set to  0.000000
3/29/2012	6:44:33 PM	BCl3 MFC set to  0.000000
3/29/2012	6:44:33 PM	PH3 MFC set to  0.000000
3/29/2012	6:44:33 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:44:33 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:44:34 PM	Tube furnace set to 150
3/29/2012	6:45:04 PM	Helium valve closed
3/29/2012	6:45:04 PM	H2 valve closed
3/29/2012	6:45:04 PM	BCl3 valve closed
3/29/2012	6:45:04 PM	PH3 valve closed
3/29/2012	6:45:04 PM	SiCl4 pre valve closed
3/29/2012	6:45:04 PM	SiCl4 post valve closed
3/29/2012	6:45:04 PM	Bypass valve closed
3/29/2012	6:45:04 PM	Bubbler valve closed
3/29/2012	6:45:04 PM	Main Vac valve opened
3/29/2012	6:45:04 PM	Helium MFC set to  0.000000
3/29/2012	6:45:04 PM	H2 MFC set to  0.000000
3/29/2012	6:45:04 PM	BCl3 MFC set to  0.000000
3/29/2012	6:45:04 PM	PH3 MFC set to  0.000000
3/29/2012	6:45:04 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:45:04 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:45:04 PM	Tube furnace set to 150
3/29/2012	6:45:34 PM	H2 valve closed
3/29/2012	6:45:34 PM	BCl3 valve closed
3/29/2012	6:45:34 PM	PH3 valve closed
3/29/2012	6:45:34 PM	SiCl4 pre valve closed
3/29/2012	6:45:34 PM	SiCl4 post valve closed
3/29/2012	6:45:34 PM	Bypass valve closed
3/29/2012	6:45:34 PM	Bubbler valve closed
3/29/2012	6:45:34 PM	Helium valve opened
3/29/2012	6:45:34 PM	Main Vac valve opened
3/29/2012	6:45:34 PM	Helium MFC set to  20.000000
3/29/2012	6:45:34 PM	H2 MFC set to  0.000000
3/29/2012	6:45:34 PM	BCl3 MFC set to  0.000000
3/29/2012	6:45:34 PM	PH3 MFC set to  0.000000
3/29/2012	6:45:34 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:45:34 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:45:34 PM	Tube furnace set to 150
3/29/2012	6:46:04 PM	Helium valve closed
3/29/2012	6:46:04 PM	H2 valve closed
3/29/2012	6:46:04 PM	BCl3 valve closed
3/29/2012	6:46:04 PM	PH3 valve closed
3/29/2012	6:46:04 PM	SiCl4 pre valve closed
3/29/2012	6:46:04 PM	SiCl4 post valve closed
3/29/2012	6:46:04 PM	Bypass valve closed
3/29/2012	6:46:04 PM	Bubbler valve closed
3/29/2012	6:46:04 PM	Main Vac valve opened
3/29/2012	6:46:04 PM	Helium MFC set to  0.000000
3/29/2012	6:46:04 PM	H2 MFC set to  0.000000
3/29/2012	6:46:04 PM	BCl3 MFC set to  0.000000
3/29/2012	6:46:04 PM	PH3 MFC set to  0.000000
3/29/2012	6:46:04 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:46:04 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:46:04 PM	Tube furnace set to 150
3/29/2012	6:46:34 PM	H2 valve closed
3/29/2012	6:46:34 PM	BCl3 valve closed
3/29/2012	6:46:34 PM	PH3 valve closed
3/29/2012	6:46:34 PM	SiCl4 pre valve closed
3/29/2012	6:46:34 PM	SiCl4 post valve closed
3/29/2012	6:46:34 PM	Bypass valve closed
3/29/2012	6:46:34 PM	Bubbler valve closed
3/29/2012	6:46:34 PM	Helium valve opened
3/29/2012	6:46:34 PM	Main Vac valve opened
3/29/2012	6:46:34 PM	Helium MFC set to  20.000000
3/29/2012	6:46:34 PM	H2 MFC set to  0.000000
3/29/2012	6:46:34 PM	BCl3 MFC set to  0.000000
3/29/2012	6:46:34 PM	PH3 MFC set to  0.000000
3/29/2012	6:46:34 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:46:34 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:46:35 PM	Tube furnace set to 150
3/29/2012	6:47:05 PM	Helium valve closed
3/29/2012	6:47:05 PM	H2 valve closed
3/29/2012	6:47:05 PM	BCl3 valve closed
3/29/2012	6:47:05 PM	PH3 valve closed
3/29/2012	6:47:05 PM	SiCl4 pre valve closed
3/29/2012	6:47:05 PM	SiCl4 post valve closed
3/29/2012	6:47:05 PM	Bypass valve closed
3/29/2012	6:47:05 PM	Bubbler valve closed
3/29/2012	6:47:05 PM	Main Vac valve opened
3/29/2012	6:47:05 PM	Helium MFC set to  0.000000
3/29/2012	6:47:05 PM	H2 MFC set to  0.000000
3/29/2012	6:47:05 PM	BCl3 MFC set to  0.000000
3/29/2012	6:47:05 PM	PH3 MFC set to  0.000000
3/29/2012	6:47:05 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:47:05 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:47:05 PM	Tube furnace set to 150
3/29/2012	6:47:35 PM	H2 valve closed
3/29/2012	6:47:35 PM	BCl3 valve closed
3/29/2012	6:47:35 PM	PH3 valve closed
3/29/2012	6:47:35 PM	SiCl4 pre valve closed
3/29/2012	6:47:35 PM	SiCl4 post valve closed
3/29/2012	6:47:35 PM	Bypass valve closed
3/29/2012	6:47:35 PM	Bubbler valve closed
3/29/2012	6:47:35 PM	Helium valve opened
3/29/2012	6:47:35 PM	Main Vac valve opened
3/29/2012	6:47:35 PM	Helium MFC set to  20.000000
3/29/2012	6:47:35 PM	H2 MFC set to  0.000000
3/29/2012	6:47:35 PM	BCl3 MFC set to  0.000000
3/29/2012	6:47:35 PM	PH3 MFC set to  0.000000
3/29/2012	6:47:35 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:47:35 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:47:35 PM	Tube furnace set to 150
3/29/2012	6:48:05 PM	Helium valve closed
3/29/2012	6:48:05 PM	H2 valve closed
3/29/2012	6:48:05 PM	BCl3 valve closed
3/29/2012	6:48:05 PM	PH3 valve closed
3/29/2012	6:48:05 PM	SiCl4 pre valve closed
3/29/2012	6:48:05 PM	SiCl4 post valve closed
3/29/2012	6:48:05 PM	Bypass valve closed
3/29/2012	6:48:05 PM	Bubbler valve closed
3/29/2012	6:48:05 PM	Main Vac valve opened
3/29/2012	6:48:05 PM	Helium MFC set to  0.000000
3/29/2012	6:48:05 PM	H2 MFC set to  0.000000
3/29/2012	6:48:05 PM	BCl3 MFC set to  0.000000
3/29/2012	6:48:05 PM	PH3 MFC set to  0.000000
3/29/2012	6:48:05 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:48:05 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:48:05 PM	Tube furnace set to 150
3/29/2012	6:48:35 PM	H2 valve closed
3/29/2012	6:48:35 PM	BCl3 valve closed
3/29/2012	6:48:35 PM	PH3 valve closed
3/29/2012	6:48:35 PM	SiCl4 pre valve closed
3/29/2012	6:48:35 PM	SiCl4 post valve closed
3/29/2012	6:48:35 PM	Bypass valve closed
3/29/2012	6:48:35 PM	Bubbler valve closed
3/29/2012	6:48:35 PM	Helium valve opened
3/29/2012	6:48:35 PM	Main Vac valve opened
3/29/2012	6:48:35 PM	Helium MFC set to  20.000000
3/29/2012	6:48:35 PM	H2 MFC set to  0.000000
3/29/2012	6:48:35 PM	BCl3 MFC set to  0.000000
3/29/2012	6:48:35 PM	PH3 MFC set to  0.000000
3/29/2012	6:48:35 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:48:35 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:48:35 PM	Tube furnace set to 150
3/29/2012	6:49:05 PM	Helium valve closed
3/29/2012	6:49:05 PM	H2 valve closed
3/29/2012	6:49:05 PM	BCl3 valve closed
3/29/2012	6:49:06 PM	PH3 valve closed
3/29/2012	6:49:06 PM	SiCl4 pre valve closed
3/29/2012	6:49:06 PM	SiCl4 post valve closed
3/29/2012	6:49:06 PM	Bypass valve closed
3/29/2012	6:49:06 PM	Bubbler valve closed
3/29/2012	6:49:06 PM	Main Vac valve opened
3/29/2012	6:49:06 PM	Helium MFC set to  0.000000
3/29/2012	6:49:06 PM	H2 MFC set to  0.000000
3/29/2012	6:49:06 PM	BCl3 MFC set to  0.000000
3/29/2012	6:49:06 PM	PH3 MFC set to  0.000000
3/29/2012	6:49:06 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:49:06 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:49:06 PM	Tube furnace set to 150
3/29/2012	6:49:36 PM	H2 valve closed
3/29/2012	6:49:36 PM	BCl3 valve closed
3/29/2012	6:49:36 PM	PH3 valve closed
3/29/2012	6:49:36 PM	SiCl4 pre valve closed
3/29/2012	6:49:36 PM	SiCl4 post valve closed
3/29/2012	6:49:36 PM	Bypass valve closed
3/29/2012	6:49:36 PM	Bubbler valve closed
3/29/2012	6:49:36 PM	Helium valve opened
3/29/2012	6:49:36 PM	Main Vac valve opened
3/29/2012	6:49:36 PM	Helium MFC set to  20.000000
3/29/2012	6:49:36 PM	H2 MFC set to  0.000000
3/29/2012	6:49:36 PM	BCl3 MFC set to  0.000000
3/29/2012	6:49:36 PM	PH3 MFC set to  0.000000
3/29/2012	6:49:36 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:49:36 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:49:36 PM	Tube furnace set to 150
3/29/2012	6:50:06 PM	Helium valve closed
3/29/2012	6:50:06 PM	H2 valve closed
3/29/2012	6:50:06 PM	BCl3 valve closed
3/29/2012	6:50:06 PM	PH3 valve closed
3/29/2012	6:50:06 PM	SiCl4 pre valve closed
3/29/2012	6:50:06 PM	SiCl4 post valve closed
3/29/2012	6:50:06 PM	Bypass valve closed
3/29/2012	6:50:06 PM	Bubbler valve closed
3/29/2012	6:50:06 PM	Main Vac valve opened
3/29/2012	6:50:06 PM	Helium MFC set to  0.000000
3/29/2012	6:50:06 PM	H2 MFC set to  0.000000
3/29/2012	6:50:06 PM	BCl3 MFC set to  0.000000
3/29/2012	6:50:06 PM	PH3 MFC set to  0.000000
3/29/2012	6:50:06 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:50:06 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:50:06 PM	Tube furnace set to 150
3/29/2012	6:50:36 PM	H2 valve closed
3/29/2012	6:50:36 PM	BCl3 valve closed
3/29/2012	6:50:36 PM	PH3 valve closed
3/29/2012	6:50:36 PM	SiCl4 pre valve closed
3/29/2012	6:50:36 PM	SiCl4 post valve closed
3/29/2012	6:50:36 PM	Bypass valve closed
3/29/2012	6:50:36 PM	Bubbler valve closed
3/29/2012	6:50:36 PM	Helium valve opened
3/29/2012	6:50:36 PM	Main Vac valve opened
3/29/2012	6:50:36 PM	Helium MFC set to  20.000000
3/29/2012	6:50:36 PM	H2 MFC set to  0.000000
3/29/2012	6:50:36 PM	BCl3 MFC set to  0.000000
3/29/2012	6:50:36 PM	PH3 MFC set to  0.000000
3/29/2012	6:50:36 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:50:36 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:50:36 PM	Tube furnace set to 150
3/29/2012	6:51:06 PM	Helium valve closed
3/29/2012	6:51:06 PM	H2 valve closed
3/29/2012	6:51:06 PM	BCl3 valve closed
3/29/2012	6:51:06 PM	PH3 valve closed
3/29/2012	6:51:06 PM	SiCl4 pre valve closed
3/29/2012	6:51:06 PM	SiCl4 post valve closed
3/29/2012	6:51:06 PM	Bypass valve closed
3/29/2012	6:51:06 PM	Bubbler valve closed
3/29/2012	6:51:06 PM	Main Vac valve opened
3/29/2012	6:51:06 PM	Helium MFC set to  0.000000
3/29/2012	6:51:06 PM	H2 MFC set to  0.000000
3/29/2012	6:51:06 PM	BCl3 MFC set to  0.000000
3/29/2012	6:51:06 PM	PH3 MFC set to  0.000000
3/29/2012	6:51:06 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:51:06 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:51:07 PM	Tube furnace set to 150
3/29/2012	6:51:37 PM	H2 valve closed
3/29/2012	6:51:37 PM	BCl3 valve closed
3/29/2012	6:51:37 PM	PH3 valve closed
3/29/2012	6:51:37 PM	SiCl4 pre valve closed
3/29/2012	6:51:37 PM	SiCl4 post valve closed
3/29/2012	6:51:37 PM	Bypass valve closed
3/29/2012	6:51:37 PM	Bubbler valve closed
3/29/2012	6:51:37 PM	Helium valve opened
3/29/2012	6:51:37 PM	Main Vac valve opened
3/29/2012	6:51:37 PM	Helium MFC set to  20.000000
3/29/2012	6:51:37 PM	H2 MFC set to  0.000000
3/29/2012	6:51:37 PM	BCl3 MFC set to  0.000000
3/29/2012	6:51:37 PM	PH3 MFC set to  0.000000
3/29/2012	6:51:37 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:51:37 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:51:37 PM	Tube furnace set to 150
3/29/2012	6:52:07 PM	Helium valve closed
3/29/2012	6:52:07 PM	H2 valve closed
3/29/2012	6:52:07 PM	BCl3 valve closed
3/29/2012	6:52:07 PM	PH3 valve closed
3/29/2012	6:52:07 PM	SiCl4 pre valve closed
3/29/2012	6:52:07 PM	SiCl4 post valve closed
3/29/2012	6:52:07 PM	Bypass valve closed
3/29/2012	6:52:07 PM	Bubbler valve closed
3/29/2012	6:52:07 PM	Main Vac valve opened
3/29/2012	6:52:07 PM	Helium MFC set to  0.000000
3/29/2012	6:52:07 PM	H2 MFC set to  0.000000
3/29/2012	6:52:07 PM	BCl3 MFC set to  0.000000
3/29/2012	6:52:07 PM	PH3 MFC set to  0.000000
3/29/2012	6:52:07 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:52:07 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:52:07 PM	Tube furnace set to 150
3/29/2012	6:52:08 PM	Run finished at 6:52 PM
3/29/2012	6:52:38 PM	Recipe started at 6:52 PM
3/29/2012	6:52:38 PM	Helium valve closed
3/29/2012	6:52:38 PM	H2 valve closed
3/29/2012	6:52:38 PM	BCl3 valve closed
3/29/2012	6:52:38 PM	PH3 valve closed
3/29/2012	6:52:38 PM	SiCl4 pre valve closed
3/29/2012	6:52:38 PM	SiCl4 post valve closed
3/29/2012	6:52:38 PM	Bypass valve closed
3/29/2012	6:52:38 PM	Bubbler valve closed
3/29/2012	6:52:38 PM	Main Vac valve opened
3/29/2012	6:52:38 PM	Helium MFC set to  0.000000
3/29/2012	6:52:38 PM	H2 MFC set to  0.000000
3/29/2012	6:52:38 PM	BCl3 MFC set to  0.000000
3/29/2012	6:52:38 PM	PH3 MFC set to  0.000000
3/29/2012	6:52:38 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:52:38 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:52:38 PM	Tube furnace set to 150
3/29/2012	6:53:08 PM	H2 valve closed
3/29/2012	6:53:08 PM	BCl3 valve closed
3/29/2012	6:53:08 PM	PH3 valve closed
3/29/2012	6:53:08 PM	SiCl4 pre valve closed
3/29/2012	6:53:08 PM	SiCl4 post valve closed
3/29/2012	6:53:08 PM	Bypass valve closed
3/29/2012	6:53:08 PM	Bubbler valve closed
3/29/2012	6:53:08 PM	Helium valve opened
3/29/2012	6:53:08 PM	Main Vac valve opened
3/29/2012	6:53:08 PM	Helium MFC set to  20.000000
3/29/2012	6:53:08 PM	H2 MFC set to  0.000000
3/29/2012	6:53:08 PM	BCl3 MFC set to  0.000000
3/29/2012	6:53:08 PM	PH3 MFC set to  0.000000
3/29/2012	6:53:08 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:53:08 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:53:08 PM	Tube furnace set to 150
3/29/2012	6:53:39 PM	Helium valve closed
3/29/2012	6:53:39 PM	H2 valve closed
3/29/2012	6:53:39 PM	BCl3 valve closed
3/29/2012	6:53:39 PM	PH3 valve closed
3/29/2012	6:53:39 PM	SiCl4 pre valve closed
3/29/2012	6:53:39 PM	SiCl4 post valve closed
3/29/2012	6:53:39 PM	Bypass valve closed
3/29/2012	6:53:39 PM	Bubbler valve closed
3/29/2012	6:53:39 PM	Main Vac valve opened
3/29/2012	6:53:39 PM	Helium MFC set to  0.000000
3/29/2012	6:53:39 PM	H2 MFC set to  0.000000
3/29/2012	6:53:39 PM	BCl3 MFC set to  0.000000
3/29/2012	6:53:39 PM	PH3 MFC set to  0.000000
3/29/2012	6:53:39 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:53:39 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:53:39 PM	Tube furnace set to 150
3/29/2012	6:54:09 PM	H2 valve closed
3/29/2012	6:54:09 PM	BCl3 valve closed
3/29/2012	6:54:09 PM	PH3 valve closed
3/29/2012	6:54:09 PM	SiCl4 pre valve closed
3/29/2012	6:54:09 PM	SiCl4 post valve closed
3/29/2012	6:54:09 PM	Bypass valve closed
3/29/2012	6:54:09 PM	Bubbler valve closed
3/29/2012	6:54:09 PM	Helium valve opened
3/29/2012	6:54:09 PM	Main Vac valve opened
3/29/2012	6:54:09 PM	Helium MFC set to  20.000000
3/29/2012	6:54:09 PM	H2 MFC set to  0.000000
3/29/2012	6:54:09 PM	BCl3 MFC set to  0.000000
3/29/2012	6:54:09 PM	PH3 MFC set to  0.000000
3/29/2012	6:54:09 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:54:09 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:54:09 PM	Tube furnace set to 150
3/29/2012	6:54:39 PM	Helium valve closed
3/29/2012	6:54:39 PM	H2 valve closed
3/29/2012	6:54:39 PM	BCl3 valve closed
3/29/2012	6:54:39 PM	PH3 valve closed
3/29/2012	6:54:39 PM	SiCl4 pre valve closed
3/29/2012	6:54:39 PM	SiCl4 post valve closed
3/29/2012	6:54:39 PM	Bypass valve closed
3/29/2012	6:54:39 PM	Bubbler valve closed
3/29/2012	6:54:39 PM	Main Vac valve opened
3/29/2012	6:54:39 PM	Helium MFC set to  0.000000
3/29/2012	6:54:39 PM	H2 MFC set to  0.000000
3/29/2012	6:54:39 PM	BCl3 MFC set to  0.000000
3/29/2012	6:54:39 PM	PH3 MFC set to  0.000000
3/29/2012	6:54:39 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:54:39 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:54:39 PM	Tube furnace set to 150
3/29/2012	6:55:09 PM	H2 valve closed
3/29/2012	6:55:09 PM	BCl3 valve closed
3/29/2012	6:55:09 PM	PH3 valve closed
3/29/2012	6:55:09 PM	SiCl4 pre valve closed
3/29/2012	6:55:09 PM	SiCl4 post valve closed
3/29/2012	6:55:09 PM	Bypass valve closed
3/29/2012	6:55:09 PM	Bubbler valve closed
3/29/2012	6:55:09 PM	Helium valve opened
3/29/2012	6:55:09 PM	Main Vac valve opened
3/29/2012	6:55:09 PM	Helium MFC set to  20.000000
3/29/2012	6:55:09 PM	H2 MFC set to  0.000000
3/29/2012	6:55:09 PM	BCl3 MFC set to  0.000000
3/29/2012	6:55:09 PM	PH3 MFC set to  0.000000
3/29/2012	6:55:09 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:55:09 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:55:09 PM	Tube furnace set to 150
3/29/2012	6:55:39 PM	Helium valve closed
3/29/2012	6:55:39 PM	H2 valve closed
3/29/2012	6:55:39 PM	BCl3 valve closed
3/29/2012	6:55:39 PM	PH3 valve closed
3/29/2012	6:55:39 PM	SiCl4 pre valve closed
3/29/2012	6:55:40 PM	SiCl4 post valve closed
3/29/2012	6:55:40 PM	Bypass valve closed
3/29/2012	6:55:40 PM	Bubbler valve closed
3/29/2012	6:55:40 PM	Main Vac valve opened
3/29/2012	6:55:40 PM	Helium MFC set to  0.000000
3/29/2012	6:55:40 PM	H2 MFC set to  0.000000
3/29/2012	6:55:40 PM	BCl3 MFC set to  0.000000
3/29/2012	6:55:40 PM	PH3 MFC set to  0.000000
3/29/2012	6:55:40 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:55:40 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:55:40 PM	Tube furnace set to 150
3/29/2012	6:56:10 PM	H2 valve closed
3/29/2012	6:56:10 PM	BCl3 valve closed
3/29/2012	6:56:10 PM	PH3 valve closed
3/29/2012	6:56:10 PM	SiCl4 pre valve closed
3/29/2012	6:56:10 PM	SiCl4 post valve closed
3/29/2012	6:56:10 PM	Bypass valve closed
3/29/2012	6:56:10 PM	Bubbler valve closed
3/29/2012	6:56:10 PM	Helium valve opened
3/29/2012	6:56:10 PM	Main Vac valve opened
3/29/2012	6:56:10 PM	Helium MFC set to  20.000000
3/29/2012	6:56:10 PM	H2 MFC set to  0.000000
3/29/2012	6:56:10 PM	BCl3 MFC set to  0.000000
3/29/2012	6:56:10 PM	PH3 MFC set to  0.000000
3/29/2012	6:56:10 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:56:10 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:56:10 PM	Tube furnace set to 150
3/29/2012	6:56:40 PM	Helium valve closed
3/29/2012	6:56:40 PM	H2 valve closed
3/29/2012	6:56:40 PM	BCl3 valve closed
3/29/2012	6:56:40 PM	PH3 valve closed
3/29/2012	6:56:40 PM	SiCl4 pre valve closed
3/29/2012	6:56:40 PM	SiCl4 post valve closed
3/29/2012	6:56:40 PM	Bypass valve closed
3/29/2012	6:56:40 PM	Bubbler valve closed
3/29/2012	6:56:40 PM	Main Vac valve opened
3/29/2012	6:56:40 PM	Helium MFC set to  0.000000
3/29/2012	6:56:40 PM	H2 MFC set to  0.000000
3/29/2012	6:56:40 PM	BCl3 MFC set to  0.000000
3/29/2012	6:56:40 PM	PH3 MFC set to  0.000000
3/29/2012	6:56:40 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:56:40 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:56:40 PM	Tube furnace set to 150
3/29/2012	6:57:10 PM	H2 valve closed
3/29/2012	6:57:10 PM	BCl3 valve closed
3/29/2012	6:57:10 PM	PH3 valve closed
3/29/2012	6:57:10 PM	SiCl4 pre valve closed
3/29/2012	6:57:10 PM	SiCl4 post valve closed
3/29/2012	6:57:10 PM	Bypass valve closed
3/29/2012	6:57:10 PM	Bubbler valve closed
3/29/2012	6:57:10 PM	Helium valve opened
3/29/2012	6:57:10 PM	Main Vac valve opened
3/29/2012	6:57:10 PM	Helium MFC set to  20.000000
3/29/2012	6:57:10 PM	H2 MFC set to  0.000000
3/29/2012	6:57:10 PM	BCl3 MFC set to  0.000000
3/29/2012	6:57:10 PM	PH3 MFC set to  0.000000
3/29/2012	6:57:10 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:57:10 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:57:10 PM	Tube furnace set to 150
3/29/2012	6:57:40 PM	Helium valve closed
3/29/2012	6:57:40 PM	H2 valve closed
3/29/2012	6:57:40 PM	BCl3 valve closed
3/29/2012	6:57:40 PM	PH3 valve closed
3/29/2012	6:57:40 PM	SiCl4 pre valve closed
3/29/2012	6:57:40 PM	SiCl4 post valve closed
3/29/2012	6:57:40 PM	Bypass valve closed
3/29/2012	6:57:40 PM	Bubbler valve closed
3/29/2012	6:57:40 PM	Main Vac valve opened
3/29/2012	6:57:40 PM	Helium MFC set to  0.000000
3/29/2012	6:57:40 PM	H2 MFC set to  0.000000
3/29/2012	6:57:40 PM	BCl3 MFC set to  0.000000
3/29/2012	6:57:40 PM	PH3 MFC set to  0.000000
3/29/2012	6:57:40 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:57:40 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:57:41 PM	Tube furnace set to 150
3/29/2012	6:58:11 PM	H2 valve closed
3/29/2012	6:58:11 PM	BCl3 valve closed
3/29/2012	6:58:11 PM	PH3 valve closed
3/29/2012	6:58:11 PM	SiCl4 pre valve closed
3/29/2012	6:58:11 PM	SiCl4 post valve closed
3/29/2012	6:58:11 PM	Bypass valve closed
3/29/2012	6:58:11 PM	Bubbler valve closed
3/29/2012	6:58:11 PM	Helium valve opened
3/29/2012	6:58:11 PM	Main Vac valve opened
3/29/2012	6:58:11 PM	Helium MFC set to  20.000000
3/29/2012	6:58:11 PM	H2 MFC set to  0.000000
3/29/2012	6:58:11 PM	BCl3 MFC set to  0.000000
3/29/2012	6:58:11 PM	PH3 MFC set to  0.000000
3/29/2012	6:58:11 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:58:11 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:58:11 PM	Tube furnace set to 150
3/29/2012	6:58:41 PM	Helium valve closed
3/29/2012	6:58:41 PM	H2 valve closed
3/29/2012	6:58:41 PM	BCl3 valve closed
3/29/2012	6:58:41 PM	PH3 valve closed
3/29/2012	6:58:41 PM	SiCl4 pre valve closed
3/29/2012	6:58:41 PM	SiCl4 post valve closed
3/29/2012	6:58:41 PM	Bypass valve closed
3/29/2012	6:58:41 PM	Bubbler valve closed
3/29/2012	6:58:41 PM	Main Vac valve opened
3/29/2012	6:58:41 PM	Helium MFC set to  0.000000
3/29/2012	6:58:41 PM	H2 MFC set to  0.000000
3/29/2012	6:58:41 PM	BCl3 MFC set to  0.000000
3/29/2012	6:58:41 PM	PH3 MFC set to  0.000000
3/29/2012	6:58:41 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:58:41 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:58:41 PM	Tube furnace set to 150
3/29/2012	6:59:11 PM	H2 valve closed
3/29/2012	6:59:11 PM	BCl3 valve closed
3/29/2012	6:59:11 PM	PH3 valve closed
3/29/2012	6:59:11 PM	SiCl4 pre valve closed
3/29/2012	6:59:11 PM	SiCl4 post valve closed
3/29/2012	6:59:11 PM	Bypass valve closed
3/29/2012	6:59:11 PM	Bubbler valve closed
3/29/2012	6:59:11 PM	Helium valve opened
3/29/2012	6:59:11 PM	Main Vac valve opened
3/29/2012	6:59:11 PM	Helium MFC set to  20.000000
3/29/2012	6:59:11 PM	H2 MFC set to  0.000000
3/29/2012	6:59:11 PM	BCl3 MFC set to  0.000000
3/29/2012	6:59:11 PM	PH3 MFC set to  0.000000
3/29/2012	6:59:11 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:59:11 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:59:11 PM	Tube furnace set to 150
3/29/2012	6:59:41 PM	Helium valve closed
3/29/2012	6:59:41 PM	H2 valve closed
3/29/2012	6:59:41 PM	BCl3 valve closed
3/29/2012	6:59:41 PM	PH3 valve closed
3/29/2012	6:59:41 PM	SiCl4 pre valve closed
3/29/2012	6:59:41 PM	SiCl4 post valve closed
3/29/2012	6:59:41 PM	Bypass valve closed
3/29/2012	6:59:41 PM	Bubbler valve closed
3/29/2012	6:59:41 PM	Main Vac valve opened
3/29/2012	6:59:41 PM	Helium MFC set to  0.000000
3/29/2012	6:59:41 PM	H2 MFC set to  0.000000
3/29/2012	6:59:41 PM	BCl3 MFC set to  0.000000
3/29/2012	6:59:41 PM	PH3 MFC set to  0.000000
3/29/2012	6:59:41 PM	SiCl4 MFC set to  0.000000
3/29/2012	6:59:41 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	6:59:42 PM	Tube furnace set to 150
3/29/2012	7:00:12 PM	H2 valve closed
3/29/2012	7:00:12 PM	BCl3 valve closed
3/29/2012	7:00:12 PM	PH3 valve closed
3/29/2012	7:00:12 PM	SiCl4 pre valve closed
3/29/2012	7:00:12 PM	SiCl4 post valve closed
3/29/2012	7:00:12 PM	Bypass valve closed
3/29/2012	7:00:12 PM	Bubbler valve closed
3/29/2012	7:00:12 PM	Helium valve opened
3/29/2012	7:00:12 PM	Main Vac valve opened
3/29/2012	7:00:12 PM	Helium MFC set to  20.000000
3/29/2012	7:00:12 PM	H2 MFC set to  0.000000
3/29/2012	7:00:12 PM	BCl3 MFC set to  0.000000
3/29/2012	7:00:12 PM	PH3 MFC set to  0.000000
3/29/2012	7:00:12 PM	SiCl4 MFC set to  0.000000
3/29/2012	7:00:12 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	7:00:12 PM	Tube furnace set to 150
3/29/2012	7:00:42 PM	Helium valve closed
3/29/2012	7:00:42 PM	H2 valve closed
3/29/2012	7:00:42 PM	BCl3 valve closed
3/29/2012	7:00:42 PM	PH3 valve closed
3/29/2012	7:00:42 PM	SiCl4 pre valve closed
3/29/2012	7:00:42 PM	SiCl4 post valve closed
3/29/2012	7:00:42 PM	Bypass valve closed
3/29/2012	7:00:42 PM	Bubbler valve closed
3/29/2012	7:00:42 PM	Main Vac valve opened
3/29/2012	7:00:42 PM	Helium MFC set to  0.000000
3/29/2012	7:00:42 PM	H2 MFC set to  0.000000
3/29/2012	7:00:42 PM	BCl3 MFC set to  0.000000
3/29/2012	7:00:42 PM	PH3 MFC set to  0.000000
3/29/2012	7:00:42 PM	SiCl4 MFC set to  0.000000
3/29/2012	7:00:42 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	7:00:42 PM	Tube furnace set to 150
3/29/2012	7:01:12 PM	H2 valve closed
3/29/2012	7:01:12 PM	BCl3 valve closed
3/29/2012	7:01:12 PM	PH3 valve closed
3/29/2012	7:01:12 PM	SiCl4 pre valve closed
3/29/2012	7:01:12 PM	SiCl4 post valve closed
3/29/2012	7:01:12 PM	Bypass valve closed
3/29/2012	7:01:12 PM	Bubbler valve closed
3/29/2012	7:01:12 PM	Helium valve opened
3/29/2012	7:01:12 PM	Main Vac valve opened
3/29/2012	7:01:12 PM	Helium MFC set to  20.000000
3/29/2012	7:01:12 PM	H2 MFC set to  0.000000
3/29/2012	7:01:12 PM	BCl3 MFC set to  0.000000
3/29/2012	7:01:12 PM	PH3 MFC set to  0.000000
3/29/2012	7:01:12 PM	SiCl4 MFC set to  0.000000
3/29/2012	7:01:12 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	7:01:12 PM	Tube furnace set to 150
3/29/2012	7:01:42 PM	Helium valve closed
3/29/2012	7:01:42 PM	H2 valve closed
3/29/2012	7:01:42 PM	BCl3 valve closed
3/29/2012	7:01:42 PM	PH3 valve closed
3/29/2012	7:01:42 PM	SiCl4 pre valve closed
3/29/2012	7:01:42 PM	SiCl4 post valve closed
3/29/2012	7:01:42 PM	Bypass valve closed
3/29/2012	7:01:42 PM	Bubbler valve closed
3/29/2012	7:01:42 PM	Main Vac valve opened
3/29/2012	7:01:42 PM	Helium MFC set to  0.000000
3/29/2012	7:01:42 PM	H2 MFC set to  0.000000
3/29/2012	7:01:42 PM	BCl3 MFC set to  0.000000
3/29/2012	7:01:42 PM	PH3 MFC set to  0.000000
3/29/2012	7:01:42 PM	SiCl4 MFC set to  0.000000
3/29/2012	7:01:42 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	7:01:43 PM	Tube furnace set to 150
3/29/2012	7:02:13 PM	H2 valve closed
3/29/2012	7:02:13 PM	BCl3 valve closed
3/29/2012	7:02:13 PM	PH3 valve closed
3/29/2012	7:02:13 PM	SiCl4 pre valve closed
3/29/2012	7:02:13 PM	SiCl4 post valve closed
3/29/2012	7:02:13 PM	Bypass valve closed
3/29/2012	7:02:13 PM	Bubbler valve closed
3/29/2012	7:02:13 PM	Helium valve opened
3/29/2012	7:02:13 PM	Main Vac valve opened
3/29/2012	7:02:13 PM	Helium MFC set to  20.000000
3/29/2012	7:02:13 PM	H2 MFC set to  0.000000
3/29/2012	7:02:13 PM	BCl3 MFC set to  0.000000
3/29/2012	7:02:13 PM	PH3 MFC set to  0.000000
3/29/2012	7:02:13 PM	SiCl4 MFC set to  0.000000
3/29/2012	7:02:13 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	7:02:13 PM	Tube furnace set to 150
3/29/2012	7:02:43 PM	Helium valve closed
3/29/2012	7:02:43 PM	H2 valve closed
3/29/2012	7:02:43 PM	BCl3 valve closed
3/29/2012	7:02:43 PM	PH3 valve closed
3/29/2012	7:02:43 PM	SiCl4 pre valve closed
3/29/2012	7:02:43 PM	SiCl4 post valve closed
3/29/2012	7:02:43 PM	Bypass valve closed
3/29/2012	7:02:43 PM	Bubbler valve closed
3/29/2012	7:02:43 PM	Main Vac valve opened
3/29/2012	7:02:43 PM	Helium MFC set to  0.000000
3/29/2012	7:02:43 PM	H2 MFC set to  0.000000
3/29/2012	7:02:43 PM	BCl3 MFC set to  0.000000
3/29/2012	7:02:43 PM	PH3 MFC set to  0.000000
3/29/2012	7:02:43 PM	SiCl4 MFC set to  0.000000
3/29/2012	7:02:43 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	7:02:43 PM	Tube furnace set to 150
3/29/2012	7:02:44 PM	Run finished at 7:02 PM
3/29/2012	7:03:37 PM	Main Vac valve closed
3/29/2012	7:03:48 PM	Main Vac valve opened
3/29/2012	7:04:31 PM	Recipe started at 7:04 PM
3/29/2012	7:04:31 PM	Helium valve closed
3/29/2012	7:04:31 PM	H2 valve closed
3/29/2012	7:04:31 PM	BCl3 valve closed
3/29/2012	7:04:31 PM	PH3 valve closed
3/29/2012	7:04:31 PM	SiCl4 pre valve closed
3/29/2012	7:04:31 PM	SiCl4 post valve closed
3/29/2012	7:04:31 PM	Main Vac valve closed
3/29/2012	7:04:31 PM	Bypass valve closed
3/29/2012	7:04:31 PM	Bubbler valve closed
3/29/2012	7:04:31 PM	Helium MFC set to  0.000000
3/29/2012	7:04:31 PM	H2 MFC set to  0.000000
3/29/2012	7:04:31 PM	BCl3 MFC set to  0.000000
3/29/2012	7:04:31 PM	PH3 MFC set to  0.000000
3/29/2012	7:04:31 PM	SiCl4 MFC set to  0.000000
3/29/2012	7:04:31 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	7:04:31 PM	Tube furnace set to 0
3/29/2012	7:04:34 PM	Helium valve closed
3/29/2012	7:04:34 PM	BCl3 valve closed
3/29/2012	7:04:34 PM	PH3 valve closed
3/29/2012	7:04:34 PM	SiCl4 pre valve closed
3/29/2012	7:04:34 PM	SiCl4 post valve closed
3/29/2012	7:04:34 PM	Main Vac valve closed
3/29/2012	7:04:34 PM	Bypass valve closed
3/29/2012	7:04:34 PM	Bubbler valve closed
3/29/2012	7:04:34 PM	H2 valve opened
3/29/2012	7:04:34 PM	Helium MFC set to  0.000000
3/29/2012	7:04:34 PM	H2 MFC set to  500.000000
3/29/2012	7:04:34 PM	BCl3 MFC set to  0.000000
3/29/2012	7:04:34 PM	PH3 MFC set to  0.000000
3/29/2012	7:04:34 PM	SiCl4 MFC set to  0.000000
3/29/2012	7:04:34 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	7:04:34 PM	Tube furnace set to 0
3/29/2012	7:05:38 PM	Helium valve closed
3/29/2012	7:05:38 PM	BCl3 valve closed
3/29/2012	7:05:38 PM	PH3 valve closed
3/29/2012	7:05:38 PM	SiCl4 pre valve closed
3/29/2012	7:05:38 PM	SiCl4 post valve closed
3/29/2012	7:05:38 PM	Main Vac valve closed
3/29/2012	7:05:38 PM	Bypass valve closed
3/29/2012	7:05:38 PM	H2 valve opened
3/29/2012	7:05:38 PM	Bubbler valve opened
3/29/2012	7:05:38 PM	Helium MFC set to  0.000000
3/29/2012	7:05:38 PM	H2 MFC set to  500.000000
3/29/2012	7:05:38 PM	BCl3 MFC set to  0.000000
3/29/2012	7:05:38 PM	PH3 MFC set to  0.000000
3/29/2012	7:05:38 PM	SiCl4 MFC set to  0.000000
3/29/2012	7:05:38 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	7:05:38 PM	Tube furnace set to 0
3/29/2012	7:05:39 PM	Helium valve closed
3/29/2012	7:05:39 PM	BCl3 valve closed
3/29/2012	7:05:39 PM	PH3 valve closed
3/29/2012	7:05:39 PM	SiCl4 pre valve closed
3/29/2012	7:05:39 PM	SiCl4 post valve closed
3/29/2012	7:05:39 PM	Main Vac valve closed
3/29/2012	7:05:39 PM	Bypass valve closed
3/29/2012	7:05:39 PM	H2 valve opened
3/29/2012	7:05:39 PM	Bubbler valve opened
3/29/2012	7:05:39 PM	Helium MFC set to  0.000000
3/29/2012	7:05:39 PM	H2 MFC set to  450.000000
3/29/2012	7:05:39 PM	BCl3 MFC set to  0.000000
3/29/2012	7:05:39 PM	PH3 MFC set to  0.000000
3/29/2012	7:05:39 PM	SiCl4 MFC set to  0.000000
3/29/2012	7:05:39 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	7:05:39 PM	Tube furnace set to 1000
3/29/2012	7:30:39 PM	Helium valve closed
3/29/2012	7:30:39 PM	PH3 valve closed
3/29/2012	7:30:39 PM	Main Vac valve closed
3/29/2012	7:30:39 PM	Bypass valve closed
3/29/2012	7:30:39 PM	H2 valve opened
3/29/2012	7:30:39 PM	BCl3 valve opened
3/29/2012	7:30:39 PM	SiCl4 pre valve opened
3/29/2012	7:30:39 PM	SiCl4 post valve opened
3/29/2012	7:30:39 PM	Bubbler valve opened
3/29/2012	7:30:39 PM	Helium MFC set to  0.000000
3/29/2012	7:30:39 PM	H2 MFC set to  450.000000
3/29/2012	7:30:39 PM	BCl3 MFC set to  1.500000
3/29/2012	7:30:39 PM	PH3 MFC set to  0.000000
3/29/2012	7:30:39 PM	SiCl4 MFC set to  50.000000
3/29/2012	7:30:39 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	7:30:39 PM	Tube furnace set to 1000
3/29/2012	7:38:39 PM	Helium valve closed
3/29/2012	7:38:39 PM	BCl3 valve closed
3/29/2012	7:38:39 PM	PH3 valve closed
3/29/2012	7:38:39 PM	SiCl4 pre valve closed
3/29/2012	7:38:39 PM	SiCl4 post valve closed
3/29/2012	7:38:39 PM	Main Vac valve closed
3/29/2012	7:38:39 PM	Bypass valve closed
3/29/2012	7:38:39 PM	H2 valve opened
3/29/2012	7:38:39 PM	Bubbler valve opened
3/29/2012	7:38:39 PM	Helium MFC set to  0.000000
3/29/2012	7:38:39 PM	H2 MFC set to  500.000000
3/29/2012	7:38:39 PM	BCl3 MFC set to  0.000000
3/29/2012	7:38:40 PM	PH3 MFC set to  0.000000
3/29/2012	7:38:40 PM	SiCl4 MFC set to  0.000000
3/29/2012	7:38:40 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	7:38:40 PM	Tube furnace set to 750
3/29/2012	7:43:40 PM	H2 valve closed
3/29/2012	7:43:40 PM	BCl3 valve closed
3/29/2012	7:43:40 PM	PH3 valve closed
3/29/2012	7:43:40 PM	SiCl4 pre valve closed
3/29/2012	7:43:40 PM	SiCl4 post valve closed
3/29/2012	7:43:40 PM	Main Vac valve closed
3/29/2012	7:43:40 PM	Bypass valve closed
3/29/2012	7:43:40 PM	Helium valve opened
3/29/2012	7:43:40 PM	Bubbler valve opened
3/29/2012	7:43:40 PM	Helium MFC set to  500.000000
3/29/2012	7:43:40 PM	H2 MFC set to  0.000000
3/29/2012	7:43:40 PM	BCl3 MFC set to  0.000000
3/29/2012	7:43:40 PM	PH3 MFC set to  0.000000
3/29/2012	7:43:40 PM	SiCl4 MFC set to  0.000000
3/29/2012	7:43:40 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	7:43:40 PM	Tube furnace set to 0
3/29/2012	8:03:40 PM	Helium valve closed
3/29/2012	8:03:40 PM	H2 valve closed
3/29/2012	8:03:40 PM	BCl3 valve closed
3/29/2012	8:03:40 PM	PH3 valve closed
3/29/2012	8:03:40 PM	SiCl4 pre valve closed
3/29/2012	8:03:40 PM	SiCl4 post valve closed
3/29/2012	8:03:40 PM	Main Vac valve closed
3/29/2012	8:03:40 PM	Bypass valve closed
3/29/2012	8:03:40 PM	Bubbler valve closed
3/29/2012	8:03:40 PM	Helium MFC set to  0.000000
3/29/2012	8:03:40 PM	H2 MFC set to  0.000000
3/29/2012	8:03:40 PM	BCl3 MFC set to  0.000000
3/29/2012	8:03:40 PM	PH3 MFC set to  0.000000
3/29/2012	8:03:40 PM	SiCl4 MFC set to  0.000000
3/29/2012	8:03:40 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	8:03:40 PM	Tube furnace set to 0
3/29/2012	8:03:41 PM	Run finished at 8:03 PM
3/29/2012	8:54:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2012	8:54:24 PM	Recipe started at 8:54 PM
3/29/2012	8:54:24 PM	Helium valve closed
3/29/2012	8:54:24 PM	H2 valve closed
3/29/2012	8:54:24 PM	BCl3 valve closed
3/29/2012	8:54:24 PM	PH3 valve closed
3/29/2012	8:54:24 PM	SiCl4 pre valve closed
3/29/2012	8:54:24 PM	SiCl4 post valve closed
3/29/2012	8:54:24 PM	Main Vac valve closed
3/29/2012	8:54:24 PM	Bypass valve closed
3/29/2012	8:54:24 PM	Bubbler valve closed
3/29/2012	8:54:24 PM	Helium MFC set to  0.000000
3/29/2012	8:54:24 PM	H2 MFC set to  0.000000
3/29/2012	8:54:24 PM	BCl3 MFC set to  0.000000
3/29/2012	8:54:24 PM	PH3 MFC set to  0.000000
3/29/2012	8:54:24 PM	SiCl4 MFC set to  0.000000
3/29/2012	8:54:24 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	8:54:24 PM	Tube furnace set to 0
3/29/2012	8:54:27 PM	H2 valve closed
3/29/2012	8:54:27 PM	BCl3 valve closed
3/29/2012	8:54:27 PM	PH3 valve closed
3/29/2012	8:54:27 PM	SiCl4 pre valve closed
3/29/2012	8:54:27 PM	SiCl4 post valve closed
3/29/2012	8:54:27 PM	Main Vac valve closed
3/29/2012	8:54:27 PM	Bypass valve closed
3/29/2012	8:54:27 PM	Bubbler valve closed
3/29/2012	8:54:27 PM	Helium valve opened
3/29/2012	8:54:27 PM	Helium MFC set to  500.000000
3/29/2012	8:54:27 PM	H2 MFC set to  0.000000
3/29/2012	8:54:27 PM	BCl3 MFC set to  0.000000
3/29/2012	8:54:27 PM	PH3 MFC set to  0.000000
3/29/2012	8:54:27 PM	SiCl4 MFC set to  0.000000
3/29/2012	8:54:27 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	8:54:27 PM	Tube furnace set to 0
3/29/2012	8:54:29 PM	Helium valve closed
3/29/2012	8:54:29 PM	H2 valve closed
3/29/2012	8:54:29 PM	BCl3 valve closed
3/29/2012	8:54:29 PM	PH3 valve closed
3/29/2012	8:54:29 PM	SiCl4 pre valve closed
3/29/2012	8:54:29 PM	SiCl4 post valve closed
3/29/2012	8:54:29 PM	Main Vac valve closed
3/29/2012	8:54:29 PM	Bypass valve closed
3/29/2012	8:54:29 PM	Bubbler valve closed
3/29/2012	8:54:29 PM	Helium MFC set to  0.000000
3/29/2012	8:54:29 PM	H2 MFC set to  0.000000
3/29/2012	8:54:29 PM	BCl3 MFC set to  0.000000
3/29/2012	8:54:29 PM	PH3 MFC set to  0.000000
3/29/2012	8:54:29 PM	SiCl4 MFC set to  0.000000
3/29/2012	8:54:29 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	8:54:29 PM	Tube furnace set to 0
3/29/2012	8:54:30 PM	Run finished at 8:54 PM
3/29/2012	8:54:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/29/2012	9:00:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2012	9:00:56 PM	Recipe started at 9:00 PM
3/29/2012	9:00:56 PM	Helium valve closed
3/29/2012	9:00:56 PM	H2 valve closed
3/29/2012	9:00:56 PM	BCl3 valve closed
3/29/2012	9:00:56 PM	PH3 valve closed
3/29/2012	9:00:56 PM	SiCl4 pre valve closed
3/29/2012	9:00:56 PM	SiCl4 post valve closed
3/29/2012	9:00:56 PM	Main Vac valve closed
3/29/2012	9:00:56 PM	Bubbler valve closed
3/29/2012	9:00:56 PM	Bypass valve opened
3/29/2012	9:00:56 PM	Helium MFC set to  0.000000
3/29/2012	9:00:57 PM	H2 MFC set to  0.000000
3/29/2012	9:00:57 PM	BCl3 MFC set to  0.000000
3/29/2012	9:00:57 PM	PH3 MFC set to  0.000000
3/29/2012	9:00:57 PM	SiCl4 MFC set to  0.000000
3/29/2012	9:00:57 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:00:57 PM	Tube furnace set to 0
3/29/2012	9:01:59 PM	Helium valve closed
3/29/2012	9:01:59 PM	H2 valve closed
3/29/2012	9:01:59 PM	BCl3 valve closed
3/29/2012	9:01:59 PM	PH3 valve closed
3/29/2012	9:01:59 PM	SiCl4 pre valve closed
3/29/2012	9:01:59 PM	SiCl4 post valve closed
3/29/2012	9:01:59 PM	Main Vac valve closed
3/29/2012	9:01:59 PM	Bubbler valve closed
3/29/2012	9:01:59 PM	Bypass valve opened
3/29/2012	9:01:59 PM	Helium MFC set to  0.000000
3/29/2012	9:01:59 PM	H2 MFC set to  0.000000
3/29/2012	9:01:59 PM	BCl3 MFC set to  0.000000
3/29/2012	9:01:59 PM	PH3 MFC set to  0.000000
3/29/2012	9:02:00 PM	SiCl4 MFC set to  0.000000
3/29/2012	9:02:00 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:02:00 PM	Tube furnace set to 0
3/29/2012	9:02:06 PM	Helium valve closed
3/29/2012	9:02:06 PM	H2 valve closed
3/29/2012	9:02:06 PM	BCl3 valve closed
3/29/2012	9:02:06 PM	PH3 valve closed
3/29/2012	9:02:06 PM	SiCl4 pre valve closed
3/29/2012	9:02:06 PM	SiCl4 post valve closed
3/29/2012	9:02:06 PM	Bypass valve closed
3/29/2012	9:02:06 PM	Bubbler valve closed
3/29/2012	9:02:06 PM	Main Vac valve opened
3/29/2012	9:02:06 PM	Helium MFC set to  0.000000
3/29/2012	9:02:06 PM	H2 MFC set to  0.000000
3/29/2012	9:02:06 PM	BCl3 MFC set to  0.000000
3/29/2012	9:02:06 PM	PH3 MFC set to  0.000000
3/29/2012	9:02:06 PM	SiCl4 MFC set to  0.000000
3/29/2012	9:02:06 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:02:07 PM	Tube furnace set to 0
3/29/2012	9:02:08 PM	Run finished at 9:02 PM
3/29/2012	9:02:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/29/2012	9:14:25 PM	Recipe started at 9:14 PM
3/29/2012	9:14:25 PM	Helium valve closed
3/29/2012	9:14:25 PM	H2 valve closed
3/29/2012	9:14:25 PM	BCl3 valve closed
3/29/2012	9:14:25 PM	PH3 valve closed
3/29/2012	9:14:25 PM	SiCl4 pre valve closed
3/29/2012	9:14:25 PM	SiCl4 post valve closed
3/29/2012	9:14:25 PM	Bypass valve closed
3/29/2012	9:14:25 PM	Bubbler valve closed
3/29/2012	9:14:25 PM	Main Vac valve opened
3/29/2012	9:14:25 PM	Helium MFC set to  0.000000
3/29/2012	9:14:25 PM	H2 MFC set to  0.000000
3/29/2012	9:14:25 PM	BCl3 MFC set to  0.000000
3/29/2012	9:14:25 PM	PH3 MFC set to  0.000000
3/29/2012	9:14:25 PM	SiCl4 MFC set to  0.000000
3/29/2012	9:14:25 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:14:25 PM	Tube furnace set to 0
3/29/2012	9:19:30 PM	Run aborted at 9:19 PM
3/29/2012	9:19:30 PM	Helium valve closed
3/29/2012	9:19:30 PM	H2 valve closed
3/29/2012	9:19:30 PM	BCl3 valve closed
3/29/2012	9:19:30 PM	PH3 valve closed
3/29/2012	9:19:30 PM	SiCl4 pre valve closed
3/29/2012	9:19:30 PM	SiCl4 post valve closed
3/29/2012	9:19:30 PM	Bypass valve closed
3/29/2012	9:19:30 PM	Main Vac valve closed
3/29/2012	9:19:30 PM	Bubbler valve closed
3/29/2012	9:19:30 PM	Helium MFC set to  0.000000
3/29/2012	9:19:30 PM	H2 MFC set to  0.000000
3/29/2012	9:19:30 PM	BCl3 MFC set to  0.000000
3/29/2012	9:19:30 PM	PH3 MFC set to  0.000000
3/29/2012	9:19:30 PM	SiCl4 MFC set to  0.000000
3/29/2012	9:19:30 PM	Tube furnace set to 0
3/29/2012	9:19:34 PM	Main Vac valve opened
3/29/2012	9:20:34 PM	Recipe started at 9:20 PM
3/29/2012	9:20:34 PM	Helium valve closed
3/29/2012	9:20:34 PM	H2 valve closed
3/29/2012	9:20:34 PM	BCl3 valve closed
3/29/2012	9:20:34 PM	PH3 valve closed
3/29/2012	9:20:34 PM	SiCl4 pre valve closed
3/29/2012	9:20:34 PM	SiCl4 post valve closed
3/29/2012	9:20:34 PM	Bypass valve closed
3/29/2012	9:20:34 PM	Bubbler valve closed
3/29/2012	9:20:34 PM	Main Vac valve opened
3/29/2012	9:20:34 PM	Helium MFC set to  0.000000
3/29/2012	9:20:34 PM	H2 MFC set to  0.000000
3/29/2012	9:20:34 PM	BCl3 MFC set to  0.000000
3/29/2012	9:20:34 PM	PH3 MFC set to  0.000000
3/29/2012	9:20:34 PM	SiCl4 MFC set to  0.000000
3/29/2012	9:20:34 PM	Bypass solenoid MFC set to  0.000000
3/29/2012	9:20:34 PM	Tube furnace set to 0
